3/22/2011	9:26:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2011	9:26:51 AM	Recipe started at 9:26 AM
3/22/2011	9:26:51 AM	H2 valve closed
3/22/2011	9:26:51 AM	BCl3 valve closed
3/22/2011	9:26:51 AM	PH3 valve closed
3/22/2011	9:26:51 AM	SiCl4 pre valve closed
3/22/2011	9:26:51 AM	SiCl4 post valve closed
3/22/2011	9:26:51 AM	Main Vac valve closed
3/22/2011	9:26:51 AM	Bypass valve closed
3/22/2011	9:26:51 AM	Bubbler valve closed
3/22/2011	9:26:51 AM	Helium valve opened
3/22/2011	9:26:51 AM	Helium MFC set to  500.000000
3/22/2011	9:26:51 AM	H2 MFC set to  0.000000
3/22/2011	9:26:51 AM	BCl3 MFC set to  0.000000
3/22/2011	9:26:51 AM	PHl3 MFC set to  0.000000
3/22/2011	9:26:51 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:26:51 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:26:52 AM	Tube furnace set to 0
3/22/2011	9:28:12 AM	Helium valve closed
3/22/2011	9:28:12 AM	H2 valve closed
3/22/2011	9:28:12 AM	BCl3 valve closed
3/22/2011	9:28:12 AM	PH3 valve closed
3/22/2011	9:28:12 AM	SiCl4 pre valve closed
3/22/2011	9:28:12 AM	SiCl4 post valve closed
3/22/2011	9:28:12 AM	Main Vac valve closed
3/22/2011	9:28:12 AM	Bypass valve closed
3/22/2011	9:28:12 AM	Bubbler valve closed
3/22/2011	9:28:12 AM	Helium MFC set to  0.000000
3/22/2011	9:28:12 AM	H2 MFC set to  0.000000
3/22/2011	9:28:12 AM	BCl3 MFC set to  0.000000
3/22/2011	9:28:12 AM	PHl3 MFC set to  0.000000
3/22/2011	9:28:12 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:28:12 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:28:12 AM	Tube furnace set to 0
3/22/2011	9:28:12 AM	Run finished at 9:28 AM
3/22/2011	9:28:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2011	9:35:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	9:35:42 AM	Recipe started at 9:35 AM
3/22/2011	9:35:42 AM	Helium valve closed
3/22/2011	9:35:42 AM	H2 valve closed
3/22/2011	9:35:42 AM	BCl3 valve closed
3/22/2011	9:35:42 AM	PH3 valve closed
3/22/2011	9:35:42 AM	SiCl4 pre valve closed
3/22/2011	9:35:42 AM	SiCl4 post valve closed
3/22/2011	9:35:42 AM	Main Vac valve closed
3/22/2011	9:35:42 AM	Bubbler valve closed
3/22/2011	9:35:42 AM	Bypass valve opened
3/22/2011	9:35:42 AM	Helium MFC set to  0.000000
3/22/2011	9:35:42 AM	H2 MFC set to  0.000000
3/22/2011	9:35:42 AM	BCl3 MFC set to  0.000000
3/22/2011	9:35:42 AM	PHl3 MFC set to  0.000000
3/22/2011	9:35:42 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:35:42 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:35:42 AM	Tube furnace set to 0
3/22/2011	9:36:13 AM	Helium valve closed
3/22/2011	9:36:13 AM	H2 valve closed
3/22/2011	9:36:13 AM	BCl3 valve closed
3/22/2011	9:36:13 AM	PH3 valve closed
3/22/2011	9:36:13 AM	SiCl4 pre valve closed
3/22/2011	9:36:13 AM	SiCl4 post valve closed
3/22/2011	9:36:13 AM	Bubbler valve closed
3/22/2011	9:36:13 AM	Main Vac valve opened
3/22/2011	9:36:13 AM	Bypass valve opened
3/22/2011	9:36:13 AM	Helium MFC set to  0.000000
3/22/2011	9:36:13 AM	H2 MFC set to  0.000000
3/22/2011	9:36:13 AM	BCl3 MFC set to  0.000000
3/22/2011	9:36:13 AM	PHl3 MFC set to  0.000000
3/22/2011	9:36:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:36:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:36:14 AM	Tube furnace set to 0
3/22/2011	9:36:14 AM	Run finished at 9:36 AM
3/22/2011	9:36:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	9:40:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	9:40:12 AM	Recipe started at 9:40 AM
3/22/2011	9:40:12 AM	Helium valve closed
3/22/2011	9:40:12 AM	H2 valve closed
3/22/2011	9:40:12 AM	BCl3 valve closed
3/22/2011	9:40:12 AM	PH3 valve closed
3/22/2011	9:40:12 AM	SiCl4 pre valve closed
3/22/2011	9:40:12 AM	SiCl4 post valve closed
3/22/2011	9:40:12 AM	Main Vac valve closed
3/22/2011	9:40:12 AM	Bubbler valve closed
3/22/2011	9:40:12 AM	Bypass valve opened
3/22/2011	9:40:12 AM	Helium MFC set to  0.000000
3/22/2011	9:40:12 AM	H2 MFC set to  0.000000
3/22/2011	9:40:12 AM	BCl3 MFC set to  0.000000
3/22/2011	9:40:12 AM	PHl3 MFC set to  0.000000
3/22/2011	9:40:12 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:40:12 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:40:12 AM	Tube furnace set to 0
3/22/2011	9:40:12 AM	Helium valve closed
3/22/2011	9:40:12 AM	H2 valve closed
3/22/2011	9:40:12 AM	BCl3 valve closed
3/22/2011	9:40:12 AM	PH3 valve closed
3/22/2011	9:40:12 AM	SiCl4 pre valve closed
3/22/2011	9:40:12 AM	SiCl4 post valve closed
3/22/2011	9:40:12 AM	Bubbler valve closed
3/22/2011	9:40:12 AM	Main Vac valve opened
3/22/2011	9:40:12 AM	Bypass valve opened
3/22/2011	9:40:12 AM	Helium MFC set to  0.000000
3/22/2011	9:40:12 AM	H2 MFC set to  0.000000
3/22/2011	9:40:12 AM	BCl3 MFC set to  0.000000
3/22/2011	9:40:12 AM	PHl3 MFC set to  0.000000
3/22/2011	9:40:12 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:40:12 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:40:12 AM	Tube furnace set to 0
3/22/2011	9:41:12 AM	H2 valve closed
3/22/2011	9:41:12 AM	BCl3 valve closed
3/22/2011	9:41:12 AM	PH3 valve closed
3/22/2011	9:41:12 AM	SiCl4 pre valve closed
3/22/2011	9:41:12 AM	SiCl4 post valve closed
3/22/2011	9:41:12 AM	Bubbler valve closed
3/22/2011	9:41:12 AM	Helium valve opened
3/22/2011	9:41:12 AM	Main Vac valve opened
3/22/2011	9:41:12 AM	Bypass valve opened
3/22/2011	9:41:12 AM	Helium MFC set to  100.000000
3/22/2011	9:41:12 AM	H2 MFC set to  0.000000
3/22/2011	9:41:12 AM	BCl3 MFC set to  0.000000
3/22/2011	9:41:12 AM	PHl3 MFC set to  0.000000
3/22/2011	9:41:12 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:41:12 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:41:12 AM	Tube furnace set to 0
3/22/2011	9:42:12 AM	Helium valve closed
3/22/2011	9:42:12 AM	H2 valve closed
3/22/2011	9:42:12 AM	BCl3 valve closed
3/22/2011	9:42:12 AM	PH3 valve closed
3/22/2011	9:42:12 AM	SiCl4 pre valve closed
3/22/2011	9:42:12 AM	SiCl4 post valve closed
3/22/2011	9:42:12 AM	Bubbler valve closed
3/22/2011	9:42:12 AM	Main Vac valve opened
3/22/2011	9:42:12 AM	Bypass valve opened
3/22/2011	9:42:12 AM	Helium MFC set to  0.000000
3/22/2011	9:42:12 AM	H2 MFC set to  0.000000
3/22/2011	9:42:12 AM	BCl3 MFC set to  0.000000
3/22/2011	9:42:12 AM	PHl3 MFC set to  0.000000
3/22/2011	9:42:12 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:42:12 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:42:13 AM	Tube furnace set to 0
3/22/2011	9:43:13 AM	H2 valve closed
3/22/2011	9:43:13 AM	BCl3 valve closed
3/22/2011	9:43:13 AM	PH3 valve closed
3/22/2011	9:43:13 AM	SiCl4 pre valve closed
3/22/2011	9:43:13 AM	SiCl4 post valve closed
3/22/2011	9:43:13 AM	Bubbler valve closed
3/22/2011	9:43:13 AM	Helium valve opened
3/22/2011	9:43:13 AM	Main Vac valve opened
3/22/2011	9:43:13 AM	Bypass valve opened
3/22/2011	9:43:13 AM	Helium MFC set to  100.000000
3/22/2011	9:43:13 AM	H2 MFC set to  0.000000
3/22/2011	9:43:13 AM	BCl3 MFC set to  0.000000
3/22/2011	9:43:13 AM	PHl3 MFC set to  0.000000
3/22/2011	9:43:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:43:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:43:13 AM	Tube furnace set to 0
3/22/2011	9:44:13 AM	Helium valve closed
3/22/2011	9:44:13 AM	H2 valve closed
3/22/2011	9:44:13 AM	BCl3 valve closed
3/22/2011	9:44:13 AM	PH3 valve closed
3/22/2011	9:44:13 AM	SiCl4 pre valve closed
3/22/2011	9:44:13 AM	SiCl4 post valve closed
3/22/2011	9:44:13 AM	Bubbler valve closed
3/22/2011	9:44:13 AM	Main Vac valve opened
3/22/2011	9:44:13 AM	Bypass valve opened
3/22/2011	9:44:13 AM	Helium MFC set to  0.000000
3/22/2011	9:44:13 AM	H2 MFC set to  0.000000
3/22/2011	9:44:13 AM	BCl3 MFC set to  0.000000
3/22/2011	9:44:13 AM	PHl3 MFC set to  0.000000
3/22/2011	9:44:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:44:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:44:13 AM	Tube furnace set to 0
3/22/2011	9:45:13 AM	H2 valve closed
3/22/2011	9:45:13 AM	BCl3 valve closed
3/22/2011	9:45:13 AM	PH3 valve closed
3/22/2011	9:45:13 AM	SiCl4 pre valve closed
3/22/2011	9:45:13 AM	SiCl4 post valve closed
3/22/2011	9:45:13 AM	Bubbler valve closed
3/22/2011	9:45:13 AM	Helium valve opened
3/22/2011	9:45:13 AM	Main Vac valve opened
3/22/2011	9:45:13 AM	Bypass valve opened
3/22/2011	9:45:13 AM	Helium MFC set to  100.000000
3/22/2011	9:45:13 AM	H2 MFC set to  0.000000
3/22/2011	9:45:13 AM	BCl3 MFC set to  0.000000
3/22/2011	9:45:13 AM	PHl3 MFC set to  0.000000
3/22/2011	9:45:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:45:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:45:13 AM	Tube furnace set to 0
3/22/2011	9:46:13 AM	Helium valve closed
3/22/2011	9:46:13 AM	H2 valve closed
3/22/2011	9:46:13 AM	BCl3 valve closed
3/22/2011	9:46:13 AM	PH3 valve closed
3/22/2011	9:46:13 AM	SiCl4 pre valve closed
3/22/2011	9:46:13 AM	SiCl4 post valve closed
3/22/2011	9:46:13 AM	Bubbler valve closed
3/22/2011	9:46:13 AM	Main Vac valve opened
3/22/2011	9:46:13 AM	Bypass valve opened
3/22/2011	9:46:13 AM	Helium MFC set to  0.000000
3/22/2011	9:46:13 AM	H2 MFC set to  0.000000
3/22/2011	9:46:13 AM	BCl3 MFC set to  0.000000
3/22/2011	9:46:13 AM	PHl3 MFC set to  0.000000
3/22/2011	9:46:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:46:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:46:13 AM	Tube furnace set to 0
3/22/2011	9:47:13 AM	H2 valve closed
3/22/2011	9:47:13 AM	BCl3 valve closed
3/22/2011	9:47:13 AM	PH3 valve closed
3/22/2011	9:47:13 AM	SiCl4 pre valve closed
3/22/2011	9:47:13 AM	SiCl4 post valve closed
3/22/2011	9:47:13 AM	Bubbler valve closed
3/22/2011	9:47:13 AM	Helium valve opened
3/22/2011	9:47:13 AM	Main Vac valve opened
3/22/2011	9:47:13 AM	Bypass valve opened
3/22/2011	9:47:13 AM	Helium MFC set to  100.000000
3/22/2011	9:47:13 AM	H2 MFC set to  0.000000
3/22/2011	9:47:13 AM	BCl3 MFC set to  0.000000
3/22/2011	9:47:13 AM	PHl3 MFC set to  0.000000
3/22/2011	9:47:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:47:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:47:14 AM	Tube furnace set to 0
3/22/2011	9:48:14 AM	Helium valve closed
3/22/2011	9:48:14 AM	H2 valve closed
3/22/2011	9:48:14 AM	BCl3 valve closed
3/22/2011	9:48:14 AM	PH3 valve closed
3/22/2011	9:48:14 AM	SiCl4 pre valve closed
3/22/2011	9:48:14 AM	SiCl4 post valve closed
3/22/2011	9:48:14 AM	Bubbler valve closed
3/22/2011	9:48:14 AM	Main Vac valve opened
3/22/2011	9:48:14 AM	Bypass valve opened
3/22/2011	9:48:14 AM	Helium MFC set to  0.000000
3/22/2011	9:48:14 AM	H2 MFC set to  0.000000
3/22/2011	9:48:14 AM	BCl3 MFC set to  0.000000
3/22/2011	9:48:14 AM	PHl3 MFC set to  0.000000
3/22/2011	9:48:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:48:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:48:14 AM	Tube furnace set to 0
3/22/2011	9:49:14 AM	H2 valve closed
3/22/2011	9:49:14 AM	BCl3 valve closed
3/22/2011	9:49:14 AM	PH3 valve closed
3/22/2011	9:49:14 AM	SiCl4 pre valve closed
3/22/2011	9:49:14 AM	SiCl4 post valve closed
3/22/2011	9:49:14 AM	Bubbler valve closed
3/22/2011	9:49:14 AM	Helium valve opened
3/22/2011	9:49:14 AM	Main Vac valve opened
3/22/2011	9:49:14 AM	Bypass valve opened
3/22/2011	9:49:14 AM	Helium MFC set to  100.000000
3/22/2011	9:49:14 AM	H2 MFC set to  0.000000
3/22/2011	9:49:14 AM	BCl3 MFC set to  0.000000
3/22/2011	9:49:14 AM	PHl3 MFC set to  0.000000
3/22/2011	9:49:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:49:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:49:14 AM	Tube furnace set to 0
3/22/2011	9:50:14 AM	Helium valve closed
3/22/2011	9:50:14 AM	H2 valve closed
3/22/2011	9:50:14 AM	BCl3 valve closed
3/22/2011	9:50:14 AM	PH3 valve closed
3/22/2011	9:50:14 AM	SiCl4 pre valve closed
3/22/2011	9:50:14 AM	SiCl4 post valve closed
3/22/2011	9:50:14 AM	Bubbler valve closed
3/22/2011	9:50:14 AM	Main Vac valve opened
3/22/2011	9:50:14 AM	Bypass valve opened
3/22/2011	9:50:14 AM	Helium MFC set to  0.000000
3/22/2011	9:50:14 AM	H2 MFC set to  0.000000
3/22/2011	9:50:14 AM	BCl3 MFC set to  0.000000
3/22/2011	9:50:14 AM	PHl3 MFC set to  0.000000
3/22/2011	9:50:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:50:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:50:14 AM	Tube furnace set to 0
3/22/2011	9:51:14 AM	H2 valve closed
3/22/2011	9:51:14 AM	BCl3 valve closed
3/22/2011	9:51:14 AM	PH3 valve closed
3/22/2011	9:51:14 AM	SiCl4 pre valve closed
3/22/2011	9:51:14 AM	SiCl4 post valve closed
3/22/2011	9:51:14 AM	Bubbler valve closed
3/22/2011	9:51:14 AM	Helium valve opened
3/22/2011	9:51:14 AM	Main Vac valve opened
3/22/2011	9:51:14 AM	Bypass valve opened
3/22/2011	9:51:14 AM	Helium MFC set to  100.000000
3/22/2011	9:51:14 AM	H2 MFC set to  0.000000
3/22/2011	9:51:14 AM	BCl3 MFC set to  0.000000
3/22/2011	9:51:14 AM	PHl3 MFC set to  0.000000
3/22/2011	9:51:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:51:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:51:14 AM	Tube furnace set to 0
3/22/2011	9:52:14 AM	Helium valve closed
3/22/2011	9:52:14 AM	H2 valve closed
3/22/2011	9:52:14 AM	BCl3 valve closed
3/22/2011	9:52:14 AM	PH3 valve closed
3/22/2011	9:52:14 AM	SiCl4 pre valve closed
3/22/2011	9:52:14 AM	SiCl4 post valve closed
3/22/2011	9:52:14 AM	Bubbler valve closed
3/22/2011	9:52:14 AM	Main Vac valve opened
3/22/2011	9:52:14 AM	Bypass valve opened
3/22/2011	9:52:14 AM	Helium MFC set to  0.000000
3/22/2011	9:52:14 AM	H2 MFC set to  0.000000
3/22/2011	9:52:14 AM	BCl3 MFC set to  0.000000
3/22/2011	9:52:14 AM	PHl3 MFC set to  0.000000
3/22/2011	9:52:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:52:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:52:15 AM	Tube furnace set to 0
3/22/2011	9:53:15 AM	H2 valve closed
3/22/2011	9:53:15 AM	BCl3 valve closed
3/22/2011	9:53:15 AM	PH3 valve closed
3/22/2011	9:53:15 AM	SiCl4 pre valve closed
3/22/2011	9:53:15 AM	SiCl4 post valve closed
3/22/2011	9:53:15 AM	Bubbler valve closed
3/22/2011	9:53:15 AM	Helium valve opened
3/22/2011	9:53:15 AM	Main Vac valve opened
3/22/2011	9:53:15 AM	Bypass valve opened
3/22/2011	9:53:15 AM	Helium MFC set to  100.000000
3/22/2011	9:53:15 AM	H2 MFC set to  0.000000
3/22/2011	9:53:15 AM	BCl3 MFC set to  0.000000
3/22/2011	9:53:15 AM	PHl3 MFC set to  0.000000
3/22/2011	9:53:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:53:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:53:15 AM	Tube furnace set to 0
3/22/2011	9:54:15 AM	Helium valve closed
3/22/2011	9:54:15 AM	H2 valve closed
3/22/2011	9:54:15 AM	BCl3 valve closed
3/22/2011	9:54:15 AM	PH3 valve closed
3/22/2011	9:54:15 AM	SiCl4 pre valve closed
3/22/2011	9:54:15 AM	SiCl4 post valve closed
3/22/2011	9:54:15 AM	Bubbler valve closed
3/22/2011	9:54:15 AM	Main Vac valve opened
3/22/2011	9:54:15 AM	Bypass valve opened
3/22/2011	9:54:15 AM	Helium MFC set to  0.000000
3/22/2011	9:54:15 AM	H2 MFC set to  0.000000
3/22/2011	9:54:15 AM	BCl3 MFC set to  0.000000
3/22/2011	9:54:15 AM	PHl3 MFC set to  0.000000
3/22/2011	9:54:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:54:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:54:15 AM	Tube furnace set to 0
3/22/2011	9:55:15 AM	H2 valve closed
3/22/2011	9:55:15 AM	BCl3 valve closed
3/22/2011	9:55:15 AM	PH3 valve closed
3/22/2011	9:55:15 AM	SiCl4 pre valve closed
3/22/2011	9:55:15 AM	SiCl4 post valve closed
3/22/2011	9:55:15 AM	Bubbler valve closed
3/22/2011	9:55:15 AM	Helium valve opened
3/22/2011	9:55:15 AM	Main Vac valve opened
3/22/2011	9:55:15 AM	Bypass valve opened
3/22/2011	9:55:15 AM	Helium MFC set to  100.000000
3/22/2011	9:55:15 AM	H2 MFC set to  0.000000
3/22/2011	9:55:15 AM	BCl3 MFC set to  0.000000
3/22/2011	9:55:15 AM	PHl3 MFC set to  0.000000
3/22/2011	9:55:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:55:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:55:15 AM	Tube furnace set to 0
3/22/2011	9:56:15 AM	Helium valve closed
3/22/2011	9:56:15 AM	H2 valve closed
3/22/2011	9:56:15 AM	BCl3 valve closed
3/22/2011	9:56:15 AM	PH3 valve closed
3/22/2011	9:56:15 AM	SiCl4 pre valve closed
3/22/2011	9:56:15 AM	SiCl4 post valve closed
3/22/2011	9:56:15 AM	Bubbler valve closed
3/22/2011	9:56:15 AM	Main Vac valve opened
3/22/2011	9:56:15 AM	Bypass valve opened
3/22/2011	9:56:15 AM	Helium MFC set to  0.000000
3/22/2011	9:56:15 AM	H2 MFC set to  0.000000
3/22/2011	9:56:15 AM	BCl3 MFC set to  0.000000
3/22/2011	9:56:15 AM	PHl3 MFC set to  0.000000
3/22/2011	9:56:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:56:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:56:15 AM	Tube furnace set to 0
3/22/2011	9:57:15 AM	H2 valve closed
3/22/2011	9:57:15 AM	BCl3 valve closed
3/22/2011	9:57:15 AM	PH3 valve closed
3/22/2011	9:57:15 AM	SiCl4 pre valve closed
3/22/2011	9:57:15 AM	SiCl4 post valve closed
3/22/2011	9:57:15 AM	Bubbler valve closed
3/22/2011	9:57:15 AM	Helium valve opened
3/22/2011	9:57:15 AM	Main Vac valve opened
3/22/2011	9:57:15 AM	Bypass valve opened
3/22/2011	9:57:15 AM	Helium MFC set to  100.000000
3/22/2011	9:57:15 AM	H2 MFC set to  0.000000
3/22/2011	9:57:15 AM	BCl3 MFC set to  0.000000
3/22/2011	9:57:15 AM	PHl3 MFC set to  0.000000
3/22/2011	9:57:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:57:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:57:16 AM	Tube furnace set to 0
3/22/2011	9:58:16 AM	Helium valve closed
3/22/2011	9:58:16 AM	H2 valve closed
3/22/2011	9:58:16 AM	BCl3 valve closed
3/22/2011	9:58:16 AM	PH3 valve closed
3/22/2011	9:58:16 AM	SiCl4 pre valve closed
3/22/2011	9:58:16 AM	SiCl4 post valve closed
3/22/2011	9:58:16 AM	Bubbler valve closed
3/22/2011	9:58:16 AM	Main Vac valve opened
3/22/2011	9:58:16 AM	Bypass valve opened
3/22/2011	9:58:16 AM	Helium MFC set to  0.000000
3/22/2011	9:58:16 AM	H2 MFC set to  0.000000
3/22/2011	9:58:16 AM	BCl3 MFC set to  0.000000
3/22/2011	9:58:16 AM	PHl3 MFC set to  0.000000
3/22/2011	9:58:16 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:58:16 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:58:16 AM	Tube furnace set to 0
3/22/2011	9:59:16 AM	H2 valve closed
3/22/2011	9:59:16 AM	BCl3 valve closed
3/22/2011	9:59:16 AM	PH3 valve closed
3/22/2011	9:59:16 AM	SiCl4 pre valve closed
3/22/2011	9:59:16 AM	SiCl4 post valve closed
3/22/2011	9:59:16 AM	Bubbler valve closed
3/22/2011	9:59:16 AM	Helium valve opened
3/22/2011	9:59:16 AM	Main Vac valve opened
3/22/2011	9:59:16 AM	Bypass valve opened
3/22/2011	9:59:16 AM	Helium MFC set to  100.000000
3/22/2011	9:59:16 AM	H2 MFC set to  0.000000
3/22/2011	9:59:16 AM	BCl3 MFC set to  0.000000
3/22/2011	9:59:16 AM	PHl3 MFC set to  0.000000
3/22/2011	9:59:16 AM	SiCl4 MFC set to  0.000000
3/22/2011	9:59:16 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	9:59:16 AM	Tube furnace set to 0
3/22/2011	10:00:16 AM	Helium valve closed
3/22/2011	10:00:16 AM	H2 valve closed
3/22/2011	10:00:16 AM	BCl3 valve closed
3/22/2011	10:00:16 AM	PH3 valve closed
3/22/2011	10:00:16 AM	SiCl4 pre valve closed
3/22/2011	10:00:16 AM	SiCl4 post valve closed
3/22/2011	10:00:16 AM	Bubbler valve closed
3/22/2011	10:00:16 AM	Main Vac valve opened
3/22/2011	10:00:16 AM	Bypass valve opened
3/22/2011	10:00:16 AM	Helium MFC set to  0.000000
3/22/2011	10:00:16 AM	H2 MFC set to  0.000000
3/22/2011	10:00:16 AM	BCl3 MFC set to  0.000000
3/22/2011	10:00:16 AM	PHl3 MFC set to  0.000000
3/22/2011	10:00:16 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:00:16 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:00:16 AM	Tube furnace set to 0
3/22/2011	10:00:17 AM	Run finished at 10:00 AM
3/22/2011	10:00:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	10:01:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	10:01:12 AM	Recipe started at 10:01 AM
3/22/2011	10:01:12 AM	Helium valve closed
3/22/2011	10:01:12 AM	H2 valve closed
3/22/2011	10:01:12 AM	BCl3 valve closed
3/22/2011	10:01:12 AM	PH3 valve closed
3/22/2011	10:01:12 AM	SiCl4 pre valve closed
3/22/2011	10:01:12 AM	SiCl4 post valve closed
3/22/2011	10:01:12 AM	Main Vac valve closed
3/22/2011	10:01:12 AM	Bubbler valve closed
3/22/2011	10:01:12 AM	Bypass valve opened
3/22/2011	10:01:13 AM	Helium MFC set to  0.000000
3/22/2011	10:01:13 AM	H2 MFC set to  0.000000
3/22/2011	10:01:13 AM	BCl3 MFC set to  0.000000
3/22/2011	10:01:13 AM	PHl3 MFC set to  0.000000
3/22/2011	10:01:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:01:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:01:13 AM	Tube furnace set to 0
3/22/2011	10:01:13 AM	Helium valve closed
3/22/2011	10:01:13 AM	H2 valve closed
3/22/2011	10:01:13 AM	BCl3 valve closed
3/22/2011	10:01:13 AM	PH3 valve closed
3/22/2011	10:01:13 AM	SiCl4 pre valve closed
3/22/2011	10:01:13 AM	SiCl4 post valve closed
3/22/2011	10:01:13 AM	Bubbler valve closed
3/22/2011	10:01:13 AM	Main Vac valve opened
3/22/2011	10:01:13 AM	Bypass valve opened
3/22/2011	10:01:13 AM	Helium MFC set to  0.000000
3/22/2011	10:01:13 AM	H2 MFC set to  0.000000
3/22/2011	10:01:13 AM	BCl3 MFC set to  0.000000
3/22/2011	10:01:13 AM	PHl3 MFC set to  0.000000
3/22/2011	10:01:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:01:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:01:13 AM	Tube furnace set to 0
3/22/2011	10:02:13 AM	H2 valve closed
3/22/2011	10:02:13 AM	BCl3 valve closed
3/22/2011	10:02:13 AM	PH3 valve closed
3/22/2011	10:02:13 AM	SiCl4 pre valve closed
3/22/2011	10:02:13 AM	SiCl4 post valve closed
3/22/2011	10:02:13 AM	Bubbler valve closed
3/22/2011	10:02:13 AM	Helium valve opened
3/22/2011	10:02:13 AM	Main Vac valve opened
3/22/2011	10:02:13 AM	Bypass valve opened
3/22/2011	10:02:13 AM	Helium MFC set to  100.000000
3/22/2011	10:02:13 AM	H2 MFC set to  0.000000
3/22/2011	10:02:13 AM	BCl3 MFC set to  0.000000
3/22/2011	10:02:13 AM	PHl3 MFC set to  0.000000
3/22/2011	10:02:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:02:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:02:13 AM	Tube furnace set to 0
3/22/2011	10:03:13 AM	Helium valve closed
3/22/2011	10:03:13 AM	H2 valve closed
3/22/2011	10:03:13 AM	BCl3 valve closed
3/22/2011	10:03:13 AM	PH3 valve closed
3/22/2011	10:03:13 AM	SiCl4 pre valve closed
3/22/2011	10:03:13 AM	SiCl4 post valve closed
3/22/2011	10:03:13 AM	Bubbler valve closed
3/22/2011	10:03:13 AM	Main Vac valve opened
3/22/2011	10:03:13 AM	Bypass valve opened
3/22/2011	10:03:13 AM	Helium MFC set to  0.000000
3/22/2011	10:03:13 AM	H2 MFC set to  0.000000
3/22/2011	10:03:13 AM	BCl3 MFC set to  0.000000
3/22/2011	10:03:13 AM	PHl3 MFC set to  0.000000
3/22/2011	10:03:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:03:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:03:14 AM	Tube furnace set to 0
3/22/2011	10:04:14 AM	H2 valve closed
3/22/2011	10:04:14 AM	BCl3 valve closed
3/22/2011	10:04:14 AM	PH3 valve closed
3/22/2011	10:04:14 AM	SiCl4 pre valve closed
3/22/2011	10:04:14 AM	SiCl4 post valve closed
3/22/2011	10:04:14 AM	Bubbler valve closed
3/22/2011	10:04:14 AM	Helium valve opened
3/22/2011	10:04:14 AM	Main Vac valve opened
3/22/2011	10:04:14 AM	Bypass valve opened
3/22/2011	10:04:14 AM	Helium MFC set to  100.000000
3/22/2011	10:04:14 AM	H2 MFC set to  0.000000
3/22/2011	10:04:14 AM	BCl3 MFC set to  0.000000
3/22/2011	10:04:14 AM	PHl3 MFC set to  0.000000
3/22/2011	10:04:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:04:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:04:14 AM	Tube furnace set to 0
3/22/2011	10:05:14 AM	Helium valve closed
3/22/2011	10:05:14 AM	H2 valve closed
3/22/2011	10:05:14 AM	BCl3 valve closed
3/22/2011	10:05:14 AM	PH3 valve closed
3/22/2011	10:05:14 AM	SiCl4 pre valve closed
3/22/2011	10:05:14 AM	SiCl4 post valve closed
3/22/2011	10:05:14 AM	Bubbler valve closed
3/22/2011	10:05:14 AM	Main Vac valve opened
3/22/2011	10:05:14 AM	Bypass valve opened
3/22/2011	10:05:14 AM	Helium MFC set to  0.000000
3/22/2011	10:05:14 AM	H2 MFC set to  0.000000
3/22/2011	10:05:14 AM	BCl3 MFC set to  0.000000
3/22/2011	10:05:14 AM	PHl3 MFC set to  0.000000
3/22/2011	10:05:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:05:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:05:14 AM	Tube furnace set to 0
3/22/2011	10:06:14 AM	H2 valve closed
3/22/2011	10:06:14 AM	BCl3 valve closed
3/22/2011	10:06:14 AM	PH3 valve closed
3/22/2011	10:06:14 AM	SiCl4 pre valve closed
3/22/2011	10:06:14 AM	SiCl4 post valve closed
3/22/2011	10:06:14 AM	Bubbler valve closed
3/22/2011	10:06:14 AM	Helium valve opened
3/22/2011	10:06:14 AM	Main Vac valve opened
3/22/2011	10:06:14 AM	Bypass valve opened
3/22/2011	10:06:14 AM	Helium MFC set to  100.000000
3/22/2011	10:06:14 AM	H2 MFC set to  0.000000
3/22/2011	10:06:14 AM	BCl3 MFC set to  0.000000
3/22/2011	10:06:14 AM	PHl3 MFC set to  0.000000
3/22/2011	10:06:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:06:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:06:14 AM	Tube furnace set to 0
3/22/2011	10:07:14 AM	Helium valve closed
3/22/2011	10:07:14 AM	H2 valve closed
3/22/2011	10:07:14 AM	BCl3 valve closed
3/22/2011	10:07:14 AM	PH3 valve closed
3/22/2011	10:07:14 AM	SiCl4 pre valve closed
3/22/2011	10:07:14 AM	SiCl4 post valve closed
3/22/2011	10:07:14 AM	Bubbler valve closed
3/22/2011	10:07:14 AM	Main Vac valve opened
3/22/2011	10:07:14 AM	Bypass valve opened
3/22/2011	10:07:14 AM	Helium MFC set to  0.000000
3/22/2011	10:07:14 AM	H2 MFC set to  0.000000
3/22/2011	10:07:14 AM	BCl3 MFC set to  0.000000
3/22/2011	10:07:14 AM	PHl3 MFC set to  0.000000
3/22/2011	10:07:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:07:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:07:14 AM	Tube furnace set to 0
3/22/2011	10:08:14 AM	H2 valve closed
3/22/2011	10:08:14 AM	BCl3 valve closed
3/22/2011	10:08:14 AM	PH3 valve closed
3/22/2011	10:08:14 AM	SiCl4 pre valve closed
3/22/2011	10:08:14 AM	SiCl4 post valve closed
3/22/2011	10:08:14 AM	Bubbler valve closed
3/22/2011	10:08:14 AM	Helium valve opened
3/22/2011	10:08:14 AM	Main Vac valve opened
3/22/2011	10:08:14 AM	Bypass valve opened
3/22/2011	10:08:14 AM	Helium MFC set to  100.000000
3/22/2011	10:08:14 AM	H2 MFC set to  0.000000
3/22/2011	10:08:14 AM	BCl3 MFC set to  0.000000
3/22/2011	10:08:14 AM	PHl3 MFC set to  0.000000
3/22/2011	10:08:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:08:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:08:15 AM	Tube furnace set to 0
3/22/2011	10:09:15 AM	Helium valve closed
3/22/2011	10:09:15 AM	H2 valve closed
3/22/2011	10:09:15 AM	BCl3 valve closed
3/22/2011	10:09:15 AM	PH3 valve closed
3/22/2011	10:09:15 AM	SiCl4 pre valve closed
3/22/2011	10:09:15 AM	SiCl4 post valve closed
3/22/2011	10:09:15 AM	Bubbler valve closed
3/22/2011	10:09:15 AM	Main Vac valve opened
3/22/2011	10:09:15 AM	Bypass valve opened
3/22/2011	10:09:15 AM	Helium MFC set to  0.000000
3/22/2011	10:09:15 AM	H2 MFC set to  0.000000
3/22/2011	10:09:15 AM	BCl3 MFC set to  0.000000
3/22/2011	10:09:15 AM	PHl3 MFC set to  0.000000
3/22/2011	10:09:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:09:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:09:15 AM	Tube furnace set to 0
3/22/2011	10:10:15 AM	H2 valve closed
3/22/2011	10:10:15 AM	BCl3 valve closed
3/22/2011	10:10:15 AM	PH3 valve closed
3/22/2011	10:10:15 AM	SiCl4 pre valve closed
3/22/2011	10:10:15 AM	SiCl4 post valve closed
3/22/2011	10:10:15 AM	Bubbler valve closed
3/22/2011	10:10:15 AM	Helium valve opened
3/22/2011	10:10:15 AM	Main Vac valve opened
3/22/2011	10:10:15 AM	Bypass valve opened
3/22/2011	10:10:15 AM	Helium MFC set to  100.000000
3/22/2011	10:10:15 AM	H2 MFC set to  0.000000
3/22/2011	10:10:15 AM	BCl3 MFC set to  0.000000
3/22/2011	10:10:15 AM	PHl3 MFC set to  0.000000
3/22/2011	10:10:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:10:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:10:15 AM	Tube furnace set to 0
3/22/2011	10:11:15 AM	Helium valve closed
3/22/2011	10:11:15 AM	H2 valve closed
3/22/2011	10:11:15 AM	BCl3 valve closed
3/22/2011	10:11:15 AM	PH3 valve closed
3/22/2011	10:11:15 AM	SiCl4 pre valve closed
3/22/2011	10:11:15 AM	SiCl4 post valve closed
3/22/2011	10:11:15 AM	Bubbler valve closed
3/22/2011	10:11:15 AM	Main Vac valve opened
3/22/2011	10:11:15 AM	Bypass valve opened
3/22/2011	10:11:15 AM	Helium MFC set to  0.000000
3/22/2011	10:11:15 AM	H2 MFC set to  0.000000
3/22/2011	10:11:15 AM	BCl3 MFC set to  0.000000
3/22/2011	10:11:15 AM	PHl3 MFC set to  0.000000
3/22/2011	10:11:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:11:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:11:15 AM	Tube furnace set to 0
3/22/2011	10:12:15 AM	H2 valve closed
3/22/2011	10:12:15 AM	BCl3 valve closed
3/22/2011	10:12:15 AM	PH3 valve closed
3/22/2011	10:12:15 AM	SiCl4 pre valve closed
3/22/2011	10:12:15 AM	SiCl4 post valve closed
3/22/2011	10:12:15 AM	Bubbler valve closed
3/22/2011	10:12:15 AM	Helium valve opened
3/22/2011	10:12:15 AM	Main Vac valve opened
3/22/2011	10:12:15 AM	Bypass valve opened
3/22/2011	10:12:15 AM	Helium MFC set to  100.000000
3/22/2011	10:12:15 AM	H2 MFC set to  0.000000
3/22/2011	10:12:15 AM	BCl3 MFC set to  0.000000
3/22/2011	10:12:15 AM	PHl3 MFC set to  0.000000
3/22/2011	10:12:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:12:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:12:15 AM	Tube furnace set to 0
3/22/2011	10:13:07 AM	Helium valve closed
3/22/2011	10:13:07 AM	H2 valve closed
3/22/2011	10:13:07 AM	BCl3 valve closed
3/22/2011	10:13:07 AM	PH3 valve closed
3/22/2011	10:13:07 AM	SiCl4 pre valve closed
3/22/2011	10:13:07 AM	SiCl4 post valve closed
3/22/2011	10:13:07 AM	Bubbler valve closed
3/22/2011	10:13:07 AM	Main Vac valve opened
3/22/2011	10:13:07 AM	Bypass valve opened
3/22/2011	10:13:07 AM	Helium MFC set to  0.000000
3/22/2011	10:13:07 AM	H2 MFC set to  0.000000
3/22/2011	10:13:07 AM	BCl3 MFC set to  0.000000
3/22/2011	10:13:07 AM	PHl3 MFC set to  0.000000
3/22/2011	10:13:07 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:13:07 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:13:07 AM	Tube furnace set to 0
3/22/2011	10:13:11 AM	Run aborted at 10:13 AM
3/22/2011	10:13:12 AM	Helium valve closed
3/22/2011	10:13:12 AM	H2 valve closed
3/22/2011	10:13:12 AM	BCl3 valve closed
3/22/2011	10:13:12 AM	PH3 valve closed
3/22/2011	10:13:12 AM	SiCl4 pre valve closed
3/22/2011	10:13:12 AM	SiCl4 post valve closed
3/22/2011	10:13:12 AM	Bypass valve closed
3/22/2011	10:13:12 AM	Main Vac valve closed
3/22/2011	10:13:12 AM	Bubbler valve closed
3/22/2011	10:13:12 AM	Helium MFC set to  0.000000
3/22/2011	10:13:12 AM	H2 MFC set to  0.000000
3/22/2011	10:13:12 AM	BCl3 MFC set to  0.000000
3/22/2011	10:13:12 AM	PHl3 MFC set to  0.000000
3/22/2011	10:13:12 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:13:12 AM	Tube furnace set to 0
3/22/2011	10:13:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	10:13:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	10:13:15 AM	Recipe started at 10:13 AM
3/22/2011	10:13:15 AM	Helium valve closed
3/22/2011	10:13:15 AM	H2 valve closed
3/22/2011	10:13:15 AM	BCl3 valve closed
3/22/2011	10:13:15 AM	PH3 valve closed
3/22/2011	10:13:15 AM	SiCl4 pre valve closed
3/22/2011	10:13:15 AM	SiCl4 post valve closed
3/22/2011	10:13:15 AM	Main Vac valve closed
3/22/2011	10:13:15 AM	Bubbler valve closed
3/22/2011	10:13:15 AM	Bypass valve opened
3/22/2011	10:13:15 AM	Helium MFC set to  0.000000
3/22/2011	10:13:15 AM	H2 MFC set to  0.000000
3/22/2011	10:13:15 AM	BCl3 MFC set to  0.000000
3/22/2011	10:13:15 AM	PHl3 MFC set to  0.000000
3/22/2011	10:13:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:13:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:13:15 AM	Tube furnace set to 0
3/22/2011	10:13:15 AM	Helium valve closed
3/22/2011	10:13:15 AM	H2 valve closed
3/22/2011	10:13:15 AM	BCl3 valve closed
3/22/2011	10:13:15 AM	PH3 valve closed
3/22/2011	10:13:15 AM	SiCl4 pre valve closed
3/22/2011	10:13:15 AM	SiCl4 post valve closed
3/22/2011	10:13:15 AM	Bubbler valve closed
3/22/2011	10:13:15 AM	Main Vac valve opened
3/22/2011	10:13:15 AM	Bypass valve opened
3/22/2011	10:13:15 AM	Helium MFC set to  0.000000
3/22/2011	10:13:15 AM	H2 MFC set to  0.000000
3/22/2011	10:13:15 AM	BCl3 MFC set to  0.000000
3/22/2011	10:13:15 AM	PHl3 MFC set to  0.000000
3/22/2011	10:13:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:13:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:13:15 AM	Tube furnace set to 0
3/22/2011	10:13:16 AM	Run finished at 10:13 AM
3/22/2011	10:13:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	10:14:19 AM	Recipe started at 10:14 AM
3/22/2011	10:14:19 AM	Helium valve closed
3/22/2011	10:14:19 AM	BCl3 valve closed
3/22/2011	10:14:19 AM	PH3 valve closed
3/22/2011	10:14:19 AM	SiCl4 pre valve closed
3/22/2011	10:14:19 AM	SiCl4 post valve closed
3/22/2011	10:14:19 AM	Main Vac valve closed
3/22/2011	10:14:19 AM	Bypass valve closed
3/22/2011	10:14:19 AM	Bubbler valve closed
3/22/2011	10:14:19 AM	H2 valve opened
3/22/2011	10:14:19 AM	Helium MFC set to  0.000000
3/22/2011	10:14:19 AM	H2 MFC set to  500.000000
3/22/2011	10:14:19 AM	BCl3 MFC set to  0.000000
3/22/2011	10:14:19 AM	PHl3 MFC set to  0.000000
3/22/2011	10:14:19 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:14:19 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:14:19 AM	Tube furnace set to 0
3/22/2011	10:15:42 AM	Helium valve closed
3/22/2011	10:15:42 AM	BCl3 valve closed
3/22/2011	10:15:42 AM	PH3 valve closed
3/22/2011	10:15:42 AM	SiCl4 pre valve closed
3/22/2011	10:15:42 AM	SiCl4 post valve closed
3/22/2011	10:15:42 AM	Main Vac valve closed
3/22/2011	10:15:42 AM	Bypass valve closed
3/22/2011	10:15:42 AM	H2 valve opened
3/22/2011	10:15:42 AM	Bubbler valve opened
3/22/2011	10:15:42 AM	Helium MFC set to  0.000000
3/22/2011	10:15:42 AM	H2 MFC set to  500.000000
3/22/2011	10:15:42 AM	BCl3 MFC set to  0.000000
3/22/2011	10:15:42 AM	PHl3 MFC set to  0.000000
3/22/2011	10:15:42 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:15:42 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:15:42 AM	Tube furnace set to 1000
3/22/2011	10:35:42 AM	Helium valve closed
3/22/2011	10:35:42 AM	PH3 valve closed
3/22/2011	10:35:42 AM	Main Vac valve closed
3/22/2011	10:35:42 AM	Bypass valve closed
3/22/2011	10:35:42 AM	H2 valve opened
3/22/2011	10:35:42 AM	BCl3 valve opened
3/22/2011	10:35:42 AM	SiCl4 pre valve opened
3/22/2011	10:35:42 AM	SiCl4 post valve opened
3/22/2011	10:35:42 AM	Bubbler valve opened
3/22/2011	10:35:42 AM	Helium MFC set to  0.000000
3/22/2011	10:35:42 AM	H2 MFC set to  500.000000
3/22/2011	10:35:42 AM	BCl3 MFC set to  12.000000
3/22/2011	10:35:42 AM	PHl3 MFC set to  0.000000
3/22/2011	10:35:42 AM	SiCl4 MFC set to  50.000000
3/22/2011	10:35:42 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:35:42 AM	Tube furnace set to 1000
3/22/2011	10:55:42 AM	H2 valve closed
3/22/2011	10:55:42 AM	BCl3 valve closed
3/22/2011	10:55:42 AM	PH3 valve closed
3/22/2011	10:55:42 AM	SiCl4 pre valve closed
3/22/2011	10:55:42 AM	SiCl4 post valve closed
3/22/2011	10:55:42 AM	Main Vac valve closed
3/22/2011	10:55:42 AM	Bypass valve closed
3/22/2011	10:55:42 AM	Helium valve opened
3/22/2011	10:55:42 AM	Bubbler valve opened
3/22/2011	10:55:42 AM	Helium MFC set to  500.000000
3/22/2011	10:55:42 AM	H2 MFC set to  0.000000
3/22/2011	10:55:42 AM	BCl3 MFC set to  0.000000
3/22/2011	10:55:42 AM	PHl3 MFC set to  0.000000
3/22/2011	10:55:42 AM	SiCl4 MFC set to  0.000000
3/22/2011	10:55:42 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:55:42 AM	Tube furnace set to 0
3/22/2011	11:15:42 AM	Helium valve closed
3/22/2011	11:15:42 AM	H2 valve closed
3/22/2011	11:15:42 AM	BCl3 valve closed
3/22/2011	11:15:42 AM	PH3 valve closed
3/22/2011	11:15:42 AM	SiCl4 pre valve closed
3/22/2011	11:15:42 AM	SiCl4 post valve closed
3/22/2011	11:15:42 AM	Main Vac valve closed
3/22/2011	11:15:42 AM	Bypass valve closed
3/22/2011	11:15:42 AM	Bubbler valve closed
3/22/2011	11:15:42 AM	Helium MFC set to  0.000000
3/22/2011	11:15:42 AM	H2 MFC set to  0.000000
3/22/2011	11:15:42 AM	BCl3 MFC set to  0.000000
3/22/2011	11:15:42 AM	PHl3 MFC set to  0.000000
3/22/2011	11:15:42 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:15:42 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:15:43 AM	Tube furnace set to 0
3/22/2011	11:15:43 AM	Run finished at 11:15 AM
3/22/2011	11:23:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	11:23:36 AM	Recipe started at 11:23 AM
3/22/2011	11:23:36 AM	Helium valve closed
3/22/2011	11:23:36 AM	H2 valve closed
3/22/2011	11:23:36 AM	BCl3 valve closed
3/22/2011	11:23:36 AM	PH3 valve closed
3/22/2011	11:23:36 AM	SiCl4 pre valve closed
3/22/2011	11:23:36 AM	SiCl4 post valve closed
3/22/2011	11:23:36 AM	Main Vac valve closed
3/22/2011	11:23:36 AM	Bubbler valve closed
3/22/2011	11:23:36 AM	Bypass valve opened
3/22/2011	11:23:36 AM	Helium MFC set to  0.000000
3/22/2011	11:23:36 AM	H2 MFC set to  0.000000
3/22/2011	11:23:36 AM	BCl3 MFC set to  0.000000
3/22/2011	11:23:36 AM	PHl3 MFC set to  0.000000
3/22/2011	11:23:36 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:23:36 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:23:36 AM	Tube furnace set to 0
3/22/2011	11:24:08 AM	Helium valve closed
3/22/2011	11:24:08 AM	H2 valve closed
3/22/2011	11:24:08 AM	BCl3 valve closed
3/22/2011	11:24:08 AM	PH3 valve closed
3/22/2011	11:24:08 AM	SiCl4 pre valve closed
3/22/2011	11:24:08 AM	SiCl4 post valve closed
3/22/2011	11:24:08 AM	Bubbler valve closed
3/22/2011	11:24:08 AM	Main Vac valve opened
3/22/2011	11:24:08 AM	Bypass valve opened
3/22/2011	11:24:08 AM	Helium MFC set to  0.000000
3/22/2011	11:24:08 AM	H2 MFC set to  0.000000
3/22/2011	11:24:08 AM	BCl3 MFC set to  0.000000
3/22/2011	11:24:08 AM	PHl3 MFC set to  0.000000
3/22/2011	11:24:08 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:24:08 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:24:08 AM	Tube furnace set to 0
3/22/2011	11:24:08 AM	Run finished at 11:24 AM
3/22/2011	11:24:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	11:24:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	11:25:11 AM	Recipe started at 11:25 AM
3/22/2011	11:25:11 AM	Helium valve closed
3/22/2011	11:25:11 AM	H2 valve closed
3/22/2011	11:25:11 AM	BCl3 valve closed
3/22/2011	11:25:11 AM	PH3 valve closed
3/22/2011	11:25:11 AM	SiCl4 pre valve closed
3/22/2011	11:25:11 AM	SiCl4 post valve closed
3/22/2011	11:25:11 AM	Main Vac valve closed
3/22/2011	11:25:11 AM	Bubbler valve closed
3/22/2011	11:25:11 AM	Bypass valve opened
3/22/2011	11:25:11 AM	Helium MFC set to  0.000000
3/22/2011	11:25:11 AM	H2 MFC set to  0.000000
3/22/2011	11:25:11 AM	BCl3 MFC set to  0.000000
3/22/2011	11:25:11 AM	PHl3 MFC set to  0.000000
3/22/2011	11:25:11 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:25:11 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:25:12 AM	Tube furnace set to 0
3/22/2011	11:25:12 AM	Helium valve closed
3/22/2011	11:25:12 AM	H2 valve closed
3/22/2011	11:25:12 AM	BCl3 valve closed
3/22/2011	11:25:12 AM	PH3 valve closed
3/22/2011	11:25:12 AM	SiCl4 pre valve closed
3/22/2011	11:25:12 AM	SiCl4 post valve closed
3/22/2011	11:25:12 AM	Bubbler valve closed
3/22/2011	11:25:12 AM	Main Vac valve opened
3/22/2011	11:25:12 AM	Bypass valve opened
3/22/2011	11:25:12 AM	Helium MFC set to  0.000000
3/22/2011	11:25:12 AM	H2 MFC set to  0.000000
3/22/2011	11:25:12 AM	BCl3 MFC set to  0.000000
3/22/2011	11:25:12 AM	PHl3 MFC set to  0.000000
3/22/2011	11:25:12 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:25:12 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:25:12 AM	Tube furnace set to 0
3/22/2011	11:26:12 AM	H2 valve closed
3/22/2011	11:26:12 AM	BCl3 valve closed
3/22/2011	11:26:12 AM	PH3 valve closed
3/22/2011	11:26:12 AM	SiCl4 pre valve closed
3/22/2011	11:26:12 AM	SiCl4 post valve closed
3/22/2011	11:26:12 AM	Bubbler valve closed
3/22/2011	11:26:12 AM	Helium valve opened
3/22/2011	11:26:12 AM	Main Vac valve opened
3/22/2011	11:26:12 AM	Bypass valve opened
3/22/2011	11:26:12 AM	Helium MFC set to  100.000000
3/22/2011	11:26:12 AM	H2 MFC set to  0.000000
3/22/2011	11:26:12 AM	BCl3 MFC set to  0.000000
3/22/2011	11:26:12 AM	PHl3 MFC set to  0.000000
3/22/2011	11:26:12 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:26:12 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:26:12 AM	Tube furnace set to 0
3/22/2011	11:27:12 AM	Helium valve closed
3/22/2011	11:27:12 AM	H2 valve closed
3/22/2011	11:27:12 AM	BCl3 valve closed
3/22/2011	11:27:12 AM	PH3 valve closed
3/22/2011	11:27:12 AM	SiCl4 pre valve closed
3/22/2011	11:27:12 AM	SiCl4 post valve closed
3/22/2011	11:27:12 AM	Bubbler valve closed
3/22/2011	11:27:12 AM	Main Vac valve opened
3/22/2011	11:27:12 AM	Bypass valve opened
3/22/2011	11:27:12 AM	Helium MFC set to  0.000000
3/22/2011	11:27:12 AM	H2 MFC set to  0.000000
3/22/2011	11:27:12 AM	BCl3 MFC set to  0.000000
3/22/2011	11:27:12 AM	PHl3 MFC set to  0.000000
3/22/2011	11:27:12 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:27:12 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:27:12 AM	Tube furnace set to 0
3/22/2011	11:28:12 AM	H2 valve closed
3/22/2011	11:28:12 AM	BCl3 valve closed
3/22/2011	11:28:12 AM	PH3 valve closed
3/22/2011	11:28:12 AM	SiCl4 pre valve closed
3/22/2011	11:28:12 AM	SiCl4 post valve closed
3/22/2011	11:28:12 AM	Bubbler valve closed
3/22/2011	11:28:12 AM	Helium valve opened
3/22/2011	11:28:12 AM	Main Vac valve opened
3/22/2011	11:28:12 AM	Bypass valve opened
3/22/2011	11:28:12 AM	Helium MFC set to  100.000000
3/22/2011	11:28:12 AM	H2 MFC set to  0.000000
3/22/2011	11:28:12 AM	BCl3 MFC set to  0.000000
3/22/2011	11:28:12 AM	PHl3 MFC set to  0.000000
3/22/2011	11:28:12 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:28:12 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:28:13 AM	Tube furnace set to 0
3/22/2011	11:29:13 AM	Helium valve closed
3/22/2011	11:29:13 AM	H2 valve closed
3/22/2011	11:29:13 AM	BCl3 valve closed
3/22/2011	11:29:13 AM	PH3 valve closed
3/22/2011	11:29:13 AM	SiCl4 pre valve closed
3/22/2011	11:29:13 AM	SiCl4 post valve closed
3/22/2011	11:29:13 AM	Bubbler valve closed
3/22/2011	11:29:13 AM	Main Vac valve opened
3/22/2011	11:29:13 AM	Bypass valve opened
3/22/2011	11:29:13 AM	Helium MFC set to  0.000000
3/22/2011	11:29:13 AM	H2 MFC set to  0.000000
3/22/2011	11:29:13 AM	BCl3 MFC set to  0.000000
3/22/2011	11:29:13 AM	PHl3 MFC set to  0.000000
3/22/2011	11:29:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:29:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:29:13 AM	Tube furnace set to 0
3/22/2011	11:30:13 AM	H2 valve closed
3/22/2011	11:30:13 AM	BCl3 valve closed
3/22/2011	11:30:13 AM	PH3 valve closed
3/22/2011	11:30:13 AM	SiCl4 pre valve closed
3/22/2011	11:30:13 AM	SiCl4 post valve closed
3/22/2011	11:30:13 AM	Bubbler valve closed
3/22/2011	11:30:13 AM	Helium valve opened
3/22/2011	11:30:13 AM	Main Vac valve opened
3/22/2011	11:30:13 AM	Bypass valve opened
3/22/2011	11:30:13 AM	Helium MFC set to  100.000000
3/22/2011	11:30:13 AM	H2 MFC set to  0.000000
3/22/2011	11:30:13 AM	BCl3 MFC set to  0.000000
3/22/2011	11:30:13 AM	PHl3 MFC set to  0.000000
3/22/2011	11:30:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:30:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:30:13 AM	Tube furnace set to 0
3/22/2011	11:31:13 AM	Helium valve closed
3/22/2011	11:31:13 AM	H2 valve closed
3/22/2011	11:31:13 AM	BCl3 valve closed
3/22/2011	11:31:13 AM	PH3 valve closed
3/22/2011	11:31:13 AM	SiCl4 pre valve closed
3/22/2011	11:31:13 AM	SiCl4 post valve closed
3/22/2011	11:31:13 AM	Bubbler valve closed
3/22/2011	11:31:13 AM	Main Vac valve opened
3/22/2011	11:31:13 AM	Bypass valve opened
3/22/2011	11:31:13 AM	Helium MFC set to  0.000000
3/22/2011	11:31:13 AM	H2 MFC set to  0.000000
3/22/2011	11:31:13 AM	BCl3 MFC set to  0.000000
3/22/2011	11:31:13 AM	PHl3 MFC set to  0.000000
3/22/2011	11:31:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:31:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:31:13 AM	Tube furnace set to 0
3/22/2011	11:32:13 AM	H2 valve closed
3/22/2011	11:32:13 AM	BCl3 valve closed
3/22/2011	11:32:13 AM	PH3 valve closed
3/22/2011	11:32:13 AM	SiCl4 pre valve closed
3/22/2011	11:32:13 AM	SiCl4 post valve closed
3/22/2011	11:32:13 AM	Bubbler valve closed
3/22/2011	11:32:13 AM	Helium valve opened
3/22/2011	11:32:13 AM	Main Vac valve opened
3/22/2011	11:32:13 AM	Bypass valve opened
3/22/2011	11:32:13 AM	Helium MFC set to  100.000000
3/22/2011	11:32:13 AM	H2 MFC set to  0.000000
3/22/2011	11:32:13 AM	BCl3 MFC set to  0.000000
3/22/2011	11:32:13 AM	PHl3 MFC set to  0.000000
3/22/2011	11:32:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:32:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:32:13 AM	Tube furnace set to 0
3/22/2011	11:33:13 AM	Helium valve closed
3/22/2011	11:33:13 AM	H2 valve closed
3/22/2011	11:33:13 AM	BCl3 valve closed
3/22/2011	11:33:13 AM	PH3 valve closed
3/22/2011	11:33:13 AM	SiCl4 pre valve closed
3/22/2011	11:33:13 AM	SiCl4 post valve closed
3/22/2011	11:33:13 AM	Bubbler valve closed
3/22/2011	11:33:13 AM	Main Vac valve opened
3/22/2011	11:33:13 AM	Bypass valve opened
3/22/2011	11:33:13 AM	Helium MFC set to  0.000000
3/22/2011	11:33:13 AM	H2 MFC set to  0.000000
3/22/2011	11:33:13 AM	BCl3 MFC set to  0.000000
3/22/2011	11:33:13 AM	PHl3 MFC set to  0.000000
3/22/2011	11:33:13 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:33:13 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:33:14 AM	Tube furnace set to 0
3/22/2011	11:34:14 AM	H2 valve closed
3/22/2011	11:34:14 AM	BCl3 valve closed
3/22/2011	11:34:14 AM	PH3 valve closed
3/22/2011	11:34:14 AM	SiCl4 pre valve closed
3/22/2011	11:34:14 AM	SiCl4 post valve closed
3/22/2011	11:34:14 AM	Bubbler valve closed
3/22/2011	11:34:14 AM	Helium valve opened
3/22/2011	11:34:14 AM	Main Vac valve opened
3/22/2011	11:34:14 AM	Bypass valve opened
3/22/2011	11:34:14 AM	Helium MFC set to  100.000000
3/22/2011	11:34:14 AM	H2 MFC set to  0.000000
3/22/2011	11:34:14 AM	BCl3 MFC set to  0.000000
3/22/2011	11:34:14 AM	PHl3 MFC set to  0.000000
3/22/2011	11:34:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:34:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:34:14 AM	Tube furnace set to 0
3/22/2011	11:35:14 AM	Helium valve closed
3/22/2011	11:35:14 AM	H2 valve closed
3/22/2011	11:35:14 AM	BCl3 valve closed
3/22/2011	11:35:14 AM	PH3 valve closed
3/22/2011	11:35:14 AM	SiCl4 pre valve closed
3/22/2011	11:35:14 AM	SiCl4 post valve closed
3/22/2011	11:35:14 AM	Bubbler valve closed
3/22/2011	11:35:14 AM	Main Vac valve opened
3/22/2011	11:35:14 AM	Bypass valve opened
3/22/2011	11:35:14 AM	Helium MFC set to  0.000000
3/22/2011	11:35:14 AM	H2 MFC set to  0.000000
3/22/2011	11:35:14 AM	BCl3 MFC set to  0.000000
3/22/2011	11:35:14 AM	PHl3 MFC set to  0.000000
3/22/2011	11:35:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:35:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:35:14 AM	Tube furnace set to 0
3/22/2011	11:36:14 AM	H2 valve closed
3/22/2011	11:36:14 AM	BCl3 valve closed
3/22/2011	11:36:14 AM	PH3 valve closed
3/22/2011	11:36:14 AM	SiCl4 pre valve closed
3/22/2011	11:36:14 AM	SiCl4 post valve closed
3/22/2011	11:36:14 AM	Bubbler valve closed
3/22/2011	11:36:14 AM	Helium valve opened
3/22/2011	11:36:14 AM	Main Vac valve opened
3/22/2011	11:36:14 AM	Bypass valve opened
3/22/2011	11:36:14 AM	Helium MFC set to  100.000000
3/22/2011	11:36:14 AM	H2 MFC set to  0.000000
3/22/2011	11:36:14 AM	BCl3 MFC set to  0.000000
3/22/2011	11:36:14 AM	PHl3 MFC set to  0.000000
3/22/2011	11:36:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:36:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:36:14 AM	Tube furnace set to 0
3/22/2011	11:37:14 AM	Helium valve closed
3/22/2011	11:37:14 AM	H2 valve closed
3/22/2011	11:37:14 AM	BCl3 valve closed
3/22/2011	11:37:14 AM	PH3 valve closed
3/22/2011	11:37:14 AM	SiCl4 pre valve closed
3/22/2011	11:37:14 AM	SiCl4 post valve closed
3/22/2011	11:37:14 AM	Bubbler valve closed
3/22/2011	11:37:14 AM	Main Vac valve opened
3/22/2011	11:37:14 AM	Bypass valve opened
3/22/2011	11:37:14 AM	Helium MFC set to  0.000000
3/22/2011	11:37:14 AM	H2 MFC set to  0.000000
3/22/2011	11:37:14 AM	BCl3 MFC set to  0.000000
3/22/2011	11:37:14 AM	PHl3 MFC set to  0.000000
3/22/2011	11:37:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:37:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:37:14 AM	Tube furnace set to 0
3/22/2011	11:38:14 AM	H2 valve closed
3/22/2011	11:38:14 AM	BCl3 valve closed
3/22/2011	11:38:14 AM	PH3 valve closed
3/22/2011	11:38:14 AM	SiCl4 pre valve closed
3/22/2011	11:38:14 AM	SiCl4 post valve closed
3/22/2011	11:38:14 AM	Bubbler valve closed
3/22/2011	11:38:14 AM	Helium valve opened
3/22/2011	11:38:14 AM	Main Vac valve opened
3/22/2011	11:38:14 AM	Bypass valve opened
3/22/2011	11:38:14 AM	Helium MFC set to  100.000000
3/22/2011	11:38:14 AM	H2 MFC set to  0.000000
3/22/2011	11:38:14 AM	BCl3 MFC set to  0.000000
3/22/2011	11:38:14 AM	PHl3 MFC set to  0.000000
3/22/2011	11:38:14 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:38:14 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:38:15 AM	Tube furnace set to 0
3/22/2011	11:39:15 AM	Helium valve closed
3/22/2011	11:39:15 AM	H2 valve closed
3/22/2011	11:39:15 AM	BCl3 valve closed
3/22/2011	11:39:15 AM	PH3 valve closed
3/22/2011	11:39:15 AM	SiCl4 pre valve closed
3/22/2011	11:39:15 AM	SiCl4 post valve closed
3/22/2011	11:39:15 AM	Bubbler valve closed
3/22/2011	11:39:15 AM	Main Vac valve opened
3/22/2011	11:39:15 AM	Bypass valve opened
3/22/2011	11:39:15 AM	Helium MFC set to  0.000000
3/22/2011	11:39:15 AM	H2 MFC set to  0.000000
3/22/2011	11:39:15 AM	BCl3 MFC set to  0.000000
3/22/2011	11:39:15 AM	PHl3 MFC set to  0.000000
3/22/2011	11:39:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:39:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:39:15 AM	Tube furnace set to 0
3/22/2011	11:40:15 AM	H2 valve closed
3/22/2011	11:40:15 AM	BCl3 valve closed
3/22/2011	11:40:15 AM	PH3 valve closed
3/22/2011	11:40:15 AM	SiCl4 pre valve closed
3/22/2011	11:40:15 AM	SiCl4 post valve closed
3/22/2011	11:40:15 AM	Bubbler valve closed
3/22/2011	11:40:15 AM	Helium valve opened
3/22/2011	11:40:15 AM	Main Vac valve opened
3/22/2011	11:40:15 AM	Bypass valve opened
3/22/2011	11:40:15 AM	Helium MFC set to  100.000000
3/22/2011	11:40:15 AM	H2 MFC set to  0.000000
3/22/2011	11:40:15 AM	BCl3 MFC set to  0.000000
3/22/2011	11:40:15 AM	PHl3 MFC set to  0.000000
3/22/2011	11:40:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:40:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:40:15 AM	Tube furnace set to 0
3/22/2011	11:41:15 AM	Helium valve closed
3/22/2011	11:41:15 AM	H2 valve closed
3/22/2011	11:41:15 AM	BCl3 valve closed
3/22/2011	11:41:15 AM	PH3 valve closed
3/22/2011	11:41:15 AM	SiCl4 pre valve closed
3/22/2011	11:41:15 AM	SiCl4 post valve closed
3/22/2011	11:41:15 AM	Bubbler valve closed
3/22/2011	11:41:15 AM	Main Vac valve opened
3/22/2011	11:41:15 AM	Bypass valve opened
3/22/2011	11:41:15 AM	Helium MFC set to  0.000000
3/22/2011	11:41:15 AM	H2 MFC set to  0.000000
3/22/2011	11:41:15 AM	BCl3 MFC set to  0.000000
3/22/2011	11:41:15 AM	PHl3 MFC set to  0.000000
3/22/2011	11:41:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:41:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:41:15 AM	Tube furnace set to 0
3/22/2011	11:42:15 AM	H2 valve closed
3/22/2011	11:42:15 AM	BCl3 valve closed
3/22/2011	11:42:15 AM	PH3 valve closed
3/22/2011	11:42:15 AM	SiCl4 pre valve closed
3/22/2011	11:42:15 AM	SiCl4 post valve closed
3/22/2011	11:42:15 AM	Bubbler valve closed
3/22/2011	11:42:15 AM	Helium valve opened
3/22/2011	11:42:15 AM	Main Vac valve opened
3/22/2011	11:42:15 AM	Bypass valve opened
3/22/2011	11:42:15 AM	Helium MFC set to  100.000000
3/22/2011	11:42:15 AM	H2 MFC set to  0.000000
3/22/2011	11:42:15 AM	BCl3 MFC set to  0.000000
3/22/2011	11:42:15 AM	PHl3 MFC set to  0.000000
3/22/2011	11:42:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:42:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:42:15 AM	Tube furnace set to 0
3/22/2011	11:43:15 AM	Helium valve closed
3/22/2011	11:43:15 AM	H2 valve closed
3/22/2011	11:43:15 AM	BCl3 valve closed
3/22/2011	11:43:15 AM	PH3 valve closed
3/22/2011	11:43:15 AM	SiCl4 pre valve closed
3/22/2011	11:43:15 AM	SiCl4 post valve closed
3/22/2011	11:43:15 AM	Bubbler valve closed
3/22/2011	11:43:15 AM	Main Vac valve opened
3/22/2011	11:43:15 AM	Bypass valve opened
3/22/2011	11:43:15 AM	Helium MFC set to  0.000000
3/22/2011	11:43:15 AM	H2 MFC set to  0.000000
3/22/2011	11:43:15 AM	BCl3 MFC set to  0.000000
3/22/2011	11:43:15 AM	PHl3 MFC set to  0.000000
3/22/2011	11:43:15 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:43:15 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:43:16 AM	Tube furnace set to 0
3/22/2011	11:44:16 AM	H2 valve closed
3/22/2011	11:44:16 AM	BCl3 valve closed
3/22/2011	11:44:16 AM	PH3 valve closed
3/22/2011	11:44:16 AM	SiCl4 pre valve closed
3/22/2011	11:44:16 AM	SiCl4 post valve closed
3/22/2011	11:44:16 AM	Bubbler valve closed
3/22/2011	11:44:16 AM	Helium valve opened
3/22/2011	11:44:16 AM	Main Vac valve opened
3/22/2011	11:44:16 AM	Bypass valve opened
3/22/2011	11:44:16 AM	Helium MFC set to  100.000000
3/22/2011	11:44:16 AM	H2 MFC set to  0.000000
3/22/2011	11:44:16 AM	BCl3 MFC set to  0.000000
3/22/2011	11:44:16 AM	PHl3 MFC set to  0.000000
3/22/2011	11:44:16 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:44:16 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:44:16 AM	Tube furnace set to 0
3/22/2011	11:45:09 AM	Helium valve closed
3/22/2011	11:45:09 AM	H2 valve closed
3/22/2011	11:45:09 AM	BCl3 valve closed
3/22/2011	11:45:09 AM	PH3 valve closed
3/22/2011	11:45:09 AM	SiCl4 pre valve closed
3/22/2011	11:45:09 AM	SiCl4 post valve closed
3/22/2011	11:45:09 AM	Bubbler valve closed
3/22/2011	11:45:09 AM	Main Vac valve opened
3/22/2011	11:45:09 AM	Bypass valve opened
3/22/2011	11:45:09 AM	Helium MFC set to  0.000000
3/22/2011	11:45:09 AM	H2 MFC set to  0.000000
3/22/2011	11:45:09 AM	BCl3 MFC set to  0.000000
3/22/2011	11:45:09 AM	PHl3 MFC set to  0.000000
3/22/2011	11:45:09 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:45:09 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:45:09 AM	Tube furnace set to 0
3/22/2011	11:45:10 AM	Run finished at 11:45 AM
3/22/2011	11:45:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	11:45:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	11:45:54 AM	Recipe started at 11:45 AM
3/22/2011	11:45:54 AM	Helium valve closed
3/22/2011	11:45:54 AM	H2 valve closed
3/22/2011	11:45:54 AM	BCl3 valve closed
3/22/2011	11:45:54 AM	PH3 valve closed
3/22/2011	11:45:54 AM	SiCl4 pre valve closed
3/22/2011	11:45:54 AM	SiCl4 post valve closed
3/22/2011	11:45:54 AM	Main Vac valve closed
3/22/2011	11:45:54 AM	Bubbler valve closed
3/22/2011	11:45:54 AM	Bypass valve opened
3/22/2011	11:45:54 AM	Helium MFC set to  0.000000
3/22/2011	11:45:54 AM	H2 MFC set to  0.000000
3/22/2011	11:45:54 AM	BCl3 MFC set to  0.000000
3/22/2011	11:45:54 AM	PHl3 MFC set to  0.000000
3/22/2011	11:45:54 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:45:54 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:45:54 AM	Tube furnace set to 0
3/22/2011	11:45:55 AM	Helium valve closed
3/22/2011	11:45:55 AM	H2 valve closed
3/22/2011	11:45:55 AM	BCl3 valve closed
3/22/2011	11:45:55 AM	PH3 valve closed
3/22/2011	11:45:55 AM	SiCl4 pre valve closed
3/22/2011	11:45:55 AM	SiCl4 post valve closed
3/22/2011	11:45:55 AM	Bubbler valve closed
3/22/2011	11:45:55 AM	Main Vac valve opened
3/22/2011	11:45:55 AM	Bypass valve opened
3/22/2011	11:45:55 AM	Helium MFC set to  0.000000
3/22/2011	11:45:55 AM	H2 MFC set to  0.000000
3/22/2011	11:45:55 AM	BCl3 MFC set to  0.000000
3/22/2011	11:45:55 AM	PHl3 MFC set to  0.000000
3/22/2011	11:45:55 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:45:55 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:45:55 AM	Tube furnace set to 0
3/22/2011	11:46:55 AM	H2 valve closed
3/22/2011	11:46:55 AM	BCl3 valve closed
3/22/2011	11:46:55 AM	PH3 valve closed
3/22/2011	11:46:55 AM	SiCl4 pre valve closed
3/22/2011	11:46:55 AM	SiCl4 post valve closed
3/22/2011	11:46:55 AM	Bubbler valve closed
3/22/2011	11:46:55 AM	Helium valve opened
3/22/2011	11:46:55 AM	Main Vac valve opened
3/22/2011	11:46:55 AM	Bypass valve opened
3/22/2011	11:46:55 AM	Helium MFC set to  100.000000
3/22/2011	11:46:55 AM	H2 MFC set to  0.000000
3/22/2011	11:46:55 AM	BCl3 MFC set to  0.000000
3/22/2011	11:46:55 AM	PHl3 MFC set to  0.000000
3/22/2011	11:46:55 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:46:55 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:46:55 AM	Tube furnace set to 0
3/22/2011	11:47:55 AM	Helium valve closed
3/22/2011	11:47:55 AM	H2 valve closed
3/22/2011	11:47:55 AM	BCl3 valve closed
3/22/2011	11:47:55 AM	PH3 valve closed
3/22/2011	11:47:55 AM	SiCl4 pre valve closed
3/22/2011	11:47:55 AM	SiCl4 post valve closed
3/22/2011	11:47:55 AM	Bubbler valve closed
3/22/2011	11:47:55 AM	Main Vac valve opened
3/22/2011	11:47:55 AM	Bypass valve opened
3/22/2011	11:47:55 AM	Helium MFC set to  0.000000
3/22/2011	11:47:55 AM	H2 MFC set to  0.000000
3/22/2011	11:47:55 AM	BCl3 MFC set to  0.000000
3/22/2011	11:47:55 AM	PHl3 MFC set to  0.000000
3/22/2011	11:47:55 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:47:55 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:47:55 AM	Tube furnace set to 0
3/22/2011	11:48:55 AM	H2 valve closed
3/22/2011	11:48:55 AM	BCl3 valve closed
3/22/2011	11:48:55 AM	PH3 valve closed
3/22/2011	11:48:55 AM	SiCl4 pre valve closed
3/22/2011	11:48:55 AM	SiCl4 post valve closed
3/22/2011	11:48:55 AM	Bubbler valve closed
3/22/2011	11:48:55 AM	Helium valve opened
3/22/2011	11:48:55 AM	Main Vac valve opened
3/22/2011	11:48:55 AM	Bypass valve opened
3/22/2011	11:48:55 AM	Helium MFC set to  100.000000
3/22/2011	11:48:55 AM	H2 MFC set to  0.000000
3/22/2011	11:48:55 AM	BCl3 MFC set to  0.000000
3/22/2011	11:48:55 AM	PHl3 MFC set to  0.000000
3/22/2011	11:48:55 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:48:55 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:48:55 AM	Tube furnace set to 0
3/22/2011	11:49:55 AM	Helium valve closed
3/22/2011	11:49:55 AM	H2 valve closed
3/22/2011	11:49:55 AM	BCl3 valve closed
3/22/2011	11:49:55 AM	PH3 valve closed
3/22/2011	11:49:55 AM	SiCl4 pre valve closed
3/22/2011	11:49:55 AM	SiCl4 post valve closed
3/22/2011	11:49:55 AM	Bubbler valve closed
3/22/2011	11:49:55 AM	Main Vac valve opened
3/22/2011	11:49:55 AM	Bypass valve opened
3/22/2011	11:49:55 AM	Helium MFC set to  0.000000
3/22/2011	11:49:55 AM	H2 MFC set to  0.000000
3/22/2011	11:49:55 AM	BCl3 MFC set to  0.000000
3/22/2011	11:49:55 AM	PHl3 MFC set to  0.000000
3/22/2011	11:49:55 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:49:55 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:49:56 AM	Tube furnace set to 0
3/22/2011	11:50:56 AM	H2 valve closed
3/22/2011	11:50:56 AM	BCl3 valve closed
3/22/2011	11:50:56 AM	PH3 valve closed
3/22/2011	11:50:56 AM	SiCl4 pre valve closed
3/22/2011	11:50:56 AM	SiCl4 post valve closed
3/22/2011	11:50:56 AM	Bubbler valve closed
3/22/2011	11:50:56 AM	Helium valve opened
3/22/2011	11:50:56 AM	Main Vac valve opened
3/22/2011	11:50:56 AM	Bypass valve opened
3/22/2011	11:50:56 AM	Helium MFC set to  100.000000
3/22/2011	11:50:56 AM	H2 MFC set to  0.000000
3/22/2011	11:50:56 AM	BCl3 MFC set to  0.000000
3/22/2011	11:50:56 AM	PHl3 MFC set to  0.000000
3/22/2011	11:50:56 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:50:56 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:50:56 AM	Tube furnace set to 0
3/22/2011	11:51:56 AM	Helium valve closed
3/22/2011	11:51:56 AM	H2 valve closed
3/22/2011	11:51:56 AM	BCl3 valve closed
3/22/2011	11:51:56 AM	PH3 valve closed
3/22/2011	11:51:56 AM	SiCl4 pre valve closed
3/22/2011	11:51:56 AM	SiCl4 post valve closed
3/22/2011	11:51:56 AM	Bubbler valve closed
3/22/2011	11:51:56 AM	Main Vac valve opened
3/22/2011	11:51:56 AM	Bypass valve opened
3/22/2011	11:51:56 AM	Helium MFC set to  0.000000
3/22/2011	11:51:56 AM	H2 MFC set to  0.000000
3/22/2011	11:51:56 AM	BCl3 MFC set to  0.000000
3/22/2011	11:51:56 AM	PHl3 MFC set to  0.000000
3/22/2011	11:51:56 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:51:56 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:51:56 AM	Tube furnace set to 0
3/22/2011	11:52:56 AM	H2 valve closed
3/22/2011	11:52:56 AM	BCl3 valve closed
3/22/2011	11:52:56 AM	PH3 valve closed
3/22/2011	11:52:56 AM	SiCl4 pre valve closed
3/22/2011	11:52:56 AM	SiCl4 post valve closed
3/22/2011	11:52:56 AM	Bubbler valve closed
3/22/2011	11:52:56 AM	Helium valve opened
3/22/2011	11:52:56 AM	Main Vac valve opened
3/22/2011	11:52:56 AM	Bypass valve opened
3/22/2011	11:52:56 AM	Helium MFC set to  100.000000
3/22/2011	11:52:56 AM	H2 MFC set to  0.000000
3/22/2011	11:52:56 AM	BCl3 MFC set to  0.000000
3/22/2011	11:52:56 AM	PHl3 MFC set to  0.000000
3/22/2011	11:52:56 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:52:56 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:52:56 AM	Tube furnace set to 0
3/22/2011	11:53:56 AM	Helium valve closed
3/22/2011	11:53:56 AM	H2 valve closed
3/22/2011	11:53:56 AM	BCl3 valve closed
3/22/2011	11:53:56 AM	PH3 valve closed
3/22/2011	11:53:56 AM	SiCl4 pre valve closed
3/22/2011	11:53:56 AM	SiCl4 post valve closed
3/22/2011	11:53:56 AM	Bubbler valve closed
3/22/2011	11:53:56 AM	Main Vac valve opened
3/22/2011	11:53:56 AM	Bypass valve opened
3/22/2011	11:53:56 AM	Helium MFC set to  0.000000
3/22/2011	11:53:56 AM	H2 MFC set to  0.000000
3/22/2011	11:53:56 AM	BCl3 MFC set to  0.000000
3/22/2011	11:53:56 AM	PHl3 MFC set to  0.000000
3/22/2011	11:53:56 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:53:56 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:53:56 AM	Tube furnace set to 0
3/22/2011	11:54:56 AM	H2 valve closed
3/22/2011	11:54:56 AM	BCl3 valve closed
3/22/2011	11:54:56 AM	PH3 valve closed
3/22/2011	11:54:56 AM	SiCl4 pre valve closed
3/22/2011	11:54:56 AM	SiCl4 post valve closed
3/22/2011	11:54:56 AM	Bubbler valve closed
3/22/2011	11:54:56 AM	Helium valve opened
3/22/2011	11:54:56 AM	Main Vac valve opened
3/22/2011	11:54:56 AM	Bypass valve opened
3/22/2011	11:54:56 AM	Helium MFC set to  100.000000
3/22/2011	11:54:56 AM	H2 MFC set to  0.000000
3/22/2011	11:54:56 AM	BCl3 MFC set to  0.000000
3/22/2011	11:54:56 AM	PHl3 MFC set to  0.000000
3/22/2011	11:54:56 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:54:56 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:54:56 AM	Tube furnace set to 0
3/22/2011	11:55:57 AM	Helium valve closed
3/22/2011	11:55:57 AM	H2 valve closed
3/22/2011	11:55:57 AM	BCl3 valve closed
3/22/2011	11:55:57 AM	PH3 valve closed
3/22/2011	11:55:57 AM	SiCl4 pre valve closed
3/22/2011	11:55:57 AM	SiCl4 post valve closed
3/22/2011	11:55:57 AM	Bubbler valve closed
3/22/2011	11:55:57 AM	Main Vac valve opened
3/22/2011	11:55:57 AM	Bypass valve opened
3/22/2011	11:55:57 AM	Helium MFC set to  0.000000
3/22/2011	11:55:57 AM	H2 MFC set to  0.000000
3/22/2011	11:55:57 AM	BCl3 MFC set to  0.000000
3/22/2011	11:55:57 AM	PHl3 MFC set to  0.000000
3/22/2011	11:55:57 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:55:57 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:55:57 AM	Tube furnace set to 0
3/22/2011	11:56:57 AM	H2 valve closed
3/22/2011	11:56:57 AM	BCl3 valve closed
3/22/2011	11:56:57 AM	PH3 valve closed
3/22/2011	11:56:57 AM	SiCl4 pre valve closed
3/22/2011	11:56:57 AM	SiCl4 post valve closed
3/22/2011	11:56:57 AM	Bubbler valve closed
3/22/2011	11:56:57 AM	Helium valve opened
3/22/2011	11:56:57 AM	Main Vac valve opened
3/22/2011	11:56:57 AM	Bypass valve opened
3/22/2011	11:56:57 AM	Helium MFC set to  100.000000
3/22/2011	11:56:57 AM	H2 MFC set to  0.000000
3/22/2011	11:56:57 AM	BCl3 MFC set to  0.000000
3/22/2011	11:56:57 AM	PHl3 MFC set to  0.000000
3/22/2011	11:56:57 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:56:57 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:56:57 AM	Tube furnace set to 0
3/22/2011	11:57:57 AM	Helium valve closed
3/22/2011	11:57:57 AM	H2 valve closed
3/22/2011	11:57:57 AM	BCl3 valve closed
3/22/2011	11:57:57 AM	PH3 valve closed
3/22/2011	11:57:57 AM	SiCl4 pre valve closed
3/22/2011	11:57:57 AM	SiCl4 post valve closed
3/22/2011	11:57:57 AM	Bubbler valve closed
3/22/2011	11:57:57 AM	Main Vac valve opened
3/22/2011	11:57:57 AM	Bypass valve opened
3/22/2011	11:57:57 AM	Helium MFC set to  0.000000
3/22/2011	11:57:57 AM	H2 MFC set to  0.000000
3/22/2011	11:57:57 AM	BCl3 MFC set to  0.000000
3/22/2011	11:57:57 AM	PHl3 MFC set to  0.000000
3/22/2011	11:57:57 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:57:57 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:57:57 AM	Tube furnace set to 0
3/22/2011	11:58:57 AM	H2 valve closed
3/22/2011	11:58:57 AM	BCl3 valve closed
3/22/2011	11:58:57 AM	PH3 valve closed
3/22/2011	11:58:57 AM	SiCl4 pre valve closed
3/22/2011	11:58:57 AM	SiCl4 post valve closed
3/22/2011	11:58:57 AM	Bubbler valve closed
3/22/2011	11:58:57 AM	Helium valve opened
3/22/2011	11:58:57 AM	Main Vac valve opened
3/22/2011	11:58:57 AM	Bypass valve opened
3/22/2011	11:58:57 AM	Helium MFC set to  100.000000
3/22/2011	11:58:57 AM	H2 MFC set to  0.000000
3/22/2011	11:58:57 AM	BCl3 MFC set to  0.000000
3/22/2011	11:58:57 AM	PHl3 MFC set to  0.000000
3/22/2011	11:58:57 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:58:57 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:58:57 AM	Tube furnace set to 0
3/22/2011	11:59:57 AM	Helium valve closed
3/22/2011	11:59:57 AM	H2 valve closed
3/22/2011	11:59:57 AM	BCl3 valve closed
3/22/2011	11:59:57 AM	PH3 valve closed
3/22/2011	11:59:57 AM	SiCl4 pre valve closed
3/22/2011	11:59:57 AM	SiCl4 post valve closed
3/22/2011	11:59:57 AM	Bubbler valve closed
3/22/2011	11:59:57 AM	Main Vac valve opened
3/22/2011	11:59:57 AM	Bypass valve opened
3/22/2011	11:59:57 AM	Helium MFC set to  0.000000
3/22/2011	11:59:57 AM	H2 MFC set to  0.000000
3/22/2011	11:59:57 AM	BCl3 MFC set to  0.000000
3/22/2011	11:59:57 AM	PHl3 MFC set to  0.000000
3/22/2011	11:59:57 AM	SiCl4 MFC set to  0.000000
3/22/2011	11:59:57 AM	Bypass solenoid MFC set to  0.000000
3/22/2011	11:59:57 AM	Tube furnace set to 0
3/22/2011	12:00:46 PM	Run aborted at 12:00 PM
3/22/2011	12:00:46 PM	Helium valve closed
3/22/2011	12:00:46 PM	H2 valve closed
3/22/2011	12:00:46 PM	BCl3 valve closed
3/22/2011	12:00:46 PM	PH3 valve closed
3/22/2011	12:00:46 PM	SiCl4 pre valve closed
3/22/2011	12:00:46 PM	SiCl4 post valve closed
3/22/2011	12:00:46 PM	Bypass valve closed
3/22/2011	12:00:46 PM	Main Vac valve closed
3/22/2011	12:00:46 PM	Bubbler valve closed
3/22/2011	12:00:46 PM	Helium MFC set to  0.000000
3/22/2011	12:00:46 PM	H2 MFC set to  0.000000
3/22/2011	12:00:46 PM	BCl3 MFC set to  0.000000
3/22/2011	12:00:46 PM	PHl3 MFC set to  0.000000
3/22/2011	12:00:46 PM	SiCl4 MFC set to  0.000000
3/22/2011	12:00:47 PM	Tube furnace set to 0
3/22/2011	12:00:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	12:00:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	12:00:50 PM	Recipe started at 12:00 PM
3/22/2011	12:00:50 PM	Helium valve closed
3/22/2011	12:00:50 PM	H2 valve closed
3/22/2011	12:00:50 PM	BCl3 valve closed
3/22/2011	12:00:50 PM	PH3 valve closed
3/22/2011	12:00:50 PM	SiCl4 pre valve closed
3/22/2011	12:00:50 PM	SiCl4 post valve closed
3/22/2011	12:00:50 PM	Main Vac valve closed
3/22/2011	12:00:50 PM	Bubbler valve closed
3/22/2011	12:00:50 PM	Bypass valve opened
3/22/2011	12:00:50 PM	Helium MFC set to  0.000000
3/22/2011	12:00:50 PM	H2 MFC set to  0.000000
3/22/2011	12:00:50 PM	BCl3 MFC set to  0.000000
3/22/2011	12:00:50 PM	PHl3 MFC set to  0.000000
3/22/2011	12:00:50 PM	SiCl4 MFC set to  0.000000
3/22/2011	12:00:50 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	12:00:50 PM	Tube furnace set to 0
3/22/2011	12:00:50 PM	Helium valve closed
3/22/2011	12:00:50 PM	H2 valve closed
3/22/2011	12:00:50 PM	BCl3 valve closed
3/22/2011	12:00:50 PM	PH3 valve closed
3/22/2011	12:00:50 PM	SiCl4 pre valve closed
3/22/2011	12:00:50 PM	SiCl4 post valve closed
3/22/2011	12:00:50 PM	Bubbler valve closed
3/22/2011	12:00:50 PM	Main Vac valve opened
3/22/2011	12:00:50 PM	Bypass valve opened
3/22/2011	12:00:50 PM	Helium MFC set to  0.000000
3/22/2011	12:00:50 PM	H2 MFC set to  0.000000
3/22/2011	12:00:50 PM	BCl3 MFC set to  0.000000
3/22/2011	12:00:50 PM	PHl3 MFC set to  0.000000
3/22/2011	12:00:50 PM	SiCl4 MFC set to  0.000000
3/22/2011	12:00:50 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	12:00:50 PM	Tube furnace set to 0
3/22/2011	12:00:50 PM	Run finished at 12:00 PM
3/22/2011	12:00:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	12:01:14 PM	Recipe started at 12:01 PM
3/22/2011	12:01:14 PM	Helium valve closed
3/22/2011	12:01:14 PM	BCl3 valve closed
3/22/2011	12:01:14 PM	PH3 valve closed
3/22/2011	12:01:14 PM	SiCl4 pre valve closed
3/22/2011	12:01:14 PM	SiCl4 post valve closed
3/22/2011	12:01:14 PM	Main Vac valve closed
3/22/2011	12:01:14 PM	Bypass valve closed
3/22/2011	12:01:14 PM	Bubbler valve closed
3/22/2011	12:01:14 PM	H2 valve opened
3/22/2011	12:01:14 PM	Helium MFC set to  0.000000
3/22/2011	12:01:14 PM	H2 MFC set to  500.000000
3/22/2011	12:01:14 PM	BCl3 MFC set to  0.000000
3/22/2011	12:01:14 PM	PHl3 MFC set to  0.000000
3/22/2011	12:01:14 PM	SiCl4 MFC set to  0.000000
3/22/2011	12:01:14 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	12:01:14 PM	Tube furnace set to 0
3/22/2011	1:15:25 PM	Run aborted at 1:15 PM
3/22/2011	1:15:25 PM	Helium valve closed
3/22/2011	1:15:25 PM	H2 valve closed
3/22/2011	1:15:25 PM	BCl3 valve closed
3/22/2011	1:15:25 PM	PH3 valve closed
3/22/2011	1:15:25 PM	SiCl4 pre valve closed
3/22/2011	1:15:25 PM	SiCl4 post valve closed
3/22/2011	1:15:25 PM	Bypass valve closed
3/22/2011	1:15:25 PM	Main Vac valve closed
3/22/2011	1:15:25 PM	Bubbler valve closed
3/22/2011	1:15:25 PM	Helium MFC set to  0.000000
3/22/2011	1:15:25 PM	H2 MFC set to  0.000000
3/22/2011	1:15:25 PM	BCl3 MFC set to  0.000000
3/22/2011	1:15:25 PM	PHl3 MFC set to  0.000000
3/22/2011	1:15:25 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:15:25 PM	Tube furnace set to 0
3/22/2011	1:15:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	1:15:29 PM	Recipe started at 1:15 PM
3/22/2011	1:15:29 PM	Helium valve closed
3/22/2011	1:15:29 PM	H2 valve closed
3/22/2011	1:15:29 PM	BCl3 valve closed
3/22/2011	1:15:29 PM	PH3 valve closed
3/22/2011	1:15:29 PM	SiCl4 pre valve closed
3/22/2011	1:15:29 PM	SiCl4 post valve closed
3/22/2011	1:15:29 PM	Main Vac valve closed
3/22/2011	1:15:29 PM	Bubbler valve closed
3/22/2011	1:15:29 PM	Bypass valve opened
3/22/2011	1:15:29 PM	Helium MFC set to  0.000000
3/22/2011	1:15:29 PM	H2 MFC set to  0.000000
3/22/2011	1:15:29 PM	BCl3 MFC set to  0.000000
3/22/2011	1:15:29 PM	PHl3 MFC set to  0.000000
3/22/2011	1:15:29 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:15:29 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:15:29 PM	Tube furnace set to 0
3/22/2011	1:15:41 PM	Run aborted at 1:15 PM
3/22/2011	1:15:41 PM	Helium valve closed
3/22/2011	1:15:41 PM	H2 valve closed
3/22/2011	1:15:41 PM	BCl3 valve closed
3/22/2011	1:15:41 PM	PH3 valve closed
3/22/2011	1:15:41 PM	SiCl4 pre valve closed
3/22/2011	1:15:41 PM	SiCl4 post valve closed
3/22/2011	1:15:41 PM	Bypass valve closed
3/22/2011	1:15:41 PM	Main Vac valve closed
3/22/2011	1:15:41 PM	Bubbler valve closed
3/22/2011	1:15:41 PM	Helium MFC set to  0.000000
3/22/2011	1:15:41 PM	H2 MFC set to  0.000000
3/22/2011	1:15:41 PM	BCl3 MFC set to  0.000000
3/22/2011	1:15:41 PM	PHl3 MFC set to  0.000000
3/22/2011	1:15:41 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:15:42 PM	Tube furnace set to 0
3/22/2011	1:15:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	1:15:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2011	1:15:45 PM	Recipe started at 1:15 PM
3/22/2011	1:15:45 PM	H2 valve closed
3/22/2011	1:15:45 PM	BCl3 valve closed
3/22/2011	1:15:45 PM	PH3 valve closed
3/22/2011	1:15:45 PM	SiCl4 pre valve closed
3/22/2011	1:15:45 PM	SiCl4 post valve closed
3/22/2011	1:15:45 PM	Main Vac valve closed
3/22/2011	1:15:45 PM	Bypass valve closed
3/22/2011	1:15:45 PM	Bubbler valve closed
3/22/2011	1:15:45 PM	Helium valve opened
3/22/2011	1:15:45 PM	Helium MFC set to  500.000000
3/22/2011	1:15:45 PM	H2 MFC set to  0.000000
3/22/2011	1:15:45 PM	BCl3 MFC set to  0.000000
3/22/2011	1:15:45 PM	PHl3 MFC set to  0.000000
3/22/2011	1:15:45 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:15:45 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:15:45 PM	Tube furnace set to 0
3/22/2011	1:17:04 PM	Run aborted at 1:17 PM
3/22/2011	1:17:04 PM	Helium valve closed
3/22/2011	1:17:04 PM	H2 valve closed
3/22/2011	1:17:04 PM	BCl3 valve closed
3/22/2011	1:17:04 PM	PH3 valve closed
3/22/2011	1:17:04 PM	SiCl4 pre valve closed
3/22/2011	1:17:04 PM	SiCl4 post valve closed
3/22/2011	1:17:04 PM	Bypass valve closed
3/22/2011	1:17:04 PM	Main Vac valve closed
3/22/2011	1:17:04 PM	Bubbler valve closed
3/22/2011	1:17:04 PM	Helium MFC set to  0.000000
3/22/2011	1:17:04 PM	H2 MFC set to  0.000000
3/22/2011	1:17:04 PM	BCl3 MFC set to  0.000000
3/22/2011	1:17:04 PM	PHl3 MFC set to  0.000000
3/22/2011	1:17:04 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:17:04 PM	Tube furnace set to 0
3/22/2011	1:17:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/22/2011	1:23:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	1:23:51 PM	Recipe started at 1:23 PM
3/22/2011	1:23:51 PM	Helium valve closed
3/22/2011	1:23:51 PM	H2 valve closed
3/22/2011	1:23:51 PM	BCl3 valve closed
3/22/2011	1:23:51 PM	PH3 valve closed
3/22/2011	1:23:51 PM	SiCl4 pre valve closed
3/22/2011	1:23:51 PM	SiCl4 post valve closed
3/22/2011	1:23:51 PM	Main Vac valve closed
3/22/2011	1:23:51 PM	Bubbler valve closed
3/22/2011	1:23:51 PM	Bypass valve opened
3/22/2011	1:23:51 PM	Helium MFC set to  0.000000
3/22/2011	1:23:51 PM	H2 MFC set to  0.000000
3/22/2011	1:23:51 PM	BCl3 MFC set to  0.000000
3/22/2011	1:23:51 PM	PHl3 MFC set to  0.000000
3/22/2011	1:23:51 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:23:51 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:23:51 PM	Tube furnace set to 0
3/22/2011	1:24:26 PM	Helium valve closed
3/22/2011	1:24:26 PM	H2 valve closed
3/22/2011	1:24:26 PM	BCl3 valve closed
3/22/2011	1:24:26 PM	PH3 valve closed
3/22/2011	1:24:26 PM	SiCl4 pre valve closed
3/22/2011	1:24:26 PM	SiCl4 post valve closed
3/22/2011	1:24:26 PM	Bubbler valve closed
3/22/2011	1:24:26 PM	Main Vac valve opened
3/22/2011	1:24:26 PM	Bypass valve opened
3/22/2011	1:24:26 PM	Helium MFC set to  0.000000
3/22/2011	1:24:26 PM	H2 MFC set to  0.000000
3/22/2011	1:24:26 PM	BCl3 MFC set to  0.000000
3/22/2011	1:24:26 PM	PHl3 MFC set to  0.000000
3/22/2011	1:24:26 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:24:26 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:24:27 PM	Tube furnace set to 0
3/22/2011	1:24:27 PM	Run finished at 1:24 PM
3/22/2011	1:24:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	1:24:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	1:24:33 PM	Recipe started at 1:24 PM
3/22/2011	1:24:33 PM	Helium valve closed
3/22/2011	1:24:33 PM	H2 valve closed
3/22/2011	1:24:33 PM	BCl3 valve closed
3/22/2011	1:24:33 PM	PH3 valve closed
3/22/2011	1:24:33 PM	SiCl4 pre valve closed
3/22/2011	1:24:33 PM	SiCl4 post valve closed
3/22/2011	1:24:33 PM	Main Vac valve closed
3/22/2011	1:24:33 PM	Bubbler valve closed
3/22/2011	1:24:33 PM	Bypass valve opened
3/22/2011	1:24:33 PM	Helium MFC set to  0.000000
3/22/2011	1:24:33 PM	H2 MFC set to  0.000000
3/22/2011	1:24:33 PM	BCl3 MFC set to  0.000000
3/22/2011	1:24:33 PM	PHl3 MFC set to  0.000000
3/22/2011	1:24:33 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:24:33 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:24:33 PM	Tube furnace set to 0
3/22/2011	1:24:33 PM	Helium valve closed
3/22/2011	1:24:33 PM	H2 valve closed
3/22/2011	1:24:33 PM	BCl3 valve closed
3/22/2011	1:24:33 PM	PH3 valve closed
3/22/2011	1:24:33 PM	SiCl4 pre valve closed
3/22/2011	1:24:33 PM	SiCl4 post valve closed
3/22/2011	1:24:33 PM	Bubbler valve closed
3/22/2011	1:24:33 PM	Main Vac valve opened
3/22/2011	1:24:33 PM	Bypass valve opened
3/22/2011	1:24:33 PM	Helium MFC set to  0.000000
3/22/2011	1:24:33 PM	H2 MFC set to  0.000000
3/22/2011	1:24:33 PM	BCl3 MFC set to  0.000000
3/22/2011	1:24:33 PM	PHl3 MFC set to  0.000000
3/22/2011	1:24:33 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:24:33 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:24:33 PM	Tube furnace set to 0
3/22/2011	1:24:33 PM	Run finished at 1:24 PM
3/22/2011	1:24:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	1:25:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	1:25:13 PM	Recipe started at 1:25 PM
3/22/2011	1:25:13 PM	Helium valve closed
3/22/2011	1:25:13 PM	H2 valve closed
3/22/2011	1:25:13 PM	BCl3 valve closed
3/22/2011	1:25:13 PM	PH3 valve closed
3/22/2011	1:25:13 PM	SiCl4 pre valve closed
3/22/2011	1:25:13 PM	SiCl4 post valve closed
3/22/2011	1:25:13 PM	Main Vac valve closed
3/22/2011	1:25:13 PM	Bubbler valve closed
3/22/2011	1:25:13 PM	Bypass valve opened
3/22/2011	1:25:13 PM	Helium MFC set to  0.000000
3/22/2011	1:25:13 PM	H2 MFC set to  0.000000
3/22/2011	1:25:13 PM	BCl3 MFC set to  0.000000
3/22/2011	1:25:13 PM	PHl3 MFC set to  0.000000
3/22/2011	1:25:13 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:25:13 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:25:13 PM	Tube furnace set to 0
3/22/2011	1:25:13 PM	Helium valve closed
3/22/2011	1:25:13 PM	H2 valve closed
3/22/2011	1:25:13 PM	BCl3 valve closed
3/22/2011	1:25:13 PM	PH3 valve closed
3/22/2011	1:25:13 PM	SiCl4 pre valve closed
3/22/2011	1:25:13 PM	SiCl4 post valve closed
3/22/2011	1:25:13 PM	Bubbler valve closed
3/22/2011	1:25:13 PM	Main Vac valve opened
3/22/2011	1:25:13 PM	Bypass valve opened
3/22/2011	1:25:13 PM	Helium MFC set to  0.000000
3/22/2011	1:25:13 PM	H2 MFC set to  0.000000
3/22/2011	1:25:13 PM	BCl3 MFC set to  0.000000
3/22/2011	1:25:13 PM	PHl3 MFC set to  0.000000
3/22/2011	1:25:13 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:25:13 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:25:13 PM	Tube furnace set to 0
3/22/2011	1:26:13 PM	H2 valve closed
3/22/2011	1:26:13 PM	BCl3 valve closed
3/22/2011	1:26:13 PM	PH3 valve closed
3/22/2011	1:26:13 PM	SiCl4 pre valve closed
3/22/2011	1:26:13 PM	SiCl4 post valve closed
3/22/2011	1:26:13 PM	Bubbler valve closed
3/22/2011	1:26:13 PM	Helium valve opened
3/22/2011	1:26:13 PM	Main Vac valve opened
3/22/2011	1:26:13 PM	Bypass valve opened
3/22/2011	1:26:13 PM	Helium MFC set to  100.000000
3/22/2011	1:26:13 PM	H2 MFC set to  0.000000
3/22/2011	1:26:13 PM	BCl3 MFC set to  0.000000
3/22/2011	1:26:13 PM	PHl3 MFC set to  0.000000
3/22/2011	1:26:13 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:26:13 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:26:14 PM	Tube furnace set to 0
3/22/2011	1:27:14 PM	Helium valve closed
3/22/2011	1:27:14 PM	H2 valve closed
3/22/2011	1:27:14 PM	BCl3 valve closed
3/22/2011	1:27:14 PM	PH3 valve closed
3/22/2011	1:27:14 PM	SiCl4 pre valve closed
3/22/2011	1:27:14 PM	SiCl4 post valve closed
3/22/2011	1:27:14 PM	Bubbler valve closed
3/22/2011	1:27:14 PM	Main Vac valve opened
3/22/2011	1:27:14 PM	Bypass valve opened
3/22/2011	1:27:14 PM	Helium MFC set to  0.000000
3/22/2011	1:27:14 PM	H2 MFC set to  0.000000
3/22/2011	1:27:14 PM	BCl3 MFC set to  0.000000
3/22/2011	1:27:14 PM	PHl3 MFC set to  0.000000
3/22/2011	1:27:14 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:27:14 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:27:14 PM	Tube furnace set to 0
3/22/2011	1:28:14 PM	H2 valve closed
3/22/2011	1:28:14 PM	BCl3 valve closed
3/22/2011	1:28:14 PM	PH3 valve closed
3/22/2011	1:28:14 PM	SiCl4 pre valve closed
3/22/2011	1:28:14 PM	SiCl4 post valve closed
3/22/2011	1:28:14 PM	Bubbler valve closed
3/22/2011	1:28:14 PM	Helium valve opened
3/22/2011	1:28:14 PM	Main Vac valve opened
3/22/2011	1:28:14 PM	Bypass valve opened
3/22/2011	1:28:14 PM	Helium MFC set to  100.000000
3/22/2011	1:28:14 PM	H2 MFC set to  0.000000
3/22/2011	1:28:14 PM	BCl3 MFC set to  0.000000
3/22/2011	1:28:14 PM	PHl3 MFC set to  0.000000
3/22/2011	1:28:14 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:28:14 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:28:14 PM	Tube furnace set to 0
3/22/2011	1:29:14 PM	Helium valve closed
3/22/2011	1:29:14 PM	H2 valve closed
3/22/2011	1:29:14 PM	BCl3 valve closed
3/22/2011	1:29:14 PM	PH3 valve closed
3/22/2011	1:29:14 PM	SiCl4 pre valve closed
3/22/2011	1:29:14 PM	SiCl4 post valve closed
3/22/2011	1:29:14 PM	Bubbler valve closed
3/22/2011	1:29:14 PM	Main Vac valve opened
3/22/2011	1:29:14 PM	Bypass valve opened
3/22/2011	1:29:14 PM	Helium MFC set to  0.000000
3/22/2011	1:29:14 PM	H2 MFC set to  0.000000
3/22/2011	1:29:14 PM	BCl3 MFC set to  0.000000
3/22/2011	1:29:14 PM	PHl3 MFC set to  0.000000
3/22/2011	1:29:14 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:29:14 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:29:14 PM	Tube furnace set to 0
3/22/2011	1:30:14 PM	H2 valve closed
3/22/2011	1:30:14 PM	BCl3 valve closed
3/22/2011	1:30:14 PM	PH3 valve closed
3/22/2011	1:30:14 PM	SiCl4 pre valve closed
3/22/2011	1:30:14 PM	SiCl4 post valve closed
3/22/2011	1:30:14 PM	Bubbler valve closed
3/22/2011	1:30:14 PM	Helium valve opened
3/22/2011	1:30:14 PM	Main Vac valve opened
3/22/2011	1:30:14 PM	Bypass valve opened
3/22/2011	1:30:14 PM	Helium MFC set to  100.000000
3/22/2011	1:30:14 PM	H2 MFC set to  0.000000
3/22/2011	1:30:14 PM	BCl3 MFC set to  0.000000
3/22/2011	1:30:14 PM	PHl3 MFC set to  0.000000
3/22/2011	1:30:14 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:30:14 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:30:14 PM	Tube furnace set to 0
3/22/2011	1:31:14 PM	Helium valve closed
3/22/2011	1:31:14 PM	H2 valve closed
3/22/2011	1:31:14 PM	BCl3 valve closed
3/22/2011	1:31:14 PM	PH3 valve closed
3/22/2011	1:31:14 PM	SiCl4 pre valve closed
3/22/2011	1:31:14 PM	SiCl4 post valve closed
3/22/2011	1:31:14 PM	Bubbler valve closed
3/22/2011	1:31:14 PM	Main Vac valve opened
3/22/2011	1:31:14 PM	Bypass valve opened
3/22/2011	1:31:14 PM	Helium MFC set to  0.000000
3/22/2011	1:31:14 PM	H2 MFC set to  0.000000
3/22/2011	1:31:14 PM	BCl3 MFC set to  0.000000
3/22/2011	1:31:14 PM	PHl3 MFC set to  0.000000
3/22/2011	1:31:14 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:31:14 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:31:15 PM	Tube furnace set to 0
3/22/2011	1:32:15 PM	H2 valve closed
3/22/2011	1:32:15 PM	BCl3 valve closed
3/22/2011	1:32:15 PM	PH3 valve closed
3/22/2011	1:32:15 PM	SiCl4 pre valve closed
3/22/2011	1:32:15 PM	SiCl4 post valve closed
3/22/2011	1:32:15 PM	Bubbler valve closed
3/22/2011	1:32:15 PM	Helium valve opened
3/22/2011	1:32:15 PM	Main Vac valve opened
3/22/2011	1:32:15 PM	Bypass valve opened
3/22/2011	1:32:15 PM	Helium MFC set to  100.000000
3/22/2011	1:32:15 PM	H2 MFC set to  0.000000
3/22/2011	1:32:15 PM	BCl3 MFC set to  0.000000
3/22/2011	1:32:15 PM	PHl3 MFC set to  0.000000
3/22/2011	1:32:15 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:32:15 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:32:15 PM	Tube furnace set to 0
3/22/2011	1:33:15 PM	Helium valve closed
3/22/2011	1:33:15 PM	H2 valve closed
3/22/2011	1:33:15 PM	BCl3 valve closed
3/22/2011	1:33:15 PM	PH3 valve closed
3/22/2011	1:33:15 PM	SiCl4 pre valve closed
3/22/2011	1:33:15 PM	SiCl4 post valve closed
3/22/2011	1:33:15 PM	Bubbler valve closed
3/22/2011	1:33:15 PM	Main Vac valve opened
3/22/2011	1:33:15 PM	Bypass valve opened
3/22/2011	1:33:15 PM	Helium MFC set to  0.000000
3/22/2011	1:33:15 PM	H2 MFC set to  0.000000
3/22/2011	1:33:15 PM	BCl3 MFC set to  0.000000
3/22/2011	1:33:15 PM	PHl3 MFC set to  0.000000
3/22/2011	1:33:15 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:33:15 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:33:15 PM	Tube furnace set to 0
3/22/2011	1:33:53 PM	Run aborted at 1:33 PM
3/22/2011	1:33:53 PM	Helium valve closed
3/22/2011	1:33:53 PM	H2 valve closed
3/22/2011	1:33:53 PM	BCl3 valve closed
3/22/2011	1:33:53 PM	PH3 valve closed
3/22/2011	1:33:53 PM	SiCl4 pre valve closed
3/22/2011	1:33:53 PM	SiCl4 post valve closed
3/22/2011	1:33:53 PM	Bypass valve closed
3/22/2011	1:33:53 PM	Main Vac valve closed
3/22/2011	1:33:53 PM	Bubbler valve closed
3/22/2011	1:33:53 PM	Helium MFC set to  0.000000
3/22/2011	1:33:53 PM	H2 MFC set to  0.000000
3/22/2011	1:33:53 PM	BCl3 MFC set to  0.000000
3/22/2011	1:33:53 PM	PHl3 MFC set to  0.000000
3/22/2011	1:33:53 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:33:53 PM	Tube furnace set to 0
3/22/2011	1:33:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	1:33:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	1:33:56 PM	Recipe started at 1:33 PM
3/22/2011	1:33:56 PM	Helium valve closed
3/22/2011	1:33:56 PM	H2 valve closed
3/22/2011	1:33:56 PM	BCl3 valve closed
3/22/2011	1:33:56 PM	PH3 valve closed
3/22/2011	1:33:56 PM	SiCl4 pre valve closed
3/22/2011	1:33:56 PM	SiCl4 post valve closed
3/22/2011	1:33:56 PM	Main Vac valve closed
3/22/2011	1:33:56 PM	Bubbler valve closed
3/22/2011	1:33:56 PM	Bypass valve opened
3/22/2011	1:33:56 PM	Helium MFC set to  0.000000
3/22/2011	1:33:56 PM	H2 MFC set to  0.000000
3/22/2011	1:33:56 PM	BCl3 MFC set to  0.000000
3/22/2011	1:33:56 PM	PHl3 MFC set to  0.000000
3/22/2011	1:33:56 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:33:56 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:33:56 PM	Tube furnace set to 0
3/22/2011	1:33:56 PM	Helium valve closed
3/22/2011	1:33:56 PM	H2 valve closed
3/22/2011	1:33:56 PM	BCl3 valve closed
3/22/2011	1:33:56 PM	PH3 valve closed
3/22/2011	1:33:56 PM	SiCl4 pre valve closed
3/22/2011	1:33:56 PM	SiCl4 post valve closed
3/22/2011	1:33:56 PM	Bubbler valve closed
3/22/2011	1:33:56 PM	Main Vac valve opened
3/22/2011	1:33:56 PM	Bypass valve opened
3/22/2011	1:33:56 PM	Helium MFC set to  0.000000
3/22/2011	1:33:56 PM	H2 MFC set to  0.000000
3/22/2011	1:33:56 PM	BCl3 MFC set to  0.000000
3/22/2011	1:33:56 PM	PHl3 MFC set to  0.000000
3/22/2011	1:33:56 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:33:56 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:33:56 PM	Tube furnace set to 0
3/22/2011	1:33:57 PM	Run finished at 1:33 PM
3/22/2011	1:33:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	1:34:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	1:34:33 PM	Recipe started at 1:34 PM
3/22/2011	1:34:33 PM	Helium valve closed
3/22/2011	1:34:33 PM	H2 valve closed
3/22/2011	1:34:33 PM	BCl3 valve closed
3/22/2011	1:34:33 PM	PH3 valve closed
3/22/2011	1:34:33 PM	SiCl4 pre valve closed
3/22/2011	1:34:33 PM	SiCl4 post valve closed
3/22/2011	1:34:33 PM	Main Vac valve closed
3/22/2011	1:34:33 PM	Bubbler valve closed
3/22/2011	1:34:33 PM	Bypass valve opened
3/22/2011	1:34:33 PM	Helium MFC set to  0.000000
3/22/2011	1:34:33 PM	H2 MFC set to  0.000000
3/22/2011	1:34:33 PM	BCl3 MFC set to  0.000000
3/22/2011	1:34:33 PM	PHl3 MFC set to  0.000000
3/22/2011	1:34:33 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:34:33 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:34:33 PM	Tube furnace set to 0
3/22/2011	1:34:33 PM	Helium valve closed
3/22/2011	1:34:33 PM	H2 valve closed
3/22/2011	1:34:33 PM	BCl3 valve closed
3/22/2011	1:34:33 PM	PH3 valve closed
3/22/2011	1:34:33 PM	SiCl4 pre valve closed
3/22/2011	1:34:33 PM	SiCl4 post valve closed
3/22/2011	1:34:33 PM	Bubbler valve closed
3/22/2011	1:34:33 PM	Main Vac valve opened
3/22/2011	1:34:33 PM	Bypass valve opened
3/22/2011	1:34:33 PM	Helium MFC set to  0.000000
3/22/2011	1:34:33 PM	H2 MFC set to  0.000000
3/22/2011	1:34:33 PM	BCl3 MFC set to  0.000000
3/22/2011	1:34:33 PM	PHl3 MFC set to  0.000000
3/22/2011	1:34:33 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:34:33 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:34:34 PM	Tube furnace set to 0
3/22/2011	1:35:34 PM	H2 valve closed
3/22/2011	1:35:34 PM	BCl3 valve closed
3/22/2011	1:35:34 PM	PH3 valve closed
3/22/2011	1:35:34 PM	SiCl4 pre valve closed
3/22/2011	1:35:34 PM	SiCl4 post valve closed
3/22/2011	1:35:34 PM	Bubbler valve closed
3/22/2011	1:35:34 PM	Helium valve opened
3/22/2011	1:35:34 PM	Main Vac valve opened
3/22/2011	1:35:34 PM	Bypass valve opened
3/22/2011	1:35:34 PM	Helium MFC set to  100.000000
3/22/2011	1:35:34 PM	H2 MFC set to  0.000000
3/22/2011	1:35:34 PM	BCl3 MFC set to  0.000000
3/22/2011	1:35:34 PM	PHl3 MFC set to  0.000000
3/22/2011	1:35:34 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:35:34 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:35:34 PM	Tube furnace set to 0
3/22/2011	1:36:34 PM	Helium valve closed
3/22/2011	1:36:34 PM	H2 valve closed
3/22/2011	1:36:34 PM	BCl3 valve closed
3/22/2011	1:36:34 PM	PH3 valve closed
3/22/2011	1:36:34 PM	SiCl4 pre valve closed
3/22/2011	1:36:34 PM	SiCl4 post valve closed
3/22/2011	1:36:34 PM	Bubbler valve closed
3/22/2011	1:36:34 PM	Main Vac valve opened
3/22/2011	1:36:34 PM	Bypass valve opened
3/22/2011	1:36:34 PM	Helium MFC set to  0.000000
3/22/2011	1:36:34 PM	H2 MFC set to  0.000000
3/22/2011	1:36:34 PM	BCl3 MFC set to  0.000000
3/22/2011	1:36:34 PM	PHl3 MFC set to  0.000000
3/22/2011	1:36:34 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:36:34 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:36:34 PM	Tube furnace set to 0
3/22/2011	1:37:34 PM	H2 valve closed
3/22/2011	1:37:34 PM	BCl3 valve closed
3/22/2011	1:37:34 PM	PH3 valve closed
3/22/2011	1:37:34 PM	SiCl4 pre valve closed
3/22/2011	1:37:34 PM	SiCl4 post valve closed
3/22/2011	1:37:34 PM	Bubbler valve closed
3/22/2011	1:37:34 PM	Helium valve opened
3/22/2011	1:37:34 PM	Main Vac valve opened
3/22/2011	1:37:34 PM	Bypass valve opened
3/22/2011	1:37:34 PM	Helium MFC set to  100.000000
3/22/2011	1:37:34 PM	H2 MFC set to  0.000000
3/22/2011	1:37:34 PM	BCl3 MFC set to  0.000000
3/22/2011	1:37:34 PM	PHl3 MFC set to  0.000000
3/22/2011	1:37:34 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:37:34 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:37:34 PM	Tube furnace set to 0
3/22/2011	1:38:34 PM	Helium valve closed
3/22/2011	1:38:34 PM	H2 valve closed
3/22/2011	1:38:34 PM	BCl3 valve closed
3/22/2011	1:38:34 PM	PH3 valve closed
3/22/2011	1:38:34 PM	SiCl4 pre valve closed
3/22/2011	1:38:34 PM	SiCl4 post valve closed
3/22/2011	1:38:34 PM	Bubbler valve closed
3/22/2011	1:38:34 PM	Main Vac valve opened
3/22/2011	1:38:34 PM	Bypass valve opened
3/22/2011	1:38:34 PM	Helium MFC set to  0.000000
3/22/2011	1:38:34 PM	H2 MFC set to  0.000000
3/22/2011	1:38:34 PM	BCl3 MFC set to  0.000000
3/22/2011	1:38:34 PM	PHl3 MFC set to  0.000000
3/22/2011	1:38:34 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:38:34 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:38:34 PM	Tube furnace set to 0
3/22/2011	1:39:34 PM	H2 valve closed
3/22/2011	1:39:34 PM	BCl3 valve closed
3/22/2011	1:39:34 PM	PH3 valve closed
3/22/2011	1:39:34 PM	SiCl4 pre valve closed
3/22/2011	1:39:34 PM	SiCl4 post valve closed
3/22/2011	1:39:34 PM	Bubbler valve closed
3/22/2011	1:39:34 PM	Helium valve opened
3/22/2011	1:39:34 PM	Main Vac valve opened
3/22/2011	1:39:34 PM	Bypass valve opened
3/22/2011	1:39:34 PM	Helium MFC set to  100.000000
3/22/2011	1:39:34 PM	H2 MFC set to  0.000000
3/22/2011	1:39:34 PM	BCl3 MFC set to  0.000000
3/22/2011	1:39:34 PM	PHl3 MFC set to  0.000000
3/22/2011	1:39:34 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:39:34 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:39:35 PM	Tube furnace set to 0
3/22/2011	1:40:35 PM	Helium valve closed
3/22/2011	1:40:35 PM	H2 valve closed
3/22/2011	1:40:35 PM	BCl3 valve closed
3/22/2011	1:40:35 PM	PH3 valve closed
3/22/2011	1:40:35 PM	SiCl4 pre valve closed
3/22/2011	1:40:35 PM	SiCl4 post valve closed
3/22/2011	1:40:35 PM	Bubbler valve closed
3/22/2011	1:40:35 PM	Main Vac valve opened
3/22/2011	1:40:35 PM	Bypass valve opened
3/22/2011	1:40:35 PM	Helium MFC set to  0.000000
3/22/2011	1:40:35 PM	H2 MFC set to  0.000000
3/22/2011	1:40:35 PM	BCl3 MFC set to  0.000000
3/22/2011	1:40:35 PM	PHl3 MFC set to  0.000000
3/22/2011	1:40:35 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:40:35 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:40:35 PM	Tube furnace set to 0
3/22/2011	1:41:35 PM	H2 valve closed
3/22/2011	1:41:35 PM	BCl3 valve closed
3/22/2011	1:41:35 PM	PH3 valve closed
3/22/2011	1:41:35 PM	SiCl4 pre valve closed
3/22/2011	1:41:35 PM	SiCl4 post valve closed
3/22/2011	1:41:35 PM	Bubbler valve closed
3/22/2011	1:41:35 PM	Helium valve opened
3/22/2011	1:41:35 PM	Main Vac valve opened
3/22/2011	1:41:35 PM	Bypass valve opened
3/22/2011	1:41:35 PM	Helium MFC set to  100.000000
3/22/2011	1:41:35 PM	H2 MFC set to  0.000000
3/22/2011	1:41:35 PM	BCl3 MFC set to  0.000000
3/22/2011	1:41:35 PM	PHl3 MFC set to  0.000000
3/22/2011	1:41:35 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:41:35 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:41:35 PM	Tube furnace set to 0
3/22/2011	1:42:35 PM	Helium valve closed
3/22/2011	1:42:35 PM	H2 valve closed
3/22/2011	1:42:35 PM	BCl3 valve closed
3/22/2011	1:42:35 PM	PH3 valve closed
3/22/2011	1:42:35 PM	SiCl4 pre valve closed
3/22/2011	1:42:35 PM	SiCl4 post valve closed
3/22/2011	1:42:35 PM	Bubbler valve closed
3/22/2011	1:42:35 PM	Main Vac valve opened
3/22/2011	1:42:35 PM	Bypass valve opened
3/22/2011	1:42:35 PM	Helium MFC set to  0.000000
3/22/2011	1:42:35 PM	H2 MFC set to  0.000000
3/22/2011	1:42:35 PM	BCl3 MFC set to  0.000000
3/22/2011	1:42:35 PM	PHl3 MFC set to  0.000000
3/22/2011	1:42:35 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:42:35 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:42:35 PM	Tube furnace set to 0
3/22/2011	1:43:35 PM	H2 valve closed
3/22/2011	1:43:35 PM	BCl3 valve closed
3/22/2011	1:43:35 PM	PH3 valve closed
3/22/2011	1:43:35 PM	SiCl4 pre valve closed
3/22/2011	1:43:35 PM	SiCl4 post valve closed
3/22/2011	1:43:35 PM	Bubbler valve closed
3/22/2011	1:43:35 PM	Helium valve opened
3/22/2011	1:43:35 PM	Main Vac valve opened
3/22/2011	1:43:35 PM	Bypass valve opened
3/22/2011	1:43:35 PM	Helium MFC set to  100.000000
3/22/2011	1:43:35 PM	H2 MFC set to  0.000000
3/22/2011	1:43:35 PM	BCl3 MFC set to  0.000000
3/22/2011	1:43:35 PM	PHl3 MFC set to  0.000000
3/22/2011	1:43:35 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:43:35 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:43:35 PM	Tube furnace set to 0
3/22/2011	1:44:35 PM	Helium valve closed
3/22/2011	1:44:35 PM	H2 valve closed
3/22/2011	1:44:35 PM	BCl3 valve closed
3/22/2011	1:44:35 PM	PH3 valve closed
3/22/2011	1:44:35 PM	SiCl4 pre valve closed
3/22/2011	1:44:35 PM	SiCl4 post valve closed
3/22/2011	1:44:35 PM	Bubbler valve closed
3/22/2011	1:44:35 PM	Main Vac valve opened
3/22/2011	1:44:35 PM	Bypass valve opened
3/22/2011	1:44:35 PM	Helium MFC set to  0.000000
3/22/2011	1:44:35 PM	H2 MFC set to  0.000000
3/22/2011	1:44:35 PM	BCl3 MFC set to  0.000000
3/22/2011	1:44:35 PM	PHl3 MFC set to  0.000000
3/22/2011	1:44:35 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:44:35 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:44:36 PM	Tube furnace set to 0
3/22/2011	1:45:25 PM	Run aborted at 1:45 PM
3/22/2011	1:45:25 PM	Helium valve closed
3/22/2011	1:45:25 PM	H2 valve closed
3/22/2011	1:45:25 PM	BCl3 valve closed
3/22/2011	1:45:25 PM	PH3 valve closed
3/22/2011	1:45:25 PM	SiCl4 pre valve closed
3/22/2011	1:45:25 PM	SiCl4 post valve closed
3/22/2011	1:45:25 PM	Bypass valve closed
3/22/2011	1:45:25 PM	Main Vac valve closed
3/22/2011	1:45:25 PM	Bubbler valve closed
3/22/2011	1:45:25 PM	Helium MFC set to  0.000000
3/22/2011	1:45:25 PM	H2 MFC set to  0.000000
3/22/2011	1:45:25 PM	BCl3 MFC set to  0.000000
3/22/2011	1:45:25 PM	PHl3 MFC set to  0.000000
3/22/2011	1:45:25 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:45:25 PM	Tube furnace set to 0
3/22/2011	1:45:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	1:45:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	1:45:28 PM	Recipe started at 1:45 PM
3/22/2011	1:45:28 PM	Helium valve closed
3/22/2011	1:45:28 PM	H2 valve closed
3/22/2011	1:45:28 PM	BCl3 valve closed
3/22/2011	1:45:28 PM	PH3 valve closed
3/22/2011	1:45:28 PM	SiCl4 pre valve closed
3/22/2011	1:45:28 PM	SiCl4 post valve closed
3/22/2011	1:45:28 PM	Main Vac valve closed
3/22/2011	1:45:28 PM	Bubbler valve closed
3/22/2011	1:45:28 PM	Bypass valve opened
3/22/2011	1:45:28 PM	Helium MFC set to  0.000000
3/22/2011	1:45:28 PM	H2 MFC set to  0.000000
3/22/2011	1:45:28 PM	BCl3 MFC set to  0.000000
3/22/2011	1:45:28 PM	PHl3 MFC set to  0.000000
3/22/2011	1:45:28 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:45:28 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:45:29 PM	Tube furnace set to 0
3/22/2011	1:45:29 PM	Helium valve closed
3/22/2011	1:45:29 PM	H2 valve closed
3/22/2011	1:45:29 PM	BCl3 valve closed
3/22/2011	1:45:29 PM	PH3 valve closed
3/22/2011	1:45:29 PM	SiCl4 pre valve closed
3/22/2011	1:45:29 PM	SiCl4 post valve closed
3/22/2011	1:45:29 PM	Bubbler valve closed
3/22/2011	1:45:29 PM	Main Vac valve opened
3/22/2011	1:45:29 PM	Bypass valve opened
3/22/2011	1:45:29 PM	Helium MFC set to  0.000000
3/22/2011	1:45:29 PM	H2 MFC set to  0.000000
3/22/2011	1:45:29 PM	BCl3 MFC set to  0.000000
3/22/2011	1:45:29 PM	PHl3 MFC set to  0.000000
3/22/2011	1:45:29 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:45:29 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:45:29 PM	Tube furnace set to 0
3/22/2011	1:45:29 PM	Run finished at 1:45 PM
3/22/2011	1:45:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	1:46:00 PM	Recipe started at 1:45 PM
3/22/2011	1:46:00 PM	Helium valve closed
3/22/2011	1:46:00 PM	BCl3 valve closed
3/22/2011	1:46:00 PM	PH3 valve closed
3/22/2011	1:46:00 PM	SiCl4 pre valve closed
3/22/2011	1:46:00 PM	SiCl4 post valve closed
3/22/2011	1:46:00 PM	Main Vac valve closed
3/22/2011	1:46:00 PM	Bypass valve closed
3/22/2011	1:46:00 PM	Bubbler valve closed
3/22/2011	1:46:00 PM	H2 valve opened
3/22/2011	1:46:00 PM	Helium MFC set to  0.000000
3/22/2011	1:46:00 PM	H2 MFC set to  500.000000
3/22/2011	1:46:00 PM	BCl3 MFC set to  0.000000
3/22/2011	1:46:00 PM	PHl3 MFC set to  0.000000
3/22/2011	1:46:00 PM	SiCl4 MFC set to  0.000000
3/22/2011	1:46:00 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	1:46:00 PM	Tube furnace set to 0
3/22/2011	2:15:55 PM	Helium valve closed
3/22/2011	2:15:55 PM	BCl3 valve closed
3/22/2011	2:15:55 PM	PH3 valve closed
3/22/2011	2:15:55 PM	SiCl4 pre valve closed
3/22/2011	2:15:55 PM	SiCl4 post valve closed
3/22/2011	2:15:55 PM	Main Vac valve closed
3/22/2011	2:15:55 PM	Bypass valve closed
3/22/2011	2:15:55 PM	H2 valve opened
3/22/2011	2:15:55 PM	Bubbler valve opened
3/22/2011	2:15:55 PM	Helium MFC set to  0.000000
3/22/2011	2:15:55 PM	H2 MFC set to  500.000000
3/22/2011	2:15:55 PM	BCl3 MFC set to  0.000000
3/22/2011	2:15:55 PM	PHl3 MFC set to  0.000000
3/22/2011	2:15:55 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:15:55 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	2:15:55 PM	Tube furnace set to 1000
3/22/2011	2:15:56 PM	Helium valve closed
3/22/2011	2:15:56 PM	H2 valve closed
3/22/2011	2:15:56 PM	BCl3 valve closed
3/22/2011	2:15:56 PM	PH3 valve closed
3/22/2011	2:15:56 PM	SiCl4 pre valve closed
3/22/2011	2:15:56 PM	SiCl4 post valve closed
3/22/2011	2:15:56 PM	Main Vac valve closed
3/22/2011	2:15:56 PM	Bubbler valve closed
3/22/2011	2:15:56 PM	Bypass valve closed
3/22/2011	2:15:56 PM	Helium MFC set to  0.000000
3/22/2011	2:15:56 PM	H2 MFC set to  0.000000
3/22/2011	2:15:56 PM	BCl3 MFC set to  0.000000
3/22/2011	2:15:56 PM	PHl3 MFC set to  0.000000
3/22/2011	2:15:56 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:15:56 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:15:56 PM	Tube furnace set to 0
3/22/2011	2:15:56 PM	Baratron reads 906.692461 Torr.  Emergency exit.
3/22/2011	2:16:12 PM	Run aborted at 2:16 PM
3/22/2011	2:16:13 PM	Helium valve closed
3/22/2011	2:16:13 PM	H2 valve closed
3/22/2011	2:16:13 PM	BCl3 valve closed
3/22/2011	2:16:13 PM	PH3 valve closed
3/22/2011	2:16:13 PM	SiCl4 pre valve closed
3/22/2011	2:16:13 PM	SiCl4 post valve closed
3/22/2011	2:16:13 PM	Main Vac valve closed
3/22/2011	2:16:13 PM	Bubbler valve closed
3/22/2011	2:16:13 PM	Bypass valve closed
3/22/2011	2:16:13 PM	Helium MFC set to  0.000000
3/22/2011	2:16:13 PM	H2 MFC set to  0.000000
3/22/2011	2:16:13 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:13 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:13 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:13 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:13 PM	Tube furnace set to 0
3/22/2011	2:16:13 PM	Baratron reads 900.567492 Torr.  Emergency exit.
3/22/2011	2:16:15 PM	Program exited cleanly
3/22/2011	2:16:20 PM	Program started normally
3/22/2011	2:16:20 PM	Helium valve closed
3/22/2011	2:16:20 PM	H2 valve closed
3/22/2011	2:16:20 PM	BCl3 valve closed
3/22/2011	2:16:20 PM	PH3 valve closed
3/22/2011	2:16:20 PM	SiCl4 pre valve closed
3/22/2011	2:16:20 PM	SiCl4 post valve closed
3/22/2011	2:16:20 PM	Main Vac valve closed
3/22/2011	2:16:20 PM	Bypass valve closed
3/22/2011	2:16:20 PM	Bubbler valve closed
3/22/2011	2:16:20 PM	Helium MFC set to  0.000000
3/22/2011	2:16:20 PM	H2 MFC set to  0.000000
3/22/2011	2:16:20 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:20 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:20 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:20 PM	Tube furnace set to 0
3/22/2011	2:16:20 PM	Helium valve closed
3/22/2011	2:16:20 PM	H2 valve closed
3/22/2011	2:16:20 PM	BCl3 valve closed
3/22/2011	2:16:20 PM	PH3 valve closed
3/22/2011	2:16:20 PM	SiCl4 pre valve closed
3/22/2011	2:16:20 PM	SiCl4 post valve closed
3/22/2011	2:16:20 PM	Main Vac valve closed
3/22/2011	2:16:20 PM	Bubbler valve closed
3/22/2011	2:16:20 PM	Bypass valve closed
3/22/2011	2:16:20 PM	Helium MFC set to  0.000000
3/22/2011	2:16:20 PM	H2 MFC set to  0.000000
3/22/2011	2:16:20 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:20 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:20 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:21 PM	Tube furnace set to 0
3/22/2011	2:16:21 PM	Baratron reads 900.567492 Torr.  Emergency exit.
3/22/2011	2:16:22 PM	Program exited cleanly
3/22/2011	2:16:26 PM	Program started normally
3/22/2011	2:16:26 PM	Helium valve closed
3/22/2011	2:16:26 PM	H2 valve closed
3/22/2011	2:16:26 PM	BCl3 valve closed
3/22/2011	2:16:26 PM	PH3 valve closed
3/22/2011	2:16:26 PM	SiCl4 pre valve closed
3/22/2011	2:16:26 PM	SiCl4 post valve closed
3/22/2011	2:16:26 PM	Main Vac valve closed
3/22/2011	2:16:26 PM	Bypass valve closed
3/22/2011	2:16:26 PM	Bubbler valve closed
3/22/2011	2:16:26 PM	Helium MFC set to  0.000000
3/22/2011	2:16:26 PM	H2 MFC set to  0.000000
3/22/2011	2:16:26 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:26 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:26 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:26 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:27 PM	Tube furnace set to 0
3/22/2011	2:16:27 PM	Helium valve closed
3/22/2011	2:16:27 PM	H2 valve closed
3/22/2011	2:16:27 PM	BCl3 valve closed
3/22/2011	2:16:27 PM	PH3 valve closed
3/22/2011	2:16:27 PM	SiCl4 pre valve closed
3/22/2011	2:16:27 PM	SiCl4 post valve closed
3/22/2011	2:16:27 PM	Main Vac valve closed
3/22/2011	2:16:27 PM	Bubbler valve closed
3/22/2011	2:16:27 PM	Bypass valve closed
3/22/2011	2:16:27 PM	Helium MFC set to  0.000000
3/22/2011	2:16:27 PM	H2 MFC set to  0.000000
3/22/2011	2:16:27 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:27 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:27 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:27 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:27 PM	Tube furnace set to 0
3/22/2011	2:16:27 PM	Baratron reads 900.567492 Torr.  Emergency exit.
3/22/2011	2:16:32 PM	Program exited cleanly
3/22/2011	2:16:38 PM	Program started normally
3/22/2011	2:16:38 PM	Helium valve closed
3/22/2011	2:16:38 PM	H2 valve closed
3/22/2011	2:16:38 PM	BCl3 valve closed
3/22/2011	2:16:38 PM	PH3 valve closed
3/22/2011	2:16:38 PM	SiCl4 pre valve closed
3/22/2011	2:16:38 PM	SiCl4 post valve closed
3/22/2011	2:16:38 PM	Main Vac valve closed
3/22/2011	2:16:38 PM	Bypass valve closed
3/22/2011	2:16:38 PM	Bubbler valve closed
3/22/2011	2:16:38 PM	Helium MFC set to  0.000000
3/22/2011	2:16:38 PM	H2 MFC set to  0.000000
3/22/2011	2:16:38 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:38 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:38 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:38 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:38 PM	Tube furnace set to 0
3/22/2011	2:16:38 PM	Helium valve closed
3/22/2011	2:16:38 PM	H2 valve closed
3/22/2011	2:16:38 PM	BCl3 valve closed
3/22/2011	2:16:38 PM	PH3 valve closed
3/22/2011	2:16:38 PM	SiCl4 pre valve closed
3/22/2011	2:16:38 PM	SiCl4 post valve closed
3/22/2011	2:16:38 PM	Main Vac valve closed
3/22/2011	2:16:38 PM	Bubbler valve closed
3/22/2011	2:16:38 PM	Bypass valve closed
3/22/2011	2:16:38 PM	Helium MFC set to  0.000000
3/22/2011	2:16:38 PM	H2 MFC set to  0.000000
3/22/2011	2:16:38 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:38 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:38 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:38 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:39 PM	Tube furnace set to 0
3/22/2011	2:16:39 PM	Baratron reads 900.567492 Torr.  Emergency exit.
3/22/2011	2:16:40 PM	Program exited cleanly
3/22/2011	2:16:42 PM	Program started normally
3/22/2011	2:16:42 PM	Helium valve closed
3/22/2011	2:16:42 PM	H2 valve closed
3/22/2011	2:16:42 PM	BCl3 valve closed
3/22/2011	2:16:42 PM	PH3 valve closed
3/22/2011	2:16:42 PM	SiCl4 pre valve closed
3/22/2011	2:16:42 PM	SiCl4 post valve closed
3/22/2011	2:16:42 PM	Main Vac valve closed
3/22/2011	2:16:42 PM	Bypass valve closed
3/22/2011	2:16:42 PM	Bubbler valve closed
3/22/2011	2:16:42 PM	Helium MFC set to  0.000000
3/22/2011	2:16:42 PM	H2 MFC set to  0.000000
3/22/2011	2:16:42 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:42 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:42 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:42 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:42 PM	Tube furnace set to 0
3/22/2011	2:16:43 PM	Helium valve closed
3/22/2011	2:16:43 PM	H2 valve closed
3/22/2011	2:16:43 PM	BCl3 valve closed
3/22/2011	2:16:43 PM	PH3 valve closed
3/22/2011	2:16:43 PM	SiCl4 pre valve closed
3/22/2011	2:16:43 PM	SiCl4 post valve closed
3/22/2011	2:16:43 PM	Main Vac valve closed
3/22/2011	2:16:43 PM	Bubbler valve closed
3/22/2011	2:16:43 PM	Bypass valve closed
3/22/2011	2:16:43 PM	Helium MFC set to  0.000000
3/22/2011	2:16:43 PM	H2 MFC set to  0.000000
3/22/2011	2:16:43 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:43 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:43 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:43 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:43 PM	Tube furnace set to 0
3/22/2011	2:16:43 PM	Baratron reads 900.567492 Torr.  Emergency exit.
3/22/2011	2:16:44 PM	Program exited cleanly
3/22/2011	2:16:45 PM	Program started normally
3/22/2011	2:16:45 PM	Helium valve closed
3/22/2011	2:16:45 PM	H2 valve closed
3/22/2011	2:16:45 PM	BCl3 valve closed
3/22/2011	2:16:45 PM	PH3 valve closed
3/22/2011	2:16:45 PM	SiCl4 pre valve closed
3/22/2011	2:16:45 PM	SiCl4 post valve closed
3/22/2011	2:16:45 PM	Main Vac valve closed
3/22/2011	2:16:45 PM	Bypass valve closed
3/22/2011	2:16:45 PM	Bubbler valve closed
3/22/2011	2:16:45 PM	Helium MFC set to  0.000000
3/22/2011	2:16:45 PM	H2 MFC set to  0.000000
3/22/2011	2:16:45 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:45 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:45 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:45 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:45 PM	Tube furnace set to 0
3/22/2011	2:16:46 PM	Helium valve closed
3/22/2011	2:16:46 PM	H2 valve closed
3/22/2011	2:16:46 PM	BCl3 valve closed
3/22/2011	2:16:46 PM	PH3 valve closed
3/22/2011	2:16:46 PM	SiCl4 pre valve closed
3/22/2011	2:16:46 PM	SiCl4 post valve closed
3/22/2011	2:16:46 PM	Main Vac valve closed
3/22/2011	2:16:46 PM	Bubbler valve closed
3/22/2011	2:16:46 PM	Bypass valve closed
3/22/2011	2:16:46 PM	Helium MFC set to  0.000000
3/22/2011	2:16:46 PM	H2 MFC set to  0.000000
3/22/2011	2:16:46 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:46 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:46 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:46 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:46 PM	Tube furnace set to 0
3/22/2011	2:16:46 PM	Baratron reads 900.567492 Torr.  Emergency exit.
3/22/2011	2:16:47 PM	Program exited cleanly
3/22/2011	2:16:48 PM	Program started normally
3/22/2011	2:16:48 PM	Helium valve closed
3/22/2011	2:16:48 PM	H2 valve closed
3/22/2011	2:16:48 PM	BCl3 valve closed
3/22/2011	2:16:48 PM	PH3 valve closed
3/22/2011	2:16:48 PM	SiCl4 pre valve closed
3/22/2011	2:16:48 PM	SiCl4 post valve closed
3/22/2011	2:16:48 PM	Main Vac valve closed
3/22/2011	2:16:48 PM	Bypass valve closed
3/22/2011	2:16:48 PM	Bubbler valve closed
3/22/2011	2:16:48 PM	Helium MFC set to  0.000000
3/22/2011	2:16:48 PM	H2 MFC set to  0.000000
3/22/2011	2:16:48 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:48 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:48 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:48 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:49 PM	Tube furnace set to 0
3/22/2011	2:16:49 PM	Helium valve closed
3/22/2011	2:16:49 PM	H2 valve closed
3/22/2011	2:16:49 PM	BCl3 valve closed
3/22/2011	2:16:49 PM	PH3 valve closed
3/22/2011	2:16:49 PM	SiCl4 pre valve closed
3/22/2011	2:16:49 PM	SiCl4 post valve closed
3/22/2011	2:16:49 PM	Main Vac valve closed
3/22/2011	2:16:49 PM	Bubbler valve closed
3/22/2011	2:16:49 PM	Bypass valve closed
3/22/2011	2:16:49 PM	Helium MFC set to  0.000000
3/22/2011	2:16:49 PM	H2 MFC set to  0.000000
3/22/2011	2:16:49 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:49 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:49 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:49 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:49 PM	Tube furnace set to 0
3/22/2011	2:16:49 PM	Baratron reads 900.567492 Torr.  Emergency exit.
3/22/2011	2:16:50 PM	Program exited cleanly
3/22/2011	2:16:52 PM	Program started normally
3/22/2011	2:16:52 PM	Helium valve closed
3/22/2011	2:16:52 PM	H2 valve closed
3/22/2011	2:16:52 PM	BCl3 valve closed
3/22/2011	2:16:52 PM	PH3 valve closed
3/22/2011	2:16:52 PM	SiCl4 pre valve closed
3/22/2011	2:16:52 PM	SiCl4 post valve closed
3/22/2011	2:16:52 PM	Main Vac valve closed
3/22/2011	2:16:52 PM	Bypass valve closed
3/22/2011	2:16:52 PM	Bubbler valve closed
3/22/2011	2:16:52 PM	Helium MFC set to  0.000000
3/22/2011	2:16:52 PM	H2 MFC set to  0.000000
3/22/2011	2:16:52 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:52 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:52 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:52 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:52 PM	Tube furnace set to 0
3/22/2011	2:16:52 PM	Helium valve closed
3/22/2011	2:16:53 PM	H2 valve closed
3/22/2011	2:16:53 PM	BCl3 valve closed
3/22/2011	2:16:53 PM	PH3 valve closed
3/22/2011	2:16:53 PM	SiCl4 pre valve closed
3/22/2011	2:16:53 PM	SiCl4 post valve closed
3/22/2011	2:16:53 PM	Main Vac valve closed
3/22/2011	2:16:53 PM	Bubbler valve closed
3/22/2011	2:16:53 PM	Bypass valve closed
3/22/2011	2:16:53 PM	Helium MFC set to  0.000000
3/22/2011	2:16:53 PM	H2 MFC set to  0.000000
3/22/2011	2:16:53 PM	BCl3 MFC set to  0.000000
3/22/2011	2:16:53 PM	PHl3 MFC set to  0.000000
3/22/2011	2:16:53 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:16:53 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:16:53 PM	Tube furnace set to 0
3/22/2011	2:16:53 PM	Baratron reads 900.567492 Torr.  Emergency exit.
3/22/2011	2:16:54 PM	Program exited cleanly
3/22/2011	2:17:44 PM	Program started normally
3/22/2011	2:17:44 PM	Helium valve closed
3/22/2011	2:17:44 PM	H2 valve closed
3/22/2011	2:17:44 PM	BCl3 valve closed
3/22/2011	2:17:44 PM	PH3 valve closed
3/22/2011	2:17:44 PM	SiCl4 pre valve closed
3/22/2011	2:17:44 PM	SiCl4 post valve closed
3/22/2011	2:17:44 PM	Main Vac valve closed
3/22/2011	2:17:44 PM	Bypass valve closed
3/22/2011	2:17:44 PM	Bubbler valve closed
3/22/2011	2:17:44 PM	Helium MFC set to  0.000000
3/22/2011	2:17:44 PM	H2 MFC set to  0.000000
3/22/2011	2:17:44 PM	BCl3 MFC set to  0.000000
3/22/2011	2:17:44 PM	PHl3 MFC set to  0.000000
3/22/2011	2:17:44 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:17:44 PM	Bypass solenoid MFC set to  760.000000
3/22/2011	2:17:44 PM	Tube furnace set to 0
3/22/2011	2:17:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	2:17:47 PM	Recipe started at 2:17 PM
3/22/2011	2:17:47 PM	Helium valve closed
3/22/2011	2:17:47 PM	H2 valve closed
3/22/2011	2:17:47 PM	BCl3 valve closed
3/22/2011	2:17:47 PM	PH3 valve closed
3/22/2011	2:17:47 PM	SiCl4 pre valve closed
3/22/2011	2:17:47 PM	SiCl4 post valve closed
3/22/2011	2:17:47 PM	Main Vac valve closed
3/22/2011	2:17:47 PM	Bubbler valve closed
3/22/2011	2:17:47 PM	Bypass valve opened
3/22/2011	2:17:47 PM	Helium MFC set to  0.000000
3/22/2011	2:17:47 PM	H2 MFC set to  0.000000
3/22/2011	2:17:47 PM	BCl3 MFC set to  0.000000
3/22/2011	2:17:47 PM	PHl3 MFC set to  0.000000
3/22/2011	2:17:47 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:17:47 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	2:17:47 PM	Tube furnace set to 0
3/22/2011	2:18:01 PM	Helium valve closed
3/22/2011	2:18:01 PM	H2 valve closed
3/22/2011	2:18:01 PM	BCl3 valve closed
3/22/2011	2:18:01 PM	PH3 valve closed
3/22/2011	2:18:01 PM	SiCl4 pre valve closed
3/22/2011	2:18:01 PM	SiCl4 post valve closed
3/22/2011	2:18:01 PM	Bubbler valve closed
3/22/2011	2:18:01 PM	Main Vac valve opened
3/22/2011	2:18:01 PM	Bypass valve opened
3/22/2011	2:18:01 PM	Helium MFC set to  0.000000
3/22/2011	2:18:01 PM	H2 MFC set to  0.000000
3/22/2011	2:18:01 PM	BCl3 MFC set to  0.000000
3/22/2011	2:18:01 PM	PHl3 MFC set to  0.000000
3/22/2011	2:18:01 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:18:01 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	2:18:01 PM	Tube furnace set to 0
3/22/2011	2:18:02 PM	Run finished at 2:18 PM
3/22/2011	2:18:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	2:18:57 PM	Recipe started at 2:18 PM
3/22/2011	2:18:57 PM	Helium valve closed
3/22/2011	2:18:57 PM	BCl3 valve closed
3/22/2011	2:18:57 PM	PH3 valve closed
3/22/2011	2:18:57 PM	SiCl4 pre valve closed
3/22/2011	2:18:57 PM	SiCl4 post valve closed
3/22/2011	2:18:57 PM	Main Vac valve closed
3/22/2011	2:18:57 PM	Bypass valve closed
3/22/2011	2:18:57 PM	Bubbler valve closed
3/22/2011	2:18:57 PM	H2 valve opened
3/22/2011	2:18:57 PM	Helium MFC set to  0.000000
3/22/2011	2:18:57 PM	H2 MFC set to  500.000000
3/22/2011	2:18:57 PM	BCl3 MFC set to  0.000000
3/22/2011	2:18:57 PM	PHl3 MFC set to  0.000000
3/22/2011	2:18:57 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:18:57 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	2:18:57 PM	Tube furnace set to 0
3/22/2011	2:20:18 PM	Helium valve closed
3/22/2011	2:20:18 PM	BCl3 valve closed
3/22/2011	2:20:18 PM	PH3 valve closed
3/22/2011	2:20:18 PM	SiCl4 pre valve closed
3/22/2011	2:20:18 PM	SiCl4 post valve closed
3/22/2011	2:20:18 PM	Main Vac valve closed
3/22/2011	2:20:18 PM	Bypass valve closed
3/22/2011	2:20:18 PM	H2 valve opened
3/22/2011	2:20:18 PM	Bubbler valve opened
3/22/2011	2:20:18 PM	Helium MFC set to  0.000000
3/22/2011	2:20:18 PM	H2 MFC set to  500.000000
3/22/2011	2:20:18 PM	BCl3 MFC set to  0.000000
3/22/2011	2:20:18 PM	PHl3 MFC set to  0.000000
3/22/2011	2:20:18 PM	SiCl4 MFC set to  0.000000
3/22/2011	2:20:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	2:20:18 PM	Tube furnace set to 1000
3/22/2011	2:40:18 PM	Helium valve closed
3/22/2011	2:40:18 PM	PH3 valve closed
3/22/2011	2:40:18 PM	Main Vac valve closed
3/22/2011	2:40:18 PM	Bypass valve closed
3/22/2011	2:40:18 PM	H2 valve opened
3/22/2011	2:40:18 PM	BCl3 valve opened
3/22/2011	2:40:18 PM	SiCl4 pre valve opened
3/22/2011	2:40:18 PM	SiCl4 post valve opened
3/22/2011	2:40:18 PM	Bubbler valve opened
3/22/2011	2:40:18 PM	Helium MFC set to  0.000000
3/22/2011	2:40:18 PM	H2 MFC set to  500.000000
3/22/2011	2:40:18 PM	BCl3 MFC set to  12.000000
3/22/2011	2:40:18 PM	PHl3 MFC set to  0.000000
3/22/2011	2:40:18 PM	SiCl4 MFC set to  50.000000
3/22/2011	2:40:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	2:40:18 PM	Tube furnace set to 1000
3/22/2011	3:00:18 PM	H2 valve closed
3/22/2011	3:00:18 PM	BCl3 valve closed
3/22/2011	3:00:18 PM	PH3 valve closed
3/22/2011	3:00:18 PM	SiCl4 pre valve closed
3/22/2011	3:00:18 PM	SiCl4 post valve closed
3/22/2011	3:00:18 PM	Main Vac valve closed
3/22/2011	3:00:18 PM	Bypass valve closed
3/22/2011	3:00:18 PM	Helium valve opened
3/22/2011	3:00:18 PM	Bubbler valve opened
3/22/2011	3:00:18 PM	Helium MFC set to  500.000000
3/22/2011	3:00:19 PM	H2 MFC set to  0.000000
3/22/2011	3:00:19 PM	BCl3 MFC set to  0.000000
3/22/2011	3:00:19 PM	PHl3 MFC set to  0.000000
3/22/2011	3:00:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:00:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:00:19 PM	Tube furnace set to 0
3/22/2011	3:20:19 PM	Helium valve closed
3/22/2011	3:20:19 PM	H2 valve closed
3/22/2011	3:20:19 PM	BCl3 valve closed
3/22/2011	3:20:19 PM	PH3 valve closed
3/22/2011	3:20:19 PM	SiCl4 pre valve closed
3/22/2011	3:20:19 PM	SiCl4 post valve closed
3/22/2011	3:20:19 PM	Main Vac valve closed
3/22/2011	3:20:19 PM	Bypass valve closed
3/22/2011	3:20:19 PM	Bubbler valve closed
3/22/2011	3:20:19 PM	Helium MFC set to  0.000000
3/22/2011	3:20:19 PM	H2 MFC set to  0.000000
3/22/2011	3:20:19 PM	BCl3 MFC set to  0.000000
3/22/2011	3:20:19 PM	PHl3 MFC set to  0.000000
3/22/2011	3:20:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:20:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:20:19 PM	Tube furnace set to 0
3/22/2011	3:20:19 PM	Run finished at 3:20 PM
3/22/2011	3:39:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	3:39:59 PM	Recipe started at 3:39 PM
3/22/2011	3:39:59 PM	Helium valve closed
3/22/2011	3:39:59 PM	H2 valve closed
3/22/2011	3:39:59 PM	BCl3 valve closed
3/22/2011	3:39:59 PM	PH3 valve closed
3/22/2011	3:39:59 PM	SiCl4 pre valve closed
3/22/2011	3:39:59 PM	SiCl4 post valve closed
3/22/2011	3:39:59 PM	Main Vac valve closed
3/22/2011	3:39:59 PM	Bubbler valve closed
3/22/2011	3:39:59 PM	Bypass valve opened
3/22/2011	3:39:59 PM	Helium MFC set to  0.000000
3/22/2011	3:39:59 PM	H2 MFC set to  0.000000
3/22/2011	3:39:59 PM	BCl3 MFC set to  0.000000
3/22/2011	3:39:59 PM	PHl3 MFC set to  0.000000
3/22/2011	3:39:59 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:39:59 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:39:59 PM	Tube furnace set to 0
3/22/2011	3:40:30 PM	Helium valve closed
3/22/2011	3:40:30 PM	H2 valve closed
3/22/2011	3:40:30 PM	BCl3 valve closed
3/22/2011	3:40:30 PM	PH3 valve closed
3/22/2011	3:40:30 PM	SiCl4 pre valve closed
3/22/2011	3:40:30 PM	SiCl4 post valve closed
3/22/2011	3:40:30 PM	Bubbler valve closed
3/22/2011	3:40:30 PM	Main Vac valve opened
3/22/2011	3:40:30 PM	Bypass valve opened
3/22/2011	3:40:30 PM	Helium MFC set to  0.000000
3/22/2011	3:40:30 PM	H2 MFC set to  0.000000
3/22/2011	3:40:30 PM	BCl3 MFC set to  0.000000
3/22/2011	3:40:30 PM	PHl3 MFC set to  0.000000
3/22/2011	3:40:30 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:40:30 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:40:30 PM	Tube furnace set to 0
3/22/2011	3:40:30 PM	Run finished at 3:40 PM
3/22/2011	3:40:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	3:41:17 PM	Helium MFC set to  50.000000
3/22/2011	3:41:19 PM	Helium valve opened
3/22/2011	3:48:41 PM	Helium MFC set to  0.000000
3/22/2011	3:48:44 PM	Helium valve closed
3/22/2011	3:48:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	3:48:45 PM	Recipe started at 3:48 PM
3/22/2011	3:48:45 PM	Helium valve closed
3/22/2011	3:48:45 PM	H2 valve closed
3/22/2011	3:48:45 PM	BCl3 valve closed
3/22/2011	3:48:45 PM	PH3 valve closed
3/22/2011	3:48:45 PM	SiCl4 pre valve closed
3/22/2011	3:48:45 PM	SiCl4 post valve closed
3/22/2011	3:48:45 PM	Main Vac valve closed
3/22/2011	3:48:45 PM	Bubbler valve closed
3/22/2011	3:48:45 PM	Bypass valve opened
3/22/2011	3:48:45 PM	Helium MFC set to  0.000000
3/22/2011	3:48:45 PM	H2 MFC set to  0.000000
3/22/2011	3:48:45 PM	BCl3 MFC set to  0.000000
3/22/2011	3:48:45 PM	PHl3 MFC set to  0.000000
3/22/2011	3:48:45 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:48:45 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:48:45 PM	Tube furnace set to 0
3/22/2011	3:48:46 PM	Helium valve closed
3/22/2011	3:48:46 PM	H2 valve closed
3/22/2011	3:48:46 PM	BCl3 valve closed
3/22/2011	3:48:46 PM	PH3 valve closed
3/22/2011	3:48:46 PM	SiCl4 pre valve closed
3/22/2011	3:48:46 PM	SiCl4 post valve closed
3/22/2011	3:48:46 PM	Bubbler valve closed
3/22/2011	3:48:46 PM	Main Vac valve opened
3/22/2011	3:48:46 PM	Bypass valve opened
3/22/2011	3:48:46 PM	Helium MFC set to  0.000000
3/22/2011	3:48:46 PM	H2 MFC set to  0.000000
3/22/2011	3:48:46 PM	BCl3 MFC set to  0.000000
3/22/2011	3:48:46 PM	PHl3 MFC set to  0.000000
3/22/2011	3:48:46 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:48:46 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:48:46 PM	Tube furnace set to 0
3/22/2011	3:48:46 PM	Run finished at 3:48 PM
3/22/2011	3:48:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	3:49:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	3:49:18 PM	Recipe started at 3:49 PM
3/22/2011	3:49:18 PM	Helium valve closed
3/22/2011	3:49:18 PM	H2 valve closed
3/22/2011	3:49:18 PM	BCl3 valve closed
3/22/2011	3:49:18 PM	PH3 valve closed
3/22/2011	3:49:18 PM	SiCl4 pre valve closed
3/22/2011	3:49:18 PM	SiCl4 post valve closed
3/22/2011	3:49:18 PM	Main Vac valve closed
3/22/2011	3:49:18 PM	Bubbler valve closed
3/22/2011	3:49:18 PM	Bypass valve opened
3/22/2011	3:49:18 PM	Helium MFC set to  0.000000
3/22/2011	3:49:18 PM	H2 MFC set to  0.000000
3/22/2011	3:49:18 PM	BCl3 MFC set to  0.000000
3/22/2011	3:49:18 PM	PHl3 MFC set to  0.000000
3/22/2011	3:49:18 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:49:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:49:18 PM	Tube furnace set to 0
3/22/2011	3:49:18 PM	Helium valve closed
3/22/2011	3:49:19 PM	H2 valve closed
3/22/2011	3:49:19 PM	BCl3 valve closed
3/22/2011	3:49:19 PM	PH3 valve closed
3/22/2011	3:49:19 PM	SiCl4 pre valve closed
3/22/2011	3:49:19 PM	SiCl4 post valve closed
3/22/2011	3:49:19 PM	Bubbler valve closed
3/22/2011	3:49:19 PM	Main Vac valve opened
3/22/2011	3:49:19 PM	Bypass valve opened
3/22/2011	3:49:19 PM	Helium MFC set to  0.000000
3/22/2011	3:49:19 PM	H2 MFC set to  0.000000
3/22/2011	3:49:19 PM	BCl3 MFC set to  0.000000
3/22/2011	3:49:19 PM	PHl3 MFC set to  0.000000
3/22/2011	3:49:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:49:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:49:19 PM	Tube furnace set to 0
3/22/2011	3:50:19 PM	H2 valve closed
3/22/2011	3:50:19 PM	BCl3 valve closed
3/22/2011	3:50:19 PM	PH3 valve closed
3/22/2011	3:50:19 PM	SiCl4 pre valve closed
3/22/2011	3:50:19 PM	SiCl4 post valve closed
3/22/2011	3:50:19 PM	Bubbler valve closed
3/22/2011	3:50:19 PM	Helium valve opened
3/22/2011	3:50:19 PM	Main Vac valve opened
3/22/2011	3:50:19 PM	Bypass valve opened
3/22/2011	3:50:19 PM	Helium MFC set to  100.000000
3/22/2011	3:50:19 PM	H2 MFC set to  0.000000
3/22/2011	3:50:19 PM	BCl3 MFC set to  0.000000
3/22/2011	3:50:19 PM	PHl3 MFC set to  0.000000
3/22/2011	3:50:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:50:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:50:19 PM	Tube furnace set to 0
3/22/2011	3:51:19 PM	Helium valve closed
3/22/2011	3:51:19 PM	H2 valve closed
3/22/2011	3:51:19 PM	BCl3 valve closed
3/22/2011	3:51:19 PM	PH3 valve closed
3/22/2011	3:51:19 PM	SiCl4 pre valve closed
3/22/2011	3:51:19 PM	SiCl4 post valve closed
3/22/2011	3:51:19 PM	Bubbler valve closed
3/22/2011	3:51:19 PM	Main Vac valve opened
3/22/2011	3:51:19 PM	Bypass valve opened
3/22/2011	3:51:19 PM	Helium MFC set to  0.000000
3/22/2011	3:51:19 PM	H2 MFC set to  0.000000
3/22/2011	3:51:19 PM	BCl3 MFC set to  0.000000
3/22/2011	3:51:19 PM	PHl3 MFC set to  0.000000
3/22/2011	3:51:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:51:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:51:19 PM	Tube furnace set to 0
3/22/2011	3:52:19 PM	H2 valve closed
3/22/2011	3:52:19 PM	BCl3 valve closed
3/22/2011	3:52:19 PM	PH3 valve closed
3/22/2011	3:52:19 PM	SiCl4 pre valve closed
3/22/2011	3:52:19 PM	SiCl4 post valve closed
3/22/2011	3:52:19 PM	Bubbler valve closed
3/22/2011	3:52:19 PM	Helium valve opened
3/22/2011	3:52:19 PM	Main Vac valve opened
3/22/2011	3:52:19 PM	Bypass valve opened
3/22/2011	3:52:19 PM	Helium MFC set to  100.000000
3/22/2011	3:52:19 PM	H2 MFC set to  0.000000
3/22/2011	3:52:19 PM	BCl3 MFC set to  0.000000
3/22/2011	3:52:19 PM	PHl3 MFC set to  0.000000
3/22/2011	3:52:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:52:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:52:19 PM	Tube furnace set to 0
3/22/2011	3:53:19 PM	Helium valve closed
3/22/2011	3:53:19 PM	H2 valve closed
3/22/2011	3:53:19 PM	BCl3 valve closed
3/22/2011	3:53:19 PM	PH3 valve closed
3/22/2011	3:53:19 PM	SiCl4 pre valve closed
3/22/2011	3:53:19 PM	SiCl4 post valve closed
3/22/2011	3:53:19 PM	Bubbler valve closed
3/22/2011	3:53:19 PM	Main Vac valve opened
3/22/2011	3:53:19 PM	Bypass valve opened
3/22/2011	3:53:19 PM	Helium MFC set to  0.000000
3/22/2011	3:53:19 PM	H2 MFC set to  0.000000
3/22/2011	3:53:19 PM	BCl3 MFC set to  0.000000
3/22/2011	3:53:19 PM	PHl3 MFC set to  0.000000
3/22/2011	3:53:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:53:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:53:19 PM	Tube furnace set to 0
3/22/2011	3:54:19 PM	H2 valve closed
3/22/2011	3:54:19 PM	BCl3 valve closed
3/22/2011	3:54:19 PM	PH3 valve closed
3/22/2011	3:54:19 PM	SiCl4 pre valve closed
3/22/2011	3:54:19 PM	SiCl4 post valve closed
3/22/2011	3:54:19 PM	Bubbler valve closed
3/22/2011	3:54:19 PM	Helium valve opened
3/22/2011	3:54:19 PM	Main Vac valve opened
3/22/2011	3:54:19 PM	Bypass valve opened
3/22/2011	3:54:19 PM	Helium MFC set to  100.000000
3/22/2011	3:54:19 PM	H2 MFC set to  0.000000
3/22/2011	3:54:19 PM	BCl3 MFC set to  0.000000
3/22/2011	3:54:19 PM	PHl3 MFC set to  0.000000
3/22/2011	3:54:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:54:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:54:20 PM	Tube furnace set to 0
3/22/2011	3:55:20 PM	Helium valve closed
3/22/2011	3:55:20 PM	H2 valve closed
3/22/2011	3:55:20 PM	BCl3 valve closed
3/22/2011	3:55:20 PM	PH3 valve closed
3/22/2011	3:55:20 PM	SiCl4 pre valve closed
3/22/2011	3:55:20 PM	SiCl4 post valve closed
3/22/2011	3:55:20 PM	Bubbler valve closed
3/22/2011	3:55:20 PM	Main Vac valve opened
3/22/2011	3:55:20 PM	Bypass valve opened
3/22/2011	3:55:20 PM	Helium MFC set to  0.000000
3/22/2011	3:55:20 PM	H2 MFC set to  0.000000
3/22/2011	3:55:20 PM	BCl3 MFC set to  0.000000
3/22/2011	3:55:20 PM	PHl3 MFC set to  0.000000
3/22/2011	3:55:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:55:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:55:20 PM	Tube furnace set to 0
3/22/2011	3:56:20 PM	H2 valve closed
3/22/2011	3:56:20 PM	BCl3 valve closed
3/22/2011	3:56:20 PM	PH3 valve closed
3/22/2011	3:56:20 PM	SiCl4 pre valve closed
3/22/2011	3:56:20 PM	SiCl4 post valve closed
3/22/2011	3:56:20 PM	Bubbler valve closed
3/22/2011	3:56:20 PM	Helium valve opened
3/22/2011	3:56:20 PM	Main Vac valve opened
3/22/2011	3:56:20 PM	Bypass valve opened
3/22/2011	3:56:20 PM	Helium MFC set to  100.000000
3/22/2011	3:56:20 PM	H2 MFC set to  0.000000
3/22/2011	3:56:20 PM	BCl3 MFC set to  0.000000
3/22/2011	3:56:20 PM	PHl3 MFC set to  0.000000
3/22/2011	3:56:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:56:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:56:20 PM	Tube furnace set to 0
3/22/2011	3:57:20 PM	Helium valve closed
3/22/2011	3:57:20 PM	H2 valve closed
3/22/2011	3:57:20 PM	BCl3 valve closed
3/22/2011	3:57:20 PM	PH3 valve closed
3/22/2011	3:57:20 PM	SiCl4 pre valve closed
3/22/2011	3:57:20 PM	SiCl4 post valve closed
3/22/2011	3:57:20 PM	Bubbler valve closed
3/22/2011	3:57:20 PM	Main Vac valve opened
3/22/2011	3:57:20 PM	Bypass valve opened
3/22/2011	3:57:20 PM	Helium MFC set to  0.000000
3/22/2011	3:57:20 PM	H2 MFC set to  0.000000
3/22/2011	3:57:20 PM	BCl3 MFC set to  0.000000
3/22/2011	3:57:20 PM	PHl3 MFC set to  0.000000
3/22/2011	3:57:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:57:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:57:20 PM	Tube furnace set to 0
3/22/2011	3:58:20 PM	H2 valve closed
3/22/2011	3:58:20 PM	BCl3 valve closed
3/22/2011	3:58:20 PM	PH3 valve closed
3/22/2011	3:58:20 PM	SiCl4 pre valve closed
3/22/2011	3:58:20 PM	SiCl4 post valve closed
3/22/2011	3:58:20 PM	Bubbler valve closed
3/22/2011	3:58:20 PM	Helium valve opened
3/22/2011	3:58:20 PM	Main Vac valve opened
3/22/2011	3:58:20 PM	Bypass valve opened
3/22/2011	3:58:20 PM	Helium MFC set to  100.000000
3/22/2011	3:58:20 PM	H2 MFC set to  0.000000
3/22/2011	3:58:20 PM	BCl3 MFC set to  0.000000
3/22/2011	3:58:20 PM	PHl3 MFC set to  0.000000
3/22/2011	3:58:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:58:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:58:20 PM	Tube furnace set to 0
3/22/2011	3:59:20 PM	Helium valve closed
3/22/2011	3:59:20 PM	H2 valve closed
3/22/2011	3:59:20 PM	BCl3 valve closed
3/22/2011	3:59:20 PM	PH3 valve closed
3/22/2011	3:59:20 PM	SiCl4 pre valve closed
3/22/2011	3:59:20 PM	SiCl4 post valve closed
3/22/2011	3:59:20 PM	Bubbler valve closed
3/22/2011	3:59:20 PM	Main Vac valve opened
3/22/2011	3:59:20 PM	Bypass valve opened
3/22/2011	3:59:20 PM	Helium MFC set to  0.000000
3/22/2011	3:59:20 PM	H2 MFC set to  0.000000
3/22/2011	3:59:20 PM	BCl3 MFC set to  0.000000
3/22/2011	3:59:20 PM	PHl3 MFC set to  0.000000
3/22/2011	3:59:21 PM	SiCl4 MFC set to  0.000000
3/22/2011	3:59:21 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	3:59:21 PM	Tube furnace set to 0
3/22/2011	4:00:21 PM	H2 valve closed
3/22/2011	4:00:21 PM	BCl3 valve closed
3/22/2011	4:00:21 PM	PH3 valve closed
3/22/2011	4:00:21 PM	SiCl4 pre valve closed
3/22/2011	4:00:21 PM	SiCl4 post valve closed
3/22/2011	4:00:21 PM	Bubbler valve closed
3/22/2011	4:00:21 PM	Helium valve opened
3/22/2011	4:00:21 PM	Main Vac valve opened
3/22/2011	4:00:21 PM	Bypass valve opened
3/22/2011	4:00:21 PM	Helium MFC set to  100.000000
3/22/2011	4:00:21 PM	H2 MFC set to  0.000000
3/22/2011	4:00:21 PM	BCl3 MFC set to  0.000000
3/22/2011	4:00:21 PM	PHl3 MFC set to  0.000000
3/22/2011	4:00:21 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:00:21 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:00:21 PM	Tube furnace set to 0
3/22/2011	4:01:21 PM	Helium valve closed
3/22/2011	4:01:21 PM	H2 valve closed
3/22/2011	4:01:21 PM	BCl3 valve closed
3/22/2011	4:01:21 PM	PH3 valve closed
3/22/2011	4:01:21 PM	SiCl4 pre valve closed
3/22/2011	4:01:21 PM	SiCl4 post valve closed
3/22/2011	4:01:21 PM	Bubbler valve closed
3/22/2011	4:01:21 PM	Main Vac valve opened
3/22/2011	4:01:21 PM	Bypass valve opened
3/22/2011	4:01:21 PM	Helium MFC set to  0.000000
3/22/2011	4:01:21 PM	H2 MFC set to  0.000000
3/22/2011	4:01:21 PM	BCl3 MFC set to  0.000000
3/22/2011	4:01:21 PM	PHl3 MFC set to  0.000000
3/22/2011	4:01:21 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:01:21 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:01:21 PM	Tube furnace set to 0
3/22/2011	4:02:21 PM	H2 valve closed
3/22/2011	4:02:21 PM	BCl3 valve closed
3/22/2011	4:02:21 PM	PH3 valve closed
3/22/2011	4:02:21 PM	SiCl4 pre valve closed
3/22/2011	4:02:21 PM	SiCl4 post valve closed
3/22/2011	4:02:21 PM	Bubbler valve closed
3/22/2011	4:02:21 PM	Helium valve opened
3/22/2011	4:02:21 PM	Main Vac valve opened
3/22/2011	4:02:21 PM	Bypass valve opened
3/22/2011	4:02:21 PM	Helium MFC set to  100.000000
3/22/2011	4:02:21 PM	H2 MFC set to  0.000000
3/22/2011	4:02:21 PM	BCl3 MFC set to  0.000000
3/22/2011	4:02:21 PM	PHl3 MFC set to  0.000000
3/22/2011	4:02:21 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:02:21 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:02:21 PM	Tube furnace set to 0
3/22/2011	4:03:21 PM	Helium valve closed
3/22/2011	4:03:21 PM	H2 valve closed
3/22/2011	4:03:21 PM	BCl3 valve closed
3/22/2011	4:03:21 PM	PH3 valve closed
3/22/2011	4:03:21 PM	SiCl4 pre valve closed
3/22/2011	4:03:21 PM	SiCl4 post valve closed
3/22/2011	4:03:21 PM	Bubbler valve closed
3/22/2011	4:03:21 PM	Main Vac valve opened
3/22/2011	4:03:21 PM	Bypass valve opened
3/22/2011	4:03:21 PM	Helium MFC set to  0.000000
3/22/2011	4:03:21 PM	H2 MFC set to  0.000000
3/22/2011	4:03:21 PM	BCl3 MFC set to  0.000000
3/22/2011	4:03:21 PM	PHl3 MFC set to  0.000000
3/22/2011	4:03:21 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:03:21 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:03:21 PM	Tube furnace set to 0
3/22/2011	4:04:21 PM	H2 valve closed
3/22/2011	4:04:21 PM	BCl3 valve closed
3/22/2011	4:04:21 PM	PH3 valve closed
3/22/2011	4:04:21 PM	SiCl4 pre valve closed
3/22/2011	4:04:21 PM	SiCl4 post valve closed
3/22/2011	4:04:21 PM	Bubbler valve closed
3/22/2011	4:04:21 PM	Helium valve opened
3/22/2011	4:04:21 PM	Main Vac valve opened
3/22/2011	4:04:21 PM	Bypass valve opened
3/22/2011	4:04:21 PM	Helium MFC set to  100.000000
3/22/2011	4:04:21 PM	H2 MFC set to  0.000000
3/22/2011	4:04:21 PM	BCl3 MFC set to  0.000000
3/22/2011	4:04:21 PM	PHl3 MFC set to  0.000000
3/22/2011	4:04:21 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:04:21 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:04:22 PM	Tube furnace set to 0
3/22/2011	4:05:22 PM	Helium valve closed
3/22/2011	4:05:22 PM	H2 valve closed
3/22/2011	4:05:22 PM	BCl3 valve closed
3/22/2011	4:05:22 PM	PH3 valve closed
3/22/2011	4:05:22 PM	SiCl4 pre valve closed
3/22/2011	4:05:22 PM	SiCl4 post valve closed
3/22/2011	4:05:22 PM	Bubbler valve closed
3/22/2011	4:05:22 PM	Main Vac valve opened
3/22/2011	4:05:22 PM	Bypass valve opened
3/22/2011	4:05:22 PM	Helium MFC set to  0.000000
3/22/2011	4:05:22 PM	H2 MFC set to  0.000000
3/22/2011	4:05:22 PM	BCl3 MFC set to  0.000000
3/22/2011	4:05:22 PM	PHl3 MFC set to  0.000000
3/22/2011	4:05:22 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:05:22 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:05:22 PM	Tube furnace set to 0
3/22/2011	4:06:19 PM	Run aborted at 4:06 PM
3/22/2011	4:06:19 PM	Helium valve closed
3/22/2011	4:06:19 PM	H2 valve closed
3/22/2011	4:06:19 PM	BCl3 valve closed
3/22/2011	4:06:19 PM	PH3 valve closed
3/22/2011	4:06:19 PM	SiCl4 pre valve closed
3/22/2011	4:06:19 PM	SiCl4 post valve closed
3/22/2011	4:06:19 PM	Bypass valve closed
3/22/2011	4:06:19 PM	Main Vac valve closed
3/22/2011	4:06:19 PM	Bubbler valve closed
3/22/2011	4:06:19 PM	Helium MFC set to  0.000000
3/22/2011	4:06:19 PM	H2 MFC set to  0.000000
3/22/2011	4:06:19 PM	BCl3 MFC set to  0.000000
3/22/2011	4:06:19 PM	PHl3 MFC set to  0.000000
3/22/2011	4:06:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:06:19 PM	Tube furnace set to 0
3/22/2011	4:06:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	4:06:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	4:06:20 PM	Recipe started at 4:06 PM
3/22/2011	4:06:20 PM	Helium valve closed
3/22/2011	4:06:20 PM	H2 valve closed
3/22/2011	4:06:20 PM	BCl3 valve closed
3/22/2011	4:06:20 PM	PH3 valve closed
3/22/2011	4:06:20 PM	SiCl4 pre valve closed
3/22/2011	4:06:20 PM	SiCl4 post valve closed
3/22/2011	4:06:20 PM	Main Vac valve closed
3/22/2011	4:06:20 PM	Bubbler valve closed
3/22/2011	4:06:20 PM	Bypass valve opened
3/22/2011	4:06:20 PM	Helium MFC set to  0.000000
3/22/2011	4:06:20 PM	H2 MFC set to  0.000000
3/22/2011	4:06:20 PM	BCl3 MFC set to  0.000000
3/22/2011	4:06:20 PM	PHl3 MFC set to  0.000000
3/22/2011	4:06:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:06:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:06:20 PM	Tube furnace set to 0
3/22/2011	4:06:20 PM	Helium valve closed
3/22/2011	4:06:20 PM	H2 valve closed
3/22/2011	4:06:20 PM	BCl3 valve closed
3/22/2011	4:06:20 PM	PH3 valve closed
3/22/2011	4:06:20 PM	SiCl4 pre valve closed
3/22/2011	4:06:20 PM	SiCl4 post valve closed
3/22/2011	4:06:20 PM	Bubbler valve closed
3/22/2011	4:06:20 PM	Main Vac valve opened
3/22/2011	4:06:20 PM	Bypass valve opened
3/22/2011	4:06:20 PM	Helium MFC set to  0.000000
3/22/2011	4:06:20 PM	H2 MFC set to  0.000000
3/22/2011	4:06:20 PM	BCl3 MFC set to  0.000000
3/22/2011	4:06:20 PM	PHl3 MFC set to  0.000000
3/22/2011	4:06:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:06:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:06:21 PM	Tube furnace set to 0
3/22/2011	4:06:21 PM	Run finished at 4:06 PM
3/22/2011	4:06:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	4:06:44 PM	Bypass valve closed
3/22/2011	4:06:45 PM	Main Vac valve closed
3/22/2011	4:07:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	4:07:00 PM	Recipe started at 4:07 PM
3/22/2011	4:07:00 PM	Helium valve closed
3/22/2011	4:07:00 PM	H2 valve closed
3/22/2011	4:07:01 PM	BCl3 valve closed
3/22/2011	4:07:01 PM	PH3 valve closed
3/22/2011	4:07:01 PM	SiCl4 pre valve closed
3/22/2011	4:07:01 PM	SiCl4 post valve closed
3/22/2011	4:07:01 PM	Main Vac valve closed
3/22/2011	4:07:01 PM	Bubbler valve closed
3/22/2011	4:07:01 PM	Bypass valve opened
3/22/2011	4:07:01 PM	Helium MFC set to  0.000000
3/22/2011	4:07:01 PM	H2 MFC set to  0.000000
3/22/2011	4:07:01 PM	BCl3 MFC set to  0.000000
3/22/2011	4:07:01 PM	PHl3 MFC set to  0.000000
3/22/2011	4:07:01 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:07:01 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:07:01 PM	Tube furnace set to 0
3/22/2011	4:07:01 PM	Helium valve closed
3/22/2011	4:07:01 PM	H2 valve closed
3/22/2011	4:07:01 PM	BCl3 valve closed
3/22/2011	4:07:01 PM	PH3 valve closed
3/22/2011	4:07:01 PM	SiCl4 pre valve closed
3/22/2011	4:07:01 PM	SiCl4 post valve closed
3/22/2011	4:07:01 PM	Bubbler valve closed
3/22/2011	4:07:01 PM	Main Vac valve opened
3/22/2011	4:07:01 PM	Bypass valve opened
3/22/2011	4:07:01 PM	Helium MFC set to  0.000000
3/22/2011	4:07:01 PM	H2 MFC set to  0.000000
3/22/2011	4:07:01 PM	BCl3 MFC set to  0.000000
3/22/2011	4:07:01 PM	PHl3 MFC set to  0.000000
3/22/2011	4:07:01 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:07:01 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:07:01 PM	Tube furnace set to 0
3/22/2011	4:07:01 PM	Run finished at 4:07 PM
3/22/2011	4:07:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	4:07:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	4:07:17 PM	Recipe started at 4:07 PM
3/22/2011	4:07:17 PM	Helium valve closed
3/22/2011	4:07:17 PM	H2 valve closed
3/22/2011	4:07:17 PM	BCl3 valve closed
3/22/2011	4:07:17 PM	PH3 valve closed
3/22/2011	4:07:17 PM	SiCl4 pre valve closed
3/22/2011	4:07:17 PM	SiCl4 post valve closed
3/22/2011	4:07:17 PM	Main Vac valve closed
3/22/2011	4:07:17 PM	Bubbler valve closed
3/22/2011	4:07:17 PM	Bypass valve opened
3/22/2011	4:07:17 PM	Helium MFC set to  0.000000
3/22/2011	4:07:17 PM	H2 MFC set to  0.000000
3/22/2011	4:07:17 PM	BCl3 MFC set to  0.000000
3/22/2011	4:07:17 PM	PHl3 MFC set to  0.000000
3/22/2011	4:07:17 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:07:17 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:07:17 PM	Tube furnace set to 0
3/22/2011	4:07:17 PM	Helium valve closed
3/22/2011	4:07:17 PM	H2 valve closed
3/22/2011	4:07:17 PM	BCl3 valve closed
3/22/2011	4:07:17 PM	PH3 valve closed
3/22/2011	4:07:17 PM	SiCl4 pre valve closed
3/22/2011	4:07:18 PM	SiCl4 post valve closed
3/22/2011	4:07:18 PM	Bubbler valve closed
3/22/2011	4:07:18 PM	Main Vac valve opened
3/22/2011	4:07:18 PM	Bypass valve opened
3/22/2011	4:07:18 PM	Helium MFC set to  0.000000
3/22/2011	4:07:18 PM	H2 MFC set to  0.000000
3/22/2011	4:07:18 PM	BCl3 MFC set to  0.000000
3/22/2011	4:07:18 PM	PHl3 MFC set to  0.000000
3/22/2011	4:07:18 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:07:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:07:18 PM	Tube furnace set to 0
3/22/2011	4:08:18 PM	H2 valve closed
3/22/2011	4:08:18 PM	BCl3 valve closed
3/22/2011	4:08:18 PM	PH3 valve closed
3/22/2011	4:08:18 PM	SiCl4 pre valve closed
3/22/2011	4:08:18 PM	SiCl4 post valve closed
3/22/2011	4:08:18 PM	Bubbler valve closed
3/22/2011	4:08:18 PM	Helium valve opened
3/22/2011	4:08:18 PM	Main Vac valve opened
3/22/2011	4:08:18 PM	Bypass valve opened
3/22/2011	4:08:18 PM	Helium MFC set to  100.000000
3/22/2011	4:08:18 PM	H2 MFC set to  0.000000
3/22/2011	4:08:18 PM	BCl3 MFC set to  0.000000
3/22/2011	4:08:18 PM	PHl3 MFC set to  0.000000
3/22/2011	4:08:18 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:08:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:08:18 PM	Tube furnace set to 0
3/22/2011	4:09:18 PM	Helium valve closed
3/22/2011	4:09:18 PM	H2 valve closed
3/22/2011	4:09:18 PM	BCl3 valve closed
3/22/2011	4:09:18 PM	PH3 valve closed
3/22/2011	4:09:18 PM	SiCl4 pre valve closed
3/22/2011	4:09:18 PM	SiCl4 post valve closed
3/22/2011	4:09:18 PM	Bubbler valve closed
3/22/2011	4:09:18 PM	Main Vac valve opened
3/22/2011	4:09:18 PM	Bypass valve opened
3/22/2011	4:09:18 PM	Helium MFC set to  0.000000
3/22/2011	4:09:18 PM	H2 MFC set to  0.000000
3/22/2011	4:09:18 PM	BCl3 MFC set to  0.000000
3/22/2011	4:09:18 PM	PHl3 MFC set to  0.000000
3/22/2011	4:09:18 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:09:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:09:18 PM	Tube furnace set to 0
3/22/2011	4:10:18 PM	H2 valve closed
3/22/2011	4:10:18 PM	BCl3 valve closed
3/22/2011	4:10:18 PM	PH3 valve closed
3/22/2011	4:10:18 PM	SiCl4 pre valve closed
3/22/2011	4:10:18 PM	SiCl4 post valve closed
3/22/2011	4:10:18 PM	Bubbler valve closed
3/22/2011	4:10:18 PM	Helium valve opened
3/22/2011	4:10:18 PM	Main Vac valve opened
3/22/2011	4:10:18 PM	Bypass valve opened
3/22/2011	4:10:18 PM	Helium MFC set to  100.000000
3/22/2011	4:10:18 PM	H2 MFC set to  0.000000
3/22/2011	4:10:18 PM	BCl3 MFC set to  0.000000
3/22/2011	4:10:18 PM	PHl3 MFC set to  0.000000
3/22/2011	4:10:18 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:10:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:10:18 PM	Tube furnace set to 0
3/22/2011	4:11:18 PM	Helium valve closed
3/22/2011	4:11:18 PM	H2 valve closed
3/22/2011	4:11:18 PM	BCl3 valve closed
3/22/2011	4:11:18 PM	PH3 valve closed
3/22/2011	4:11:18 PM	SiCl4 pre valve closed
3/22/2011	4:11:18 PM	SiCl4 post valve closed
3/22/2011	4:11:18 PM	Bubbler valve closed
3/22/2011	4:11:18 PM	Main Vac valve opened
3/22/2011	4:11:18 PM	Bypass valve opened
3/22/2011	4:11:18 PM	Helium MFC set to  0.000000
3/22/2011	4:11:18 PM	H2 MFC set to  0.000000
3/22/2011	4:11:18 PM	BCl3 MFC set to  0.000000
3/22/2011	4:11:18 PM	PHl3 MFC set to  0.000000
3/22/2011	4:11:18 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:11:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:11:18 PM	Tube furnace set to 0
3/22/2011	4:12:18 PM	H2 valve closed
3/22/2011	4:12:18 PM	BCl3 valve closed
3/22/2011	4:12:18 PM	PH3 valve closed
3/22/2011	4:12:18 PM	SiCl4 pre valve closed
3/22/2011	4:12:18 PM	SiCl4 post valve closed
3/22/2011	4:12:18 PM	Bubbler valve closed
3/22/2011	4:12:18 PM	Helium valve opened
3/22/2011	4:12:18 PM	Main Vac valve opened
3/22/2011	4:12:18 PM	Bypass valve opened
3/22/2011	4:12:18 PM	Helium MFC set to  100.000000
3/22/2011	4:12:18 PM	H2 MFC set to  0.000000
3/22/2011	4:12:18 PM	BCl3 MFC set to  0.000000
3/22/2011	4:12:18 PM	PHl3 MFC set to  0.000000
3/22/2011	4:12:18 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:12:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:12:19 PM	Tube furnace set to 0
3/22/2011	4:13:19 PM	Helium valve closed
3/22/2011	4:13:19 PM	H2 valve closed
3/22/2011	4:13:19 PM	BCl3 valve closed
3/22/2011	4:13:19 PM	PH3 valve closed
3/22/2011	4:13:19 PM	SiCl4 pre valve closed
3/22/2011	4:13:19 PM	SiCl4 post valve closed
3/22/2011	4:13:19 PM	Bubbler valve closed
3/22/2011	4:13:19 PM	Main Vac valve opened
3/22/2011	4:13:19 PM	Bypass valve opened
3/22/2011	4:13:19 PM	Helium MFC set to  0.000000
3/22/2011	4:13:19 PM	H2 MFC set to  0.000000
3/22/2011	4:13:19 PM	BCl3 MFC set to  0.000000
3/22/2011	4:13:19 PM	PHl3 MFC set to  0.000000
3/22/2011	4:13:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:13:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:13:19 PM	Tube furnace set to 0
3/22/2011	4:14:19 PM	H2 valve closed
3/22/2011	4:14:19 PM	BCl3 valve closed
3/22/2011	4:14:19 PM	PH3 valve closed
3/22/2011	4:14:19 PM	SiCl4 pre valve closed
3/22/2011	4:14:19 PM	SiCl4 post valve closed
3/22/2011	4:14:19 PM	Bubbler valve closed
3/22/2011	4:14:19 PM	Helium valve opened
3/22/2011	4:14:19 PM	Main Vac valve opened
3/22/2011	4:14:19 PM	Bypass valve opened
3/22/2011	4:14:19 PM	Helium MFC set to  100.000000
3/22/2011	4:14:19 PM	H2 MFC set to  0.000000
3/22/2011	4:14:19 PM	BCl3 MFC set to  0.000000
3/22/2011	4:14:19 PM	PHl3 MFC set to  0.000000
3/22/2011	4:14:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:14:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:14:19 PM	Tube furnace set to 0
3/22/2011	4:15:19 PM	Helium valve closed
3/22/2011	4:15:19 PM	H2 valve closed
3/22/2011	4:15:19 PM	BCl3 valve closed
3/22/2011	4:15:19 PM	PH3 valve closed
3/22/2011	4:15:19 PM	SiCl4 pre valve closed
3/22/2011	4:15:19 PM	SiCl4 post valve closed
3/22/2011	4:15:19 PM	Bubbler valve closed
3/22/2011	4:15:19 PM	Main Vac valve opened
3/22/2011	4:15:19 PM	Bypass valve opened
3/22/2011	4:15:19 PM	Helium MFC set to  0.000000
3/22/2011	4:15:19 PM	H2 MFC set to  0.000000
3/22/2011	4:15:19 PM	BCl3 MFC set to  0.000000
3/22/2011	4:15:19 PM	PHl3 MFC set to  0.000000
3/22/2011	4:15:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:15:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:15:19 PM	Tube furnace set to 0
3/22/2011	4:16:19 PM	H2 valve closed
3/22/2011	4:16:19 PM	BCl3 valve closed
3/22/2011	4:16:19 PM	PH3 valve closed
3/22/2011	4:16:19 PM	SiCl4 pre valve closed
3/22/2011	4:16:19 PM	SiCl4 post valve closed
3/22/2011	4:16:19 PM	Bubbler valve closed
3/22/2011	4:16:19 PM	Helium valve opened
3/22/2011	4:16:19 PM	Main Vac valve opened
3/22/2011	4:16:19 PM	Bypass valve opened
3/22/2011	4:16:19 PM	Helium MFC set to  100.000000
3/22/2011	4:16:19 PM	H2 MFC set to  0.000000
3/22/2011	4:16:19 PM	BCl3 MFC set to  0.000000
3/22/2011	4:16:19 PM	PHl3 MFC set to  0.000000
3/22/2011	4:16:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:16:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:16:19 PM	Tube furnace set to 0
3/22/2011	4:17:19 PM	Helium valve closed
3/22/2011	4:17:19 PM	H2 valve closed
3/22/2011	4:17:19 PM	BCl3 valve closed
3/22/2011	4:17:19 PM	PH3 valve closed
3/22/2011	4:17:19 PM	SiCl4 pre valve closed
3/22/2011	4:17:19 PM	SiCl4 post valve closed
3/22/2011	4:17:19 PM	Bubbler valve closed
3/22/2011	4:17:19 PM	Main Vac valve opened
3/22/2011	4:17:19 PM	Bypass valve opened
3/22/2011	4:17:19 PM	Helium MFC set to  0.000000
3/22/2011	4:17:19 PM	H2 MFC set to  0.000000
3/22/2011	4:17:19 PM	BCl3 MFC set to  0.000000
3/22/2011	4:17:19 PM	PHl3 MFC set to  0.000000
3/22/2011	4:17:19 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:17:19 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:17:20 PM	Tube furnace set to 0
3/22/2011	4:18:20 PM	H2 valve closed
3/22/2011	4:18:20 PM	BCl3 valve closed
3/22/2011	4:18:20 PM	PH3 valve closed
3/22/2011	4:18:20 PM	SiCl4 pre valve closed
3/22/2011	4:18:20 PM	SiCl4 post valve closed
3/22/2011	4:18:20 PM	Bubbler valve closed
3/22/2011	4:18:20 PM	Helium valve opened
3/22/2011	4:18:20 PM	Main Vac valve opened
3/22/2011	4:18:20 PM	Bypass valve opened
3/22/2011	4:18:20 PM	Helium MFC set to  100.000000
3/22/2011	4:18:20 PM	H2 MFC set to  0.000000
3/22/2011	4:18:20 PM	BCl3 MFC set to  0.000000
3/22/2011	4:18:20 PM	PHl3 MFC set to  0.000000
3/22/2011	4:18:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:18:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:18:20 PM	Tube furnace set to 0
3/22/2011	4:19:20 PM	Helium valve closed
3/22/2011	4:19:20 PM	H2 valve closed
3/22/2011	4:19:20 PM	BCl3 valve closed
3/22/2011	4:19:20 PM	PH3 valve closed
3/22/2011	4:19:20 PM	SiCl4 pre valve closed
3/22/2011	4:19:20 PM	SiCl4 post valve closed
3/22/2011	4:19:20 PM	Bubbler valve closed
3/22/2011	4:19:20 PM	Main Vac valve opened
3/22/2011	4:19:20 PM	Bypass valve opened
3/22/2011	4:19:20 PM	Helium MFC set to  0.000000
3/22/2011	4:19:20 PM	H2 MFC set to  0.000000
3/22/2011	4:19:20 PM	BCl3 MFC set to  0.000000
3/22/2011	4:19:20 PM	PHl3 MFC set to  0.000000
3/22/2011	4:19:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:19:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:19:20 PM	Tube furnace set to 0
3/22/2011	4:20:20 PM	H2 valve closed
3/22/2011	4:20:20 PM	BCl3 valve closed
3/22/2011	4:20:20 PM	PH3 valve closed
3/22/2011	4:20:20 PM	SiCl4 pre valve closed
3/22/2011	4:20:20 PM	SiCl4 post valve closed
3/22/2011	4:20:20 PM	Bubbler valve closed
3/22/2011	4:20:20 PM	Helium valve opened
3/22/2011	4:20:20 PM	Main Vac valve opened
3/22/2011	4:20:20 PM	Bypass valve opened
3/22/2011	4:20:20 PM	Helium MFC set to  100.000000
3/22/2011	4:20:20 PM	H2 MFC set to  0.000000
3/22/2011	4:20:20 PM	BCl3 MFC set to  0.000000
3/22/2011	4:20:20 PM	PHl3 MFC set to  0.000000
3/22/2011	4:20:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:20:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:20:20 PM	Tube furnace set to 0
3/22/2011	4:21:20 PM	Helium valve closed
3/22/2011	4:21:20 PM	H2 valve closed
3/22/2011	4:21:20 PM	BCl3 valve closed
3/22/2011	4:21:20 PM	PH3 valve closed
3/22/2011	4:21:20 PM	SiCl4 pre valve closed
3/22/2011	4:21:20 PM	SiCl4 post valve closed
3/22/2011	4:21:20 PM	Bubbler valve closed
3/22/2011	4:21:20 PM	Main Vac valve opened
3/22/2011	4:21:20 PM	Bypass valve opened
3/22/2011	4:21:20 PM	Helium MFC set to  0.000000
3/22/2011	4:21:20 PM	H2 MFC set to  0.000000
3/22/2011	4:21:20 PM	BCl3 MFC set to  0.000000
3/22/2011	4:21:20 PM	PHl3 MFC set to  0.000000
3/22/2011	4:21:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:21:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:21:20 PM	Tube furnace set to 0
3/22/2011	4:22:20 PM	H2 valve closed
3/22/2011	4:22:20 PM	BCl3 valve closed
3/22/2011	4:22:20 PM	PH3 valve closed
3/22/2011	4:22:20 PM	SiCl4 pre valve closed
3/22/2011	4:22:20 PM	SiCl4 post valve closed
3/22/2011	4:22:20 PM	Bubbler valve closed
3/22/2011	4:22:20 PM	Helium valve opened
3/22/2011	4:22:20 PM	Main Vac valve opened
3/22/2011	4:22:20 PM	Bypass valve opened
3/22/2011	4:22:20 PM	Helium MFC set to  100.000000
3/22/2011	4:22:20 PM	H2 MFC set to  0.000000
3/22/2011	4:22:20 PM	BCl3 MFC set to  0.000000
3/22/2011	4:22:20 PM	PHl3 MFC set to  0.000000
3/22/2011	4:22:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:22:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:22:21 PM	Tube furnace set to 0
3/22/2011	4:23:21 PM	Helium valve closed
3/22/2011	4:23:21 PM	H2 valve closed
3/22/2011	4:23:21 PM	BCl3 valve closed
3/22/2011	4:23:21 PM	PH3 valve closed
3/22/2011	4:23:21 PM	SiCl4 pre valve closed
3/22/2011	4:23:21 PM	SiCl4 post valve closed
3/22/2011	4:23:21 PM	Bubbler valve closed
3/22/2011	4:23:21 PM	Main Vac valve opened
3/22/2011	4:23:21 PM	Bypass valve opened
3/22/2011	4:23:21 PM	Helium MFC set to  0.000000
3/22/2011	4:23:21 PM	H2 MFC set to  0.000000
3/22/2011	4:23:21 PM	BCl3 MFC set to  0.000000
3/22/2011	4:23:21 PM	PHl3 MFC set to  0.000000
3/22/2011	4:23:21 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:23:21 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:23:21 PM	Tube furnace set to 0
3/22/2011	4:24:21 PM	H2 valve closed
3/22/2011	4:24:21 PM	BCl3 valve closed
3/22/2011	4:24:21 PM	PH3 valve closed
3/22/2011	4:24:21 PM	SiCl4 pre valve closed
3/22/2011	4:24:21 PM	SiCl4 post valve closed
3/22/2011	4:24:21 PM	Bubbler valve closed
3/22/2011	4:24:21 PM	Helium valve opened
3/22/2011	4:24:21 PM	Main Vac valve opened
3/22/2011	4:24:21 PM	Bypass valve opened
3/22/2011	4:24:21 PM	Helium MFC set to  100.000000
3/22/2011	4:24:21 PM	H2 MFC set to  0.000000
3/22/2011	4:24:21 PM	BCl3 MFC set to  0.000000
3/22/2011	4:24:21 PM	PHl3 MFC set to  0.000000
3/22/2011	4:24:21 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:24:21 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:24:21 PM	Tube furnace set to 0
3/22/2011	4:25:06 PM	Run aborted at 4:25 PM
3/22/2011	4:25:06 PM	Helium valve closed
3/22/2011	4:25:06 PM	H2 valve closed
3/22/2011	4:25:06 PM	BCl3 valve closed
3/22/2011	4:25:06 PM	PH3 valve closed
3/22/2011	4:25:06 PM	SiCl4 pre valve closed
3/22/2011	4:25:06 PM	SiCl4 post valve closed
3/22/2011	4:25:06 PM	Bypass valve closed
3/22/2011	4:25:06 PM	Main Vac valve closed
3/22/2011	4:25:06 PM	Bubbler valve closed
3/22/2011	4:25:06 PM	Helium MFC set to  0.000000
3/22/2011	4:25:06 PM	H2 MFC set to  0.000000
3/22/2011	4:25:06 PM	BCl3 MFC set to  0.000000
3/22/2011	4:25:06 PM	PHl3 MFC set to  0.000000
3/22/2011	4:25:06 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:25:06 PM	Tube furnace set to 0
3/22/2011	4:25:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	4:25:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	4:25:08 PM	Recipe started at 4:25 PM
3/22/2011	4:25:08 PM	Helium valve closed
3/22/2011	4:25:08 PM	H2 valve closed
3/22/2011	4:25:08 PM	BCl3 valve closed
3/22/2011	4:25:08 PM	PH3 valve closed
3/22/2011	4:25:08 PM	SiCl4 pre valve closed
3/22/2011	4:25:08 PM	SiCl4 post valve closed
3/22/2011	4:25:08 PM	Main Vac valve closed
3/22/2011	4:25:08 PM	Bubbler valve closed
3/22/2011	4:25:08 PM	Bypass valve opened
3/22/2011	4:25:08 PM	Helium MFC set to  0.000000
3/22/2011	4:25:08 PM	H2 MFC set to  0.000000
3/22/2011	4:25:08 PM	BCl3 MFC set to  0.000000
3/22/2011	4:25:08 PM	PHl3 MFC set to  0.000000
3/22/2011	4:25:08 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:25:08 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:25:08 PM	Tube furnace set to 0
3/22/2011	4:25:08 PM	Helium valve closed
3/22/2011	4:25:08 PM	H2 valve closed
3/22/2011	4:25:08 PM	BCl3 valve closed
3/22/2011	4:25:08 PM	PH3 valve closed
3/22/2011	4:25:08 PM	SiCl4 pre valve closed
3/22/2011	4:25:08 PM	SiCl4 post valve closed
3/22/2011	4:25:08 PM	Bubbler valve closed
3/22/2011	4:25:08 PM	Main Vac valve opened
3/22/2011	4:25:08 PM	Bypass valve opened
3/22/2011	4:25:08 PM	Helium MFC set to  0.000000
3/22/2011	4:25:08 PM	H2 MFC set to  0.000000
3/22/2011	4:25:08 PM	BCl3 MFC set to  0.000000
3/22/2011	4:25:08 PM	PHl3 MFC set to  0.000000
3/22/2011	4:25:08 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:25:08 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:25:09 PM	Tube furnace set to 0
3/22/2011	4:25:09 PM	Run finished at 4:25 PM
3/22/2011	4:25:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	4:26:01 PM	Recipe started at 4:26 PM
3/22/2011	4:26:01 PM	Helium valve closed
3/22/2011	4:26:01 PM	BCl3 valve closed
3/22/2011	4:26:01 PM	PH3 valve closed
3/22/2011	4:26:01 PM	SiCl4 pre valve closed
3/22/2011	4:26:01 PM	SiCl4 post valve closed
3/22/2011	4:26:01 PM	Main Vac valve closed
3/22/2011	4:26:01 PM	Bypass valve closed
3/22/2011	4:26:01 PM	Bubbler valve closed
3/22/2011	4:26:01 PM	H2 valve opened
3/22/2011	4:26:01 PM	Helium MFC set to  0.000000
3/22/2011	4:26:01 PM	H2 MFC set to  500.000000
3/22/2011	4:26:01 PM	BCl3 MFC set to  0.000000
3/22/2011	4:26:01 PM	PHl3 MFC set to  0.000000
3/22/2011	4:26:01 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:26:01 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:26:01 PM	Tube furnace set to 0
3/22/2011	4:27:18 PM	Helium valve closed
3/22/2011	4:27:18 PM	BCl3 valve closed
3/22/2011	4:27:18 PM	PH3 valve closed
3/22/2011	4:27:18 PM	SiCl4 pre valve closed
3/22/2011	4:27:18 PM	SiCl4 post valve closed
3/22/2011	4:27:18 PM	Main Vac valve closed
3/22/2011	4:27:18 PM	Bypass valve closed
3/22/2011	4:27:18 PM	H2 valve opened
3/22/2011	4:27:18 PM	Bubbler valve opened
3/22/2011	4:27:18 PM	Helium MFC set to  0.000000
3/22/2011	4:27:18 PM	H2 MFC set to  500.000000
3/22/2011	4:27:18 PM	BCl3 MFC set to  0.000000
3/22/2011	4:27:18 PM	PHl3 MFC set to  0.000000
3/22/2011	4:27:18 PM	SiCl4 MFC set to  0.000000
3/22/2011	4:27:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:27:18 PM	Tube furnace set to 1000
3/22/2011	4:47:18 PM	Helium valve closed
3/22/2011	4:47:18 PM	PH3 valve closed
3/22/2011	4:47:18 PM	Main Vac valve closed
3/22/2011	4:47:18 PM	Bypass valve closed
3/22/2011	4:47:18 PM	H2 valve opened
3/22/2011	4:47:18 PM	BCl3 valve opened
3/22/2011	4:47:18 PM	SiCl4 pre valve opened
3/22/2011	4:47:18 PM	SiCl4 post valve opened
3/22/2011	4:47:18 PM	Bubbler valve opened
3/22/2011	4:47:18 PM	Helium MFC set to  0.000000
3/22/2011	4:47:18 PM	H2 MFC set to  500.000000
3/22/2011	4:47:18 PM	BCl3 MFC set to  12.000000
3/22/2011	4:47:18 PM	PHl3 MFC set to  0.000000
3/22/2011	4:47:18 PM	SiCl4 MFC set to  50.000000
3/22/2011	4:47:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	4:47:18 PM	Tube furnace set to 1000
3/22/2011	5:07:18 PM	H2 valve closed
3/22/2011	5:07:18 PM	BCl3 valve closed
3/22/2011	5:07:18 PM	PH3 valve closed
3/22/2011	5:07:18 PM	SiCl4 pre valve closed
3/22/2011	5:07:18 PM	SiCl4 post valve closed
3/22/2011	5:07:18 PM	Main Vac valve closed
3/22/2011	5:07:18 PM	Bypass valve closed
3/22/2011	5:07:18 PM	Helium valve opened
3/22/2011	5:07:18 PM	Bubbler valve opened
3/22/2011	5:07:18 PM	Helium MFC set to  500.000000
3/22/2011	5:07:18 PM	H2 MFC set to  0.000000
3/22/2011	5:07:18 PM	BCl3 MFC set to  0.000000
3/22/2011	5:07:18 PM	PHl3 MFC set to  0.000000
3/22/2011	5:07:18 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:07:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:07:18 PM	Tube furnace set to 0
3/22/2011	5:27:18 PM	Helium valve closed
3/22/2011	5:27:18 PM	H2 valve closed
3/22/2011	5:27:18 PM	BCl3 valve closed
3/22/2011	5:27:18 PM	PH3 valve closed
3/22/2011	5:27:18 PM	SiCl4 pre valve closed
3/22/2011	5:27:18 PM	SiCl4 post valve closed
3/22/2011	5:27:18 PM	Main Vac valve closed
3/22/2011	5:27:18 PM	Bypass valve closed
3/22/2011	5:27:18 PM	Bubbler valve closed
3/22/2011	5:27:18 PM	Helium MFC set to  0.000000
3/22/2011	5:27:18 PM	H2 MFC set to  0.000000
3/22/2011	5:27:18 PM	BCl3 MFC set to  0.000000
3/22/2011	5:27:18 PM	PHl3 MFC set to  0.000000
3/22/2011	5:27:18 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:27:18 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:27:19 PM	Tube furnace set to 0
3/22/2011	5:27:19 PM	Run finished at 5:27 PM
3/22/2011	5:36:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	5:36:34 PM	Recipe started at 5:36 PM
3/22/2011	5:36:34 PM	Helium valve closed
3/22/2011	5:36:34 PM	H2 valve closed
3/22/2011	5:36:34 PM	BCl3 valve closed
3/22/2011	5:36:34 PM	PH3 valve closed
3/22/2011	5:36:34 PM	SiCl4 pre valve closed
3/22/2011	5:36:34 PM	SiCl4 post valve closed
3/22/2011	5:36:34 PM	Main Vac valve closed
3/22/2011	5:36:34 PM	Bubbler valve closed
3/22/2011	5:36:34 PM	Bypass valve opened
3/22/2011	5:36:34 PM	Helium MFC set to  0.000000
3/22/2011	5:36:34 PM	H2 MFC set to  0.000000
3/22/2011	5:36:34 PM	BCl3 MFC set to  0.000000
3/22/2011	5:36:34 PM	PHl3 MFC set to  0.000000
3/22/2011	5:36:34 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:36:34 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:36:34 PM	Tube furnace set to 0
3/22/2011	5:37:06 PM	Helium valve closed
3/22/2011	5:37:06 PM	H2 valve closed
3/22/2011	5:37:06 PM	BCl3 valve closed
3/22/2011	5:37:06 PM	PH3 valve closed
3/22/2011	5:37:06 PM	SiCl4 pre valve closed
3/22/2011	5:37:06 PM	SiCl4 post valve closed
3/22/2011	5:37:06 PM	Bubbler valve closed
3/22/2011	5:37:06 PM	Main Vac valve opened
3/22/2011	5:37:06 PM	Bypass valve opened
3/22/2011	5:37:06 PM	Helium MFC set to  0.000000
3/22/2011	5:37:06 PM	H2 MFC set to  0.000000
3/22/2011	5:37:06 PM	BCl3 MFC set to  0.000000
3/22/2011	5:37:06 PM	PHl3 MFC set to  0.000000
3/22/2011	5:37:06 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:37:06 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:37:06 PM	Tube furnace set to 0
3/22/2011	5:37:06 PM	Run finished at 5:37 PM
3/22/2011	5:37:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	5:37:24 PM	Helium valve opened
3/22/2011	5:37:27 PM	Helium MFC set to  50.000000
3/22/2011	5:38:24 PM	Helium valve closed
3/22/2011	5:38:28 PM	Helium MFC set to  0.000000
3/22/2011	5:38:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	5:38:57 PM	Recipe started at 5:38 PM
3/22/2011	5:38:57 PM	Helium valve closed
3/22/2011	5:38:57 PM	H2 valve closed
3/22/2011	5:38:57 PM	BCl3 valve closed
3/22/2011	5:38:57 PM	PH3 valve closed
3/22/2011	5:38:57 PM	SiCl4 pre valve closed
3/22/2011	5:38:57 PM	SiCl4 post valve closed
3/22/2011	5:38:57 PM	Main Vac valve closed
3/22/2011	5:38:57 PM	Bubbler valve closed
3/22/2011	5:38:57 PM	Bypass valve opened
3/22/2011	5:38:57 PM	Helium MFC set to  0.000000
3/22/2011	5:38:57 PM	H2 MFC set to  0.000000
3/22/2011	5:38:57 PM	BCl3 MFC set to  0.000000
3/22/2011	5:38:57 PM	PHl3 MFC set to  0.000000
3/22/2011	5:38:57 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:38:57 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:38:57 PM	Tube furnace set to 0
3/22/2011	5:38:57 PM	Helium valve closed
3/22/2011	5:38:57 PM	H2 valve closed
3/22/2011	5:38:57 PM	BCl3 valve closed
3/22/2011	5:38:57 PM	PH3 valve closed
3/22/2011	5:38:57 PM	SiCl4 pre valve closed
3/22/2011	5:38:57 PM	SiCl4 post valve closed
3/22/2011	5:38:57 PM	Bubbler valve closed
3/22/2011	5:38:57 PM	Main Vac valve opened
3/22/2011	5:38:57 PM	Bypass valve opened
3/22/2011	5:38:57 PM	Helium MFC set to  0.000000
3/22/2011	5:38:57 PM	H2 MFC set to  0.000000
3/22/2011	5:38:57 PM	BCl3 MFC set to  0.000000
3/22/2011	5:38:57 PM	PHl3 MFC set to  0.000000
3/22/2011	5:38:57 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:38:57 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:38:57 PM	Tube furnace set to 0
3/22/2011	5:39:58 PM	H2 valve closed
3/22/2011	5:39:58 PM	BCl3 valve closed
3/22/2011	5:39:58 PM	PH3 valve closed
3/22/2011	5:39:58 PM	SiCl4 pre valve closed
3/22/2011	5:39:58 PM	SiCl4 post valve closed
3/22/2011	5:39:58 PM	Bubbler valve closed
3/22/2011	5:39:58 PM	Helium valve opened
3/22/2011	5:39:58 PM	Main Vac valve opened
3/22/2011	5:39:58 PM	Bypass valve opened
3/22/2011	5:39:58 PM	Helium MFC set to  100.000000
3/22/2011	5:39:58 PM	H2 MFC set to  0.000000
3/22/2011	5:39:58 PM	BCl3 MFC set to  0.000000
3/22/2011	5:39:58 PM	PHl3 MFC set to  0.000000
3/22/2011	5:39:58 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:39:58 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:39:58 PM	Tube furnace set to 0
3/22/2011	5:40:58 PM	Helium valve closed
3/22/2011	5:40:58 PM	H2 valve closed
3/22/2011	5:40:58 PM	BCl3 valve closed
3/22/2011	5:40:58 PM	PH3 valve closed
3/22/2011	5:40:58 PM	SiCl4 pre valve closed
3/22/2011	5:40:58 PM	SiCl4 post valve closed
3/22/2011	5:40:58 PM	Bubbler valve closed
3/22/2011	5:40:58 PM	Main Vac valve opened
3/22/2011	5:40:58 PM	Bypass valve opened
3/22/2011	5:40:58 PM	Helium MFC set to  0.000000
3/22/2011	5:40:58 PM	H2 MFC set to  0.000000
3/22/2011	5:40:58 PM	BCl3 MFC set to  0.000000
3/22/2011	5:40:58 PM	PHl3 MFC set to  0.000000
3/22/2011	5:40:58 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:40:58 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:40:58 PM	Tube furnace set to 0
3/22/2011	5:41:58 PM	H2 valve closed
3/22/2011	5:41:58 PM	BCl3 valve closed
3/22/2011	5:41:58 PM	PH3 valve closed
3/22/2011	5:41:58 PM	SiCl4 pre valve closed
3/22/2011	5:41:58 PM	SiCl4 post valve closed
3/22/2011	5:41:58 PM	Bubbler valve closed
3/22/2011	5:41:58 PM	Helium valve opened
3/22/2011	5:41:58 PM	Main Vac valve opened
3/22/2011	5:41:58 PM	Bypass valve opened
3/22/2011	5:41:58 PM	Helium MFC set to  100.000000
3/22/2011	5:41:58 PM	H2 MFC set to  0.000000
3/22/2011	5:41:58 PM	BCl3 MFC set to  0.000000
3/22/2011	5:41:58 PM	PHl3 MFC set to  0.000000
3/22/2011	5:41:58 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:41:58 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:41:58 PM	Tube furnace set to 0
3/22/2011	5:42:58 PM	Helium valve closed
3/22/2011	5:42:58 PM	H2 valve closed
3/22/2011	5:42:58 PM	BCl3 valve closed
3/22/2011	5:42:58 PM	PH3 valve closed
3/22/2011	5:42:58 PM	SiCl4 pre valve closed
3/22/2011	5:42:58 PM	SiCl4 post valve closed
3/22/2011	5:42:58 PM	Bubbler valve closed
3/22/2011	5:42:58 PM	Main Vac valve opened
3/22/2011	5:42:58 PM	Bypass valve opened
3/22/2011	5:42:58 PM	Helium MFC set to  0.000000
3/22/2011	5:42:58 PM	H2 MFC set to  0.000000
3/22/2011	5:42:58 PM	BCl3 MFC set to  0.000000
3/22/2011	5:42:58 PM	PHl3 MFC set to  0.000000
3/22/2011	5:42:58 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:42:58 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:42:58 PM	Tube furnace set to 0
3/22/2011	5:43:58 PM	H2 valve closed
3/22/2011	5:43:58 PM	BCl3 valve closed
3/22/2011	5:43:58 PM	PH3 valve closed
3/22/2011	5:43:58 PM	SiCl4 pre valve closed
3/22/2011	5:43:58 PM	SiCl4 post valve closed
3/22/2011	5:43:58 PM	Bubbler valve closed
3/22/2011	5:43:58 PM	Helium valve opened
3/22/2011	5:43:58 PM	Main Vac valve opened
3/22/2011	5:43:58 PM	Bypass valve opened
3/22/2011	5:43:58 PM	Helium MFC set to  100.000000
3/22/2011	5:43:58 PM	H2 MFC set to  0.000000
3/22/2011	5:43:58 PM	BCl3 MFC set to  0.000000
3/22/2011	5:43:58 PM	PHl3 MFC set to  0.000000
3/22/2011	5:43:58 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:43:58 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:43:58 PM	Tube furnace set to 0
3/22/2011	5:44:59 PM	Helium valve closed
3/22/2011	5:44:59 PM	H2 valve closed
3/22/2011	5:44:59 PM	BCl3 valve closed
3/22/2011	5:44:59 PM	PH3 valve closed
3/22/2011	5:44:59 PM	SiCl4 pre valve closed
3/22/2011	5:44:59 PM	SiCl4 post valve closed
3/22/2011	5:44:59 PM	Bubbler valve closed
3/22/2011	5:44:59 PM	Main Vac valve opened
3/22/2011	5:44:59 PM	Bypass valve opened
3/22/2011	5:44:59 PM	Helium MFC set to  0.000000
3/22/2011	5:44:59 PM	H2 MFC set to  0.000000
3/22/2011	5:44:59 PM	BCl3 MFC set to  0.000000
3/22/2011	5:44:59 PM	PHl3 MFC set to  0.000000
3/22/2011	5:44:59 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:44:59 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:44:59 PM	Tube furnace set to 0
3/22/2011	5:45:59 PM	H2 valve closed
3/22/2011	5:45:59 PM	BCl3 valve closed
3/22/2011	5:45:59 PM	PH3 valve closed
3/22/2011	5:45:59 PM	SiCl4 pre valve closed
3/22/2011	5:45:59 PM	SiCl4 post valve closed
3/22/2011	5:45:59 PM	Bubbler valve closed
3/22/2011	5:45:59 PM	Helium valve opened
3/22/2011	5:45:59 PM	Main Vac valve opened
3/22/2011	5:45:59 PM	Bypass valve opened
3/22/2011	5:45:59 PM	Helium MFC set to  100.000000
3/22/2011	5:45:59 PM	H2 MFC set to  0.000000
3/22/2011	5:45:59 PM	BCl3 MFC set to  0.000000
3/22/2011	5:45:59 PM	PHl3 MFC set to  0.000000
3/22/2011	5:45:59 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:45:59 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:45:59 PM	Tube furnace set to 0
3/22/2011	5:46:59 PM	Helium valve closed
3/22/2011	5:46:59 PM	H2 valve closed
3/22/2011	5:46:59 PM	BCl3 valve closed
3/22/2011	5:46:59 PM	PH3 valve closed
3/22/2011	5:46:59 PM	SiCl4 pre valve closed
3/22/2011	5:46:59 PM	SiCl4 post valve closed
3/22/2011	5:46:59 PM	Bubbler valve closed
3/22/2011	5:46:59 PM	Main Vac valve opened
3/22/2011	5:46:59 PM	Bypass valve opened
3/22/2011	5:46:59 PM	Helium MFC set to  0.000000
3/22/2011	5:46:59 PM	H2 MFC set to  0.000000
3/22/2011	5:46:59 PM	BCl3 MFC set to  0.000000
3/22/2011	5:46:59 PM	PHl3 MFC set to  0.000000
3/22/2011	5:46:59 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:46:59 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:46:59 PM	Tube furnace set to 0
3/22/2011	5:47:59 PM	H2 valve closed
3/22/2011	5:47:59 PM	BCl3 valve closed
3/22/2011	5:47:59 PM	PH3 valve closed
3/22/2011	5:47:59 PM	SiCl4 pre valve closed
3/22/2011	5:47:59 PM	SiCl4 post valve closed
3/22/2011	5:47:59 PM	Bubbler valve closed
3/22/2011	5:47:59 PM	Helium valve opened
3/22/2011	5:47:59 PM	Main Vac valve opened
3/22/2011	5:47:59 PM	Bypass valve opened
3/22/2011	5:47:59 PM	Helium MFC set to  100.000000
3/22/2011	5:47:59 PM	H2 MFC set to  0.000000
3/22/2011	5:47:59 PM	BCl3 MFC set to  0.000000
3/22/2011	5:47:59 PM	PHl3 MFC set to  0.000000
3/22/2011	5:47:59 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:47:59 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:47:59 PM	Tube furnace set to 0
3/22/2011	5:48:59 PM	Helium valve closed
3/22/2011	5:48:59 PM	H2 valve closed
3/22/2011	5:48:59 PM	BCl3 valve closed
3/22/2011	5:48:59 PM	PH3 valve closed
3/22/2011	5:48:59 PM	SiCl4 pre valve closed
3/22/2011	5:48:59 PM	SiCl4 post valve closed
3/22/2011	5:48:59 PM	Bubbler valve closed
3/22/2011	5:48:59 PM	Main Vac valve opened
3/22/2011	5:48:59 PM	Bypass valve opened
3/22/2011	5:48:59 PM	Helium MFC set to  0.000000
3/22/2011	5:48:59 PM	H2 MFC set to  0.000000
3/22/2011	5:48:59 PM	BCl3 MFC set to  0.000000
3/22/2011	5:48:59 PM	PHl3 MFC set to  0.000000
3/22/2011	5:48:59 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:48:59 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:48:59 PM	Tube furnace set to 0
3/22/2011	5:49:59 PM	H2 valve closed
3/22/2011	5:49:59 PM	BCl3 valve closed
3/22/2011	5:49:59 PM	PH3 valve closed
3/22/2011	5:49:59 PM	SiCl4 pre valve closed
3/22/2011	5:49:59 PM	SiCl4 post valve closed
3/22/2011	5:49:59 PM	Bubbler valve closed
3/22/2011	5:50:00 PM	Helium valve opened
3/22/2011	5:50:00 PM	Main Vac valve opened
3/22/2011	5:50:00 PM	Bypass valve opened
3/22/2011	5:50:00 PM	Helium MFC set to  100.000000
3/22/2011	5:50:00 PM	H2 MFC set to  0.000000
3/22/2011	5:50:00 PM	BCl3 MFC set to  0.000000
3/22/2011	5:50:00 PM	PHl3 MFC set to  0.000000
3/22/2011	5:50:00 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:50:00 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:50:00 PM	Tube furnace set to 0
3/22/2011	5:51:00 PM	Helium valve closed
3/22/2011	5:51:00 PM	H2 valve closed
3/22/2011	5:51:00 PM	BCl3 valve closed
3/22/2011	5:51:00 PM	PH3 valve closed
3/22/2011	5:51:00 PM	SiCl4 pre valve closed
3/22/2011	5:51:00 PM	SiCl4 post valve closed
3/22/2011	5:51:00 PM	Bubbler valve closed
3/22/2011	5:51:00 PM	Main Vac valve opened
3/22/2011	5:51:00 PM	Bypass valve opened
3/22/2011	5:51:00 PM	Helium MFC set to  0.000000
3/22/2011	5:51:00 PM	H2 MFC set to  0.000000
3/22/2011	5:51:00 PM	BCl3 MFC set to  0.000000
3/22/2011	5:51:00 PM	PHl3 MFC set to  0.000000
3/22/2011	5:51:00 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:51:00 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:51:00 PM	Tube furnace set to 0
3/22/2011	5:52:00 PM	H2 valve closed
3/22/2011	5:52:00 PM	BCl3 valve closed
3/22/2011	5:52:00 PM	PH3 valve closed
3/22/2011	5:52:00 PM	SiCl4 pre valve closed
3/22/2011	5:52:00 PM	SiCl4 post valve closed
3/22/2011	5:52:00 PM	Bubbler valve closed
3/22/2011	5:52:00 PM	Helium valve opened
3/22/2011	5:52:00 PM	Main Vac valve opened
3/22/2011	5:52:00 PM	Bypass valve opened
3/22/2011	5:52:00 PM	Helium MFC set to  100.000000
3/22/2011	5:52:00 PM	H2 MFC set to  0.000000
3/22/2011	5:52:00 PM	BCl3 MFC set to  0.000000
3/22/2011	5:52:00 PM	PHl3 MFC set to  0.000000
3/22/2011	5:52:00 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:52:00 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:52:00 PM	Tube furnace set to 0
3/22/2011	5:53:00 PM	Helium valve closed
3/22/2011	5:53:00 PM	H2 valve closed
3/22/2011	5:53:00 PM	BCl3 valve closed
3/22/2011	5:53:00 PM	PH3 valve closed
3/22/2011	5:53:00 PM	SiCl4 pre valve closed
3/22/2011	5:53:00 PM	SiCl4 post valve closed
3/22/2011	5:53:00 PM	Bubbler valve closed
3/22/2011	5:53:00 PM	Main Vac valve opened
3/22/2011	5:53:00 PM	Bypass valve opened
3/22/2011	5:53:00 PM	Helium MFC set to  0.000000
3/22/2011	5:53:00 PM	H2 MFC set to  0.000000
3/22/2011	5:53:00 PM	BCl3 MFC set to  0.000000
3/22/2011	5:53:00 PM	PHl3 MFC set to  0.000000
3/22/2011	5:53:00 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:53:00 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:53:00 PM	Tube furnace set to 0
3/22/2011	5:54:00 PM	H2 valve closed
3/22/2011	5:54:00 PM	BCl3 valve closed
3/22/2011	5:54:00 PM	PH3 valve closed
3/22/2011	5:54:00 PM	SiCl4 pre valve closed
3/22/2011	5:54:00 PM	SiCl4 post valve closed
3/22/2011	5:54:00 PM	Bubbler valve closed
3/22/2011	5:54:00 PM	Helium valve opened
3/22/2011	5:54:00 PM	Main Vac valve opened
3/22/2011	5:54:00 PM	Bypass valve opened
3/22/2011	5:54:00 PM	Helium MFC set to  100.000000
3/22/2011	5:54:00 PM	H2 MFC set to  0.000000
3/22/2011	5:54:00 PM	BCl3 MFC set to  0.000000
3/22/2011	5:54:00 PM	PHl3 MFC set to  0.000000
3/22/2011	5:54:00 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:54:00 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:54:00 PM	Tube furnace set to 0
3/22/2011	5:55:00 PM	Helium valve closed
3/22/2011	5:55:00 PM	H2 valve closed
3/22/2011	5:55:00 PM	BCl3 valve closed
3/22/2011	5:55:00 PM	PH3 valve closed
3/22/2011	5:55:00 PM	SiCl4 pre valve closed
3/22/2011	5:55:00 PM	SiCl4 post valve closed
3/22/2011	5:55:00 PM	Bubbler valve closed
3/22/2011	5:55:00 PM	Main Vac valve opened
3/22/2011	5:55:00 PM	Bypass valve opened
3/22/2011	5:55:00 PM	Helium MFC set to  0.000000
3/22/2011	5:55:00 PM	H2 MFC set to  0.000000
3/22/2011	5:55:00 PM	BCl3 MFC set to  0.000000
3/22/2011	5:55:00 PM	PHl3 MFC set to  0.000000
3/22/2011	5:55:00 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:55:00 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:55:01 PM	Tube furnace set to 0
3/22/2011	5:56:01 PM	H2 valve closed
3/22/2011	5:56:01 PM	BCl3 valve closed
3/22/2011	5:56:01 PM	PH3 valve closed
3/22/2011	5:56:01 PM	SiCl4 pre valve closed
3/22/2011	5:56:01 PM	SiCl4 post valve closed
3/22/2011	5:56:01 PM	Bubbler valve closed
3/22/2011	5:56:01 PM	Helium valve opened
3/22/2011	5:56:01 PM	Main Vac valve opened
3/22/2011	5:56:01 PM	Bypass valve opened
3/22/2011	5:56:01 PM	Helium MFC set to  100.000000
3/22/2011	5:56:01 PM	H2 MFC set to  0.000000
3/22/2011	5:56:01 PM	BCl3 MFC set to  0.000000
3/22/2011	5:56:01 PM	PHl3 MFC set to  0.000000
3/22/2011	5:56:01 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:56:01 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:56:01 PM	Tube furnace set to 0
3/22/2011	5:57:01 PM	Helium valve closed
3/22/2011	5:57:01 PM	H2 valve closed
3/22/2011	5:57:01 PM	BCl3 valve closed
3/22/2011	5:57:01 PM	PH3 valve closed
3/22/2011	5:57:01 PM	SiCl4 pre valve closed
3/22/2011	5:57:01 PM	SiCl4 post valve closed
3/22/2011	5:57:01 PM	Bubbler valve closed
3/22/2011	5:57:01 PM	Main Vac valve opened
3/22/2011	5:57:01 PM	Bypass valve opened
3/22/2011	5:57:01 PM	Helium MFC set to  0.000000
3/22/2011	5:57:01 PM	H2 MFC set to  0.000000
3/22/2011	5:57:01 PM	BCl3 MFC set to  0.000000
3/22/2011	5:57:01 PM	PHl3 MFC set to  0.000000
3/22/2011	5:57:01 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:57:01 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:57:01 PM	Tube furnace set to 0
3/22/2011	5:58:01 PM	H2 valve closed
3/22/2011	5:58:01 PM	BCl3 valve closed
3/22/2011	5:58:01 PM	PH3 valve closed
3/22/2011	5:58:01 PM	SiCl4 pre valve closed
3/22/2011	5:58:01 PM	SiCl4 post valve closed
3/22/2011	5:58:01 PM	Bubbler valve closed
3/22/2011	5:58:01 PM	Helium valve opened
3/22/2011	5:58:01 PM	Main Vac valve opened
3/22/2011	5:58:01 PM	Bypass valve opened
3/22/2011	5:58:01 PM	Helium MFC set to  100.000000
3/22/2011	5:58:01 PM	H2 MFC set to  0.000000
3/22/2011	5:58:01 PM	BCl3 MFC set to  0.000000
3/22/2011	5:58:01 PM	PHl3 MFC set to  0.000000
3/22/2011	5:58:01 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:58:01 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:58:01 PM	Tube furnace set to 0
3/22/2011	5:59:01 PM	Helium valve closed
3/22/2011	5:59:01 PM	H2 valve closed
3/22/2011	5:59:01 PM	BCl3 valve closed
3/22/2011	5:59:01 PM	PH3 valve closed
3/22/2011	5:59:01 PM	SiCl4 pre valve closed
3/22/2011	5:59:01 PM	SiCl4 post valve closed
3/22/2011	5:59:01 PM	Bubbler valve closed
3/22/2011	5:59:01 PM	Main Vac valve opened
3/22/2011	5:59:01 PM	Bypass valve opened
3/22/2011	5:59:01 PM	Helium MFC set to  0.000000
3/22/2011	5:59:01 PM	H2 MFC set to  0.000000
3/22/2011	5:59:01 PM	BCl3 MFC set to  0.000000
3/22/2011	5:59:01 PM	PHl3 MFC set to  0.000000
3/22/2011	5:59:01 PM	SiCl4 MFC set to  0.000000
3/22/2011	5:59:01 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	5:59:01 PM	Tube furnace set to 0
3/22/2011	5:59:02 PM	Run finished at 5:59 PM
3/22/2011	5:59:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	7:45:01 PM	Helium MFC set to  50.000000
3/22/2011	7:45:03 PM	Helium valve opened
3/22/2011	7:53:37 PM	Helium valve closed
3/22/2011	7:53:40 PM	Helium MFC set to  0.000000
3/22/2011	7:54:33 PM	Recipe started at 7:54 PM
3/22/2011	7:54:33 PM	Helium valve closed
3/22/2011	7:54:33 PM	BCl3 valve closed
3/22/2011	7:54:33 PM	PH3 valve closed
3/22/2011	7:54:33 PM	SiCl4 pre valve closed
3/22/2011	7:54:33 PM	SiCl4 post valve closed
3/22/2011	7:54:33 PM	Main Vac valve closed
3/22/2011	7:54:33 PM	Bypass valve closed
3/22/2011	7:54:33 PM	Bubbler valve closed
3/22/2011	7:54:33 PM	H2 valve opened
3/22/2011	7:54:33 PM	Helium MFC set to  0.000000
3/22/2011	7:54:33 PM	H2 MFC set to  500.000000
3/22/2011	7:54:33 PM	BCl3 MFC set to  0.000000
3/22/2011	7:54:33 PM	PHl3 MFC set to  0.000000
3/22/2011	7:54:33 PM	SiCl4 MFC set to  0.000000
3/22/2011	7:54:33 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	7:54:33 PM	Tube furnace set to 0
3/22/2011	7:55:53 PM	Helium valve closed
3/22/2011	7:55:53 PM	BCl3 valve closed
3/22/2011	7:55:53 PM	PH3 valve closed
3/22/2011	7:55:53 PM	SiCl4 pre valve closed
3/22/2011	7:55:53 PM	SiCl4 post valve closed
3/22/2011	7:55:53 PM	Main Vac valve closed
3/22/2011	7:55:53 PM	Bypass valve closed
3/22/2011	7:55:53 PM	H2 valve opened
3/22/2011	7:55:53 PM	Bubbler valve opened
3/22/2011	7:55:53 PM	Helium MFC set to  0.000000
3/22/2011	7:55:53 PM	H2 MFC set to  500.000000
3/22/2011	7:55:53 PM	BCl3 MFC set to  0.000000
3/22/2011	7:55:53 PM	PHl3 MFC set to  0.000000
3/22/2011	7:55:53 PM	SiCl4 MFC set to  0.000000
3/22/2011	7:55:53 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	7:55:53 PM	Tube furnace set to 1000
3/22/2011	8:15:53 PM	Helium valve closed
3/22/2011	8:15:53 PM	PH3 valve closed
3/22/2011	8:15:53 PM	Main Vac valve closed
3/22/2011	8:15:53 PM	Bypass valve closed
3/22/2011	8:15:53 PM	H2 valve opened
3/22/2011	8:15:53 PM	BCl3 valve opened
3/22/2011	8:15:53 PM	SiCl4 pre valve opened
3/22/2011	8:15:53 PM	SiCl4 post valve opened
3/22/2011	8:15:53 PM	Bubbler valve opened
3/22/2011	8:15:53 PM	Helium MFC set to  0.000000
3/22/2011	8:15:53 PM	H2 MFC set to  500.000000
3/22/2011	8:15:53 PM	BCl3 MFC set to  12.000000
3/22/2011	8:15:53 PM	PHl3 MFC set to  0.000000
3/22/2011	8:15:53 PM	SiCl4 MFC set to  50.000000
3/22/2011	8:15:53 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	8:15:53 PM	Tube furnace set to 1000
3/22/2011	8:35:53 PM	H2 valve closed
3/22/2011	8:35:53 PM	BCl3 valve closed
3/22/2011	8:35:53 PM	PH3 valve closed
3/22/2011	8:35:53 PM	SiCl4 pre valve closed
3/22/2011	8:35:53 PM	SiCl4 post valve closed
3/22/2011	8:35:53 PM	Main Vac valve closed
3/22/2011	8:35:53 PM	Bypass valve closed
3/22/2011	8:35:53 PM	Helium valve opened
3/22/2011	8:35:53 PM	Bubbler valve opened
3/22/2011	8:35:53 PM	Helium MFC set to  500.000000
3/22/2011	8:35:53 PM	H2 MFC set to  0.000000
3/22/2011	8:35:53 PM	BCl3 MFC set to  0.000000
3/22/2011	8:35:53 PM	PHl3 MFC set to  0.000000
3/22/2011	8:35:53 PM	SiCl4 MFC set to  0.000000
3/22/2011	8:35:53 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	8:35:53 PM	Tube furnace set to 0
3/22/2011	8:55:53 PM	Helium valve closed
3/22/2011	8:55:53 PM	H2 valve closed
3/22/2011	8:55:53 PM	BCl3 valve closed
3/22/2011	8:55:53 PM	PH3 valve closed
3/22/2011	8:55:53 PM	SiCl4 pre valve closed
3/22/2011	8:55:53 PM	SiCl4 post valve closed
3/22/2011	8:55:53 PM	Main Vac valve closed
3/22/2011	8:55:53 PM	Bypass valve closed
3/22/2011	8:55:53 PM	Bubbler valve closed
3/22/2011	8:55:53 PM	Helium MFC set to  0.000000
3/22/2011	8:55:53 PM	H2 MFC set to  0.000000
3/22/2011	8:55:53 PM	BCl3 MFC set to  0.000000
3/22/2011	8:55:53 PM	PHl3 MFC set to  0.000000
3/22/2011	8:55:53 PM	SiCl4 MFC set to  0.000000
3/22/2011	8:55:53 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	8:55:53 PM	Tube furnace set to 0
3/22/2011	8:55:54 PM	Run finished at 8:55 PM
3/22/2011	10:09:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	10:09:20 PM	Recipe started at 10:09 PM
3/22/2011	10:09:20 PM	Helium valve closed
3/22/2011	10:09:20 PM	H2 valve closed
3/22/2011	10:09:20 PM	BCl3 valve closed
3/22/2011	10:09:20 PM	PH3 valve closed
3/22/2011	10:09:20 PM	SiCl4 pre valve closed
3/22/2011	10:09:20 PM	SiCl4 post valve closed
3/22/2011	10:09:20 PM	Main Vac valve closed
3/22/2011	10:09:20 PM	Bubbler valve closed
3/22/2011	10:09:20 PM	Bypass valve opened
3/22/2011	10:09:20 PM	Helium MFC set to  0.000000
3/22/2011	10:09:20 PM	H2 MFC set to  0.000000
3/22/2011	10:09:20 PM	BCl3 MFC set to  0.000000
3/22/2011	10:09:20 PM	PHl3 MFC set to  0.000000
3/22/2011	10:09:20 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:09:20 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:09:20 PM	Tube furnace set to 0
3/22/2011	10:09:53 PM	Helium valve closed
3/22/2011	10:09:53 PM	H2 valve closed
3/22/2011	10:09:53 PM	BCl3 valve closed
3/22/2011	10:09:53 PM	PH3 valve closed
3/22/2011	10:09:53 PM	SiCl4 pre valve closed
3/22/2011	10:09:53 PM	SiCl4 post valve closed
3/22/2011	10:09:53 PM	Bubbler valve closed
3/22/2011	10:09:53 PM	Main Vac valve opened
3/22/2011	10:09:53 PM	Bypass valve opened
3/22/2011	10:09:53 PM	Helium MFC set to  0.000000
3/22/2011	10:09:53 PM	H2 MFC set to  0.000000
3/22/2011	10:09:53 PM	BCl3 MFC set to  0.000000
3/22/2011	10:09:53 PM	PHl3 MFC set to  0.000000
3/22/2011	10:09:53 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:09:53 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:09:53 PM	Tube furnace set to 0
3/22/2011	10:09:53 PM	Run finished at 10:09 PM
3/22/2011	10:09:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	10:09:56 PM	Helium valve opened
3/22/2011	10:10:00 PM	Helium MFC set to  50.000000
3/22/2011	10:20:58 PM	Helium valve closed
3/22/2011	10:21:01 PM	Helium MFC set to  0.000000
3/22/2011	10:21:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	10:22:04 PM	Recipe started at 10:21 PM
3/22/2011	10:22:04 PM	Helium valve closed
3/22/2011	10:22:04 PM	H2 valve closed
3/22/2011	10:22:04 PM	BCl3 valve closed
3/22/2011	10:22:04 PM	PH3 valve closed
3/22/2011	10:22:04 PM	SiCl4 pre valve closed
3/22/2011	10:22:04 PM	SiCl4 post valve closed
3/22/2011	10:22:04 PM	Main Vac valve closed
3/22/2011	10:22:04 PM	Bubbler valve closed
3/22/2011	10:22:04 PM	Bypass valve opened
3/22/2011	10:22:04 PM	Helium MFC set to  0.000000
3/22/2011	10:22:04 PM	H2 MFC set to  0.000000
3/22/2011	10:22:04 PM	BCl3 MFC set to  0.000000
3/22/2011	10:22:04 PM	PHl3 MFC set to  0.000000
3/22/2011	10:22:04 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:22:04 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:22:04 PM	Tube furnace set to 0
3/22/2011	10:22:04 PM	Helium valve closed
3/22/2011	10:22:04 PM	H2 valve closed
3/22/2011	10:22:04 PM	BCl3 valve closed
3/22/2011	10:22:04 PM	PH3 valve closed
3/22/2011	10:22:04 PM	SiCl4 pre valve closed
3/22/2011	10:22:04 PM	SiCl4 post valve closed
3/22/2011	10:22:04 PM	Bubbler valve closed
3/22/2011	10:22:04 PM	Main Vac valve opened
3/22/2011	10:22:04 PM	Bypass valve opened
3/22/2011	10:22:04 PM	Helium MFC set to  0.000000
3/22/2011	10:22:04 PM	H2 MFC set to  0.000000
3/22/2011	10:22:04 PM	BCl3 MFC set to  0.000000
3/22/2011	10:22:04 PM	PHl3 MFC set to  0.000000
3/22/2011	10:22:04 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:22:04 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:22:04 PM	Tube furnace set to 0
3/22/2011	10:23:04 PM	H2 valve closed
3/22/2011	10:23:04 PM	BCl3 valve closed
3/22/2011	10:23:04 PM	PH3 valve closed
3/22/2011	10:23:04 PM	SiCl4 pre valve closed
3/22/2011	10:23:04 PM	SiCl4 post valve closed
3/22/2011	10:23:04 PM	Bubbler valve closed
3/22/2011	10:23:04 PM	Helium valve opened
3/22/2011	10:23:04 PM	Main Vac valve opened
3/22/2011	10:23:04 PM	Bypass valve opened
3/22/2011	10:23:04 PM	Helium MFC set to  100.000000
3/22/2011	10:23:04 PM	H2 MFC set to  0.000000
3/22/2011	10:23:04 PM	BCl3 MFC set to  0.000000
3/22/2011	10:23:04 PM	PHl3 MFC set to  0.000000
3/22/2011	10:23:04 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:23:04 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:23:04 PM	Tube furnace set to 0
3/22/2011	10:24:04 PM	Helium valve closed
3/22/2011	10:24:04 PM	H2 valve closed
3/22/2011	10:24:04 PM	BCl3 valve closed
3/22/2011	10:24:04 PM	PH3 valve closed
3/22/2011	10:24:04 PM	SiCl4 pre valve closed
3/22/2011	10:24:04 PM	SiCl4 post valve closed
3/22/2011	10:24:04 PM	Bubbler valve closed
3/22/2011	10:24:04 PM	Main Vac valve opened
3/22/2011	10:24:04 PM	Bypass valve opened
3/22/2011	10:24:04 PM	Helium MFC set to  0.000000
3/22/2011	10:24:04 PM	H2 MFC set to  0.000000
3/22/2011	10:24:04 PM	BCl3 MFC set to  0.000000
3/22/2011	10:24:04 PM	PHl3 MFC set to  0.000000
3/22/2011	10:24:04 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:24:04 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:24:05 PM	Tube furnace set to 0
3/22/2011	10:25:05 PM	H2 valve closed
3/22/2011	10:25:05 PM	BCl3 valve closed
3/22/2011	10:25:05 PM	PH3 valve closed
3/22/2011	10:25:05 PM	SiCl4 pre valve closed
3/22/2011	10:25:05 PM	SiCl4 post valve closed
3/22/2011	10:25:05 PM	Bubbler valve closed
3/22/2011	10:25:05 PM	Helium valve opened
3/22/2011	10:25:05 PM	Main Vac valve opened
3/22/2011	10:25:05 PM	Bypass valve opened
3/22/2011	10:25:05 PM	Helium MFC set to  100.000000
3/22/2011	10:25:05 PM	H2 MFC set to  0.000000
3/22/2011	10:25:05 PM	BCl3 MFC set to  0.000000
3/22/2011	10:25:05 PM	PHl3 MFC set to  0.000000
3/22/2011	10:25:05 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:25:05 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:25:05 PM	Tube furnace set to 0
3/22/2011	10:26:05 PM	Helium valve closed
3/22/2011	10:26:05 PM	H2 valve closed
3/22/2011	10:26:05 PM	BCl3 valve closed
3/22/2011	10:26:05 PM	PH3 valve closed
3/22/2011	10:26:05 PM	SiCl4 pre valve closed
3/22/2011	10:26:05 PM	SiCl4 post valve closed
3/22/2011	10:26:05 PM	Bubbler valve closed
3/22/2011	10:26:05 PM	Main Vac valve opened
3/22/2011	10:26:05 PM	Bypass valve opened
3/22/2011	10:26:05 PM	Helium MFC set to  0.000000
3/22/2011	10:26:05 PM	H2 MFC set to  0.000000
3/22/2011	10:26:05 PM	BCl3 MFC set to  0.000000
3/22/2011	10:26:05 PM	PHl3 MFC set to  0.000000
3/22/2011	10:26:05 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:26:05 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:26:05 PM	Tube furnace set to 0
3/22/2011	10:27:05 PM	H2 valve closed
3/22/2011	10:27:05 PM	BCl3 valve closed
3/22/2011	10:27:05 PM	PH3 valve closed
3/22/2011	10:27:05 PM	SiCl4 pre valve closed
3/22/2011	10:27:05 PM	SiCl4 post valve closed
3/22/2011	10:27:05 PM	Bubbler valve closed
3/22/2011	10:27:05 PM	Helium valve opened
3/22/2011	10:27:05 PM	Main Vac valve opened
3/22/2011	10:27:05 PM	Bypass valve opened
3/22/2011	10:27:05 PM	Helium MFC set to  100.000000
3/22/2011	10:27:05 PM	H2 MFC set to  0.000000
3/22/2011	10:27:05 PM	BCl3 MFC set to  0.000000
3/22/2011	10:27:05 PM	PHl3 MFC set to  0.000000
3/22/2011	10:27:05 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:27:05 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:27:05 PM	Tube furnace set to 0
3/22/2011	10:28:05 PM	Helium valve closed
3/22/2011	10:28:05 PM	H2 valve closed
3/22/2011	10:28:05 PM	BCl3 valve closed
3/22/2011	10:28:05 PM	PH3 valve closed
3/22/2011	10:28:05 PM	SiCl4 pre valve closed
3/22/2011	10:28:05 PM	SiCl4 post valve closed
3/22/2011	10:28:05 PM	Bubbler valve closed
3/22/2011	10:28:05 PM	Main Vac valve opened
3/22/2011	10:28:05 PM	Bypass valve opened
3/22/2011	10:28:05 PM	Helium MFC set to  0.000000
3/22/2011	10:28:05 PM	H2 MFC set to  0.000000
3/22/2011	10:28:05 PM	BCl3 MFC set to  0.000000
3/22/2011	10:28:05 PM	PHl3 MFC set to  0.000000
3/22/2011	10:28:05 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:28:05 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:28:05 PM	Tube furnace set to 0
3/22/2011	10:29:05 PM	H2 valve closed
3/22/2011	10:29:05 PM	BCl3 valve closed
3/22/2011	10:29:05 PM	PH3 valve closed
3/22/2011	10:29:05 PM	SiCl4 pre valve closed
3/22/2011	10:29:05 PM	SiCl4 post valve closed
3/22/2011	10:29:05 PM	Bubbler valve closed
3/22/2011	10:29:05 PM	Helium valve opened
3/22/2011	10:29:05 PM	Main Vac valve opened
3/22/2011	10:29:05 PM	Bypass valve opened
3/22/2011	10:29:05 PM	Helium MFC set to  100.000000
3/22/2011	10:29:05 PM	H2 MFC set to  0.000000
3/22/2011	10:29:05 PM	BCl3 MFC set to  0.000000
3/22/2011	10:29:05 PM	PHl3 MFC set to  0.000000
3/22/2011	10:29:05 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:29:05 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:29:06 PM	Tube furnace set to 0
3/22/2011	10:30:06 PM	Helium valve closed
3/22/2011	10:30:06 PM	H2 valve closed
3/22/2011	10:30:06 PM	BCl3 valve closed
3/22/2011	10:30:06 PM	PH3 valve closed
3/22/2011	10:30:06 PM	SiCl4 pre valve closed
3/22/2011	10:30:06 PM	SiCl4 post valve closed
3/22/2011	10:30:06 PM	Bubbler valve closed
3/22/2011	10:30:06 PM	Main Vac valve opened
3/22/2011	10:30:06 PM	Bypass valve opened
3/22/2011	10:30:06 PM	Helium MFC set to  0.000000
3/22/2011	10:30:06 PM	H2 MFC set to  0.000000
3/22/2011	10:30:06 PM	BCl3 MFC set to  0.000000
3/22/2011	10:30:06 PM	PHl3 MFC set to  0.000000
3/22/2011	10:30:06 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:30:06 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:30:06 PM	Tube furnace set to 0
3/22/2011	10:31:06 PM	H2 valve closed
3/22/2011	10:31:06 PM	BCl3 valve closed
3/22/2011	10:31:06 PM	PH3 valve closed
3/22/2011	10:31:06 PM	SiCl4 pre valve closed
3/22/2011	10:31:06 PM	SiCl4 post valve closed
3/22/2011	10:31:06 PM	Bubbler valve closed
3/22/2011	10:31:06 PM	Helium valve opened
3/22/2011	10:31:06 PM	Main Vac valve opened
3/22/2011	10:31:06 PM	Bypass valve opened
3/22/2011	10:31:06 PM	Helium MFC set to  100.000000
3/22/2011	10:31:06 PM	H2 MFC set to  0.000000
3/22/2011	10:31:06 PM	BCl3 MFC set to  0.000000
3/22/2011	10:31:06 PM	PHl3 MFC set to  0.000000
3/22/2011	10:31:06 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:31:06 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:31:06 PM	Tube furnace set to 0
3/22/2011	10:32:06 PM	Helium valve closed
3/22/2011	10:32:06 PM	H2 valve closed
3/22/2011	10:32:06 PM	BCl3 valve closed
3/22/2011	10:32:06 PM	PH3 valve closed
3/22/2011	10:32:06 PM	SiCl4 pre valve closed
3/22/2011	10:32:06 PM	SiCl4 post valve closed
3/22/2011	10:32:06 PM	Bubbler valve closed
3/22/2011	10:32:06 PM	Main Vac valve opened
3/22/2011	10:32:06 PM	Bypass valve opened
3/22/2011	10:32:06 PM	Helium MFC set to  0.000000
3/22/2011	10:32:06 PM	H2 MFC set to  0.000000
3/22/2011	10:32:06 PM	BCl3 MFC set to  0.000000
3/22/2011	10:32:06 PM	PHl3 MFC set to  0.000000
3/22/2011	10:32:06 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:32:06 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:32:06 PM	Tube furnace set to 0
3/22/2011	10:32:25 PM	Run aborted at 10:32 PM
3/22/2011	10:32:26 PM	Helium valve closed
3/22/2011	10:32:26 PM	H2 valve closed
3/22/2011	10:32:26 PM	BCl3 valve closed
3/22/2011	10:32:26 PM	PH3 valve closed
3/22/2011	10:32:26 PM	SiCl4 pre valve closed
3/22/2011	10:32:26 PM	SiCl4 post valve closed
3/22/2011	10:32:26 PM	Bypass valve closed
3/22/2011	10:32:26 PM	Main Vac valve closed
3/22/2011	10:32:26 PM	Bubbler valve closed
3/22/2011	10:32:26 PM	Helium MFC set to  0.000000
3/22/2011	10:32:26 PM	H2 MFC set to  0.000000
3/22/2011	10:32:26 PM	BCl3 MFC set to  0.000000
3/22/2011	10:32:26 PM	PHl3 MFC set to  0.000000
3/22/2011	10:32:26 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:32:26 PM	Tube furnace set to 0
3/22/2011	10:32:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	10:32:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	10:32:27 PM	Recipe started at 10:32 PM
3/22/2011	10:32:27 PM	Helium valve closed
3/22/2011	10:32:27 PM	H2 valve closed
3/22/2011	10:32:27 PM	BCl3 valve closed
3/22/2011	10:32:27 PM	PH3 valve closed
3/22/2011	10:32:27 PM	SiCl4 pre valve closed
3/22/2011	10:32:27 PM	SiCl4 post valve closed
3/22/2011	10:32:27 PM	Main Vac valve closed
3/22/2011	10:32:27 PM	Bubbler valve closed
3/22/2011	10:32:27 PM	Bypass valve opened
3/22/2011	10:32:27 PM	Helium MFC set to  0.000000
3/22/2011	10:32:27 PM	H2 MFC set to  0.000000
3/22/2011	10:32:27 PM	BCl3 MFC set to  0.000000
3/22/2011	10:32:27 PM	PHl3 MFC set to  0.000000
3/22/2011	10:32:27 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:32:27 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:32:27 PM	Tube furnace set to 0
3/22/2011	10:32:28 PM	Helium valve closed
3/22/2011	10:32:28 PM	H2 valve closed
3/22/2011	10:32:28 PM	BCl3 valve closed
3/22/2011	10:32:28 PM	PH3 valve closed
3/22/2011	10:32:28 PM	SiCl4 pre valve closed
3/22/2011	10:32:28 PM	SiCl4 post valve closed
3/22/2011	10:32:28 PM	Bubbler valve closed
3/22/2011	10:32:28 PM	Main Vac valve opened
3/22/2011	10:32:28 PM	Bypass valve opened
3/22/2011	10:32:28 PM	Helium MFC set to  0.000000
3/22/2011	10:32:28 PM	H2 MFC set to  0.000000
3/22/2011	10:32:28 PM	BCl3 MFC set to  0.000000
3/22/2011	10:32:28 PM	PHl3 MFC set to  0.000000
3/22/2011	10:32:28 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:32:28 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:32:28 PM	Tube furnace set to 0
3/22/2011	10:32:28 PM	Run finished at 10:32 PM
3/22/2011	10:32:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/22/2011	10:32:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/22/2011	10:32:47 PM	Recipe started at 10:32 PM
3/22/2011	10:32:47 PM	Helium valve closed
3/22/2011	10:32:47 PM	H2 valve closed
3/22/2011	10:32:47 PM	BCl3 valve closed
3/22/2011	10:32:47 PM	PH3 valve closed
3/22/2011	10:32:47 PM	SiCl4 pre valve closed
3/22/2011	10:32:47 PM	SiCl4 post valve closed
3/22/2011	10:32:47 PM	Main Vac valve closed
3/22/2011	10:32:47 PM	Bubbler valve closed
3/22/2011	10:32:47 PM	Bypass valve opened
3/22/2011	10:32:47 PM	Helium MFC set to  0.000000
3/22/2011	10:32:47 PM	H2 MFC set to  0.000000
3/22/2011	10:32:47 PM	BCl3 MFC set to  0.000000
3/22/2011	10:32:47 PM	PHl3 MFC set to  0.000000
3/22/2011	10:32:47 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:32:47 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:32:47 PM	Tube furnace set to 0
3/22/2011	10:32:47 PM	Helium valve closed
3/22/2011	10:32:47 PM	H2 valve closed
3/22/2011	10:32:47 PM	BCl3 valve closed
3/22/2011	10:32:47 PM	PH3 valve closed
3/22/2011	10:32:47 PM	SiCl4 pre valve closed
3/22/2011	10:32:47 PM	SiCl4 post valve closed
3/22/2011	10:32:47 PM	Bubbler valve closed
3/22/2011	10:32:47 PM	Main Vac valve opened
3/22/2011	10:32:47 PM	Bypass valve opened
3/22/2011	10:32:47 PM	Helium MFC set to  0.000000
3/22/2011	10:32:47 PM	H2 MFC set to  0.000000
3/22/2011	10:32:47 PM	BCl3 MFC set to  0.000000
3/22/2011	10:32:47 PM	PHl3 MFC set to  0.000000
3/22/2011	10:32:47 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:32:47 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:32:47 PM	Tube furnace set to 0
3/22/2011	10:33:47 PM	H2 valve closed
3/22/2011	10:33:47 PM	BCl3 valve closed
3/22/2011	10:33:47 PM	PH3 valve closed
3/22/2011	10:33:47 PM	SiCl4 pre valve closed
3/22/2011	10:33:47 PM	SiCl4 post valve closed
3/22/2011	10:33:47 PM	Bubbler valve closed
3/22/2011	10:33:47 PM	Helium valve opened
3/22/2011	10:33:47 PM	Main Vac valve opened
3/22/2011	10:33:47 PM	Bypass valve opened
3/22/2011	10:33:47 PM	Helium MFC set to  100.000000
3/22/2011	10:33:47 PM	H2 MFC set to  0.000000
3/22/2011	10:33:47 PM	BCl3 MFC set to  0.000000
3/22/2011	10:33:47 PM	PHl3 MFC set to  0.000000
3/22/2011	10:33:47 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:33:47 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:33:47 PM	Tube furnace set to 0
3/22/2011	10:34:47 PM	Helium valve closed
3/22/2011	10:34:47 PM	H2 valve closed
3/22/2011	10:34:47 PM	BCl3 valve closed
3/22/2011	10:34:47 PM	PH3 valve closed
3/22/2011	10:34:47 PM	SiCl4 pre valve closed
3/22/2011	10:34:47 PM	SiCl4 post valve closed
3/22/2011	10:34:47 PM	Bubbler valve closed
3/22/2011	10:34:47 PM	Main Vac valve opened
3/22/2011	10:34:47 PM	Bypass valve opened
3/22/2011	10:34:47 PM	Helium MFC set to  0.000000
3/22/2011	10:34:47 PM	H2 MFC set to  0.000000
3/22/2011	10:34:47 PM	BCl3 MFC set to  0.000000
3/22/2011	10:34:47 PM	PHl3 MFC set to  0.000000
3/22/2011	10:34:47 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:34:47 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:34:48 PM	Tube furnace set to 0
3/22/2011	10:35:48 PM	H2 valve closed
3/22/2011	10:35:48 PM	BCl3 valve closed
3/22/2011	10:35:48 PM	PH3 valve closed
3/22/2011	10:35:48 PM	SiCl4 pre valve closed
3/22/2011	10:35:48 PM	SiCl4 post valve closed
3/22/2011	10:35:48 PM	Bubbler valve closed
3/22/2011	10:35:48 PM	Helium valve opened
3/22/2011	10:35:48 PM	Main Vac valve opened
3/22/2011	10:35:48 PM	Bypass valve opened
3/22/2011	10:35:48 PM	Helium MFC set to  100.000000
3/22/2011	10:35:48 PM	H2 MFC set to  0.000000
3/22/2011	10:35:48 PM	BCl3 MFC set to  0.000000
3/22/2011	10:35:48 PM	PHl3 MFC set to  0.000000
3/22/2011	10:35:48 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:35:48 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:35:48 PM	Tube furnace set to 0
3/22/2011	10:36:48 PM	Helium valve closed
3/22/2011	10:36:48 PM	H2 valve closed
3/22/2011	10:36:48 PM	BCl3 valve closed
3/22/2011	10:36:48 PM	PH3 valve closed
3/22/2011	10:36:48 PM	SiCl4 pre valve closed
3/22/2011	10:36:48 PM	SiCl4 post valve closed
3/22/2011	10:36:48 PM	Bubbler valve closed
3/22/2011	10:36:48 PM	Main Vac valve opened
3/22/2011	10:36:48 PM	Bypass valve opened
3/22/2011	10:36:48 PM	Helium MFC set to  0.000000
3/22/2011	10:36:48 PM	H2 MFC set to  0.000000
3/22/2011	10:36:48 PM	BCl3 MFC set to  0.000000
3/22/2011	10:36:48 PM	PHl3 MFC set to  0.000000
3/22/2011	10:36:48 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:36:48 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:36:48 PM	Tube furnace set to 0
3/22/2011	10:37:48 PM	H2 valve closed
3/22/2011	10:37:48 PM	BCl3 valve closed
3/22/2011	10:37:48 PM	PH3 valve closed
3/22/2011	10:37:48 PM	SiCl4 pre valve closed
3/22/2011	10:37:48 PM	SiCl4 post valve closed
3/22/2011	10:37:48 PM	Bubbler valve closed
3/22/2011	10:37:48 PM	Helium valve opened
3/22/2011	10:37:48 PM	Main Vac valve opened
3/22/2011	10:37:48 PM	Bypass valve opened
3/22/2011	10:37:48 PM	Helium MFC set to  100.000000
3/22/2011	10:37:48 PM	H2 MFC set to  0.000000
3/22/2011	10:37:48 PM	BCl3 MFC set to  0.000000
3/22/2011	10:37:48 PM	PHl3 MFC set to  0.000000
3/22/2011	10:37:48 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:37:48 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:37:48 PM	Tube furnace set to 0
3/22/2011	10:38:48 PM	Helium valve closed
3/22/2011	10:38:48 PM	H2 valve closed
3/22/2011	10:38:48 PM	BCl3 valve closed
3/22/2011	10:38:48 PM	PH3 valve closed
3/22/2011	10:38:48 PM	SiCl4 pre valve closed
3/22/2011	10:38:48 PM	SiCl4 post valve closed
3/22/2011	10:38:48 PM	Bubbler valve closed
3/22/2011	10:38:48 PM	Main Vac valve opened
3/22/2011	10:38:48 PM	Bypass valve opened
3/22/2011	10:38:48 PM	Helium MFC set to  0.000000
3/22/2011	10:38:48 PM	H2 MFC set to  0.000000
3/22/2011	10:38:48 PM	BCl3 MFC set to  0.000000
3/22/2011	10:38:48 PM	PHl3 MFC set to  0.000000
3/22/2011	10:38:48 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:38:48 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:38:48 PM	Tube furnace set to 0
3/22/2011	10:39:48 PM	H2 valve closed
3/22/2011	10:39:48 PM	BCl3 valve closed
3/22/2011	10:39:48 PM	PH3 valve closed
3/22/2011	10:39:48 PM	SiCl4 pre valve closed
3/22/2011	10:39:48 PM	SiCl4 post valve closed
3/22/2011	10:39:48 PM	Bubbler valve closed
3/22/2011	10:39:48 PM	Helium valve opened
3/22/2011	10:39:48 PM	Main Vac valve opened
3/22/2011	10:39:48 PM	Bypass valve opened
3/22/2011	10:39:48 PM	Helium MFC set to  100.000000
3/22/2011	10:39:48 PM	H2 MFC set to  0.000000
3/22/2011	10:39:48 PM	BCl3 MFC set to  0.000000
3/22/2011	10:39:48 PM	PHl3 MFC set to  0.000000
3/22/2011	10:39:48 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:39:48 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:39:49 PM	Tube furnace set to 0
3/22/2011	10:40:49 PM	Helium valve closed
3/22/2011	10:40:49 PM	H2 valve closed
3/22/2011	10:40:49 PM	BCl3 valve closed
3/22/2011	10:40:49 PM	PH3 valve closed
3/22/2011	10:40:49 PM	SiCl4 pre valve closed
3/22/2011	10:40:49 PM	SiCl4 post valve closed
3/22/2011	10:40:49 PM	Bubbler valve closed
3/22/2011	10:40:49 PM	Main Vac valve opened
3/22/2011	10:40:49 PM	Bypass valve opened
3/22/2011	10:40:49 PM	Helium MFC set to  0.000000
3/22/2011	10:40:49 PM	H2 MFC set to  0.000000
3/22/2011	10:40:49 PM	BCl3 MFC set to  0.000000
3/22/2011	10:40:49 PM	PHl3 MFC set to  0.000000
3/22/2011	10:40:49 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:40:49 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:40:49 PM	Tube furnace set to 0
3/22/2011	10:41:49 PM	H2 valve closed
3/22/2011	10:41:49 PM	BCl3 valve closed
3/22/2011	10:41:49 PM	PH3 valve closed
3/22/2011	10:41:49 PM	SiCl4 pre valve closed
3/22/2011	10:41:49 PM	SiCl4 post valve closed
3/22/2011	10:41:49 PM	Bubbler valve closed
3/22/2011	10:41:49 PM	Helium valve opened
3/22/2011	10:41:49 PM	Main Vac valve opened
3/22/2011	10:41:49 PM	Bypass valve opened
3/22/2011	10:41:49 PM	Helium MFC set to  100.000000
3/22/2011	10:41:49 PM	H2 MFC set to  0.000000
3/22/2011	10:41:49 PM	BCl3 MFC set to  0.000000
3/22/2011	10:41:49 PM	PHl3 MFC set to  0.000000
3/22/2011	10:41:49 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:41:49 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:41:49 PM	Tube furnace set to 0
3/22/2011	10:42:49 PM	Helium valve closed
3/22/2011	10:42:49 PM	H2 valve closed
3/22/2011	10:42:49 PM	BCl3 valve closed
3/22/2011	10:42:49 PM	PH3 valve closed
3/22/2011	10:42:49 PM	SiCl4 pre valve closed
3/22/2011	10:42:49 PM	SiCl4 post valve closed
3/22/2011	10:42:49 PM	Bubbler valve closed
3/22/2011	10:42:49 PM	Main Vac valve opened
3/22/2011	10:42:49 PM	Bypass valve opened
3/22/2011	10:42:49 PM	Helium MFC set to  0.000000
3/22/2011	10:42:49 PM	H2 MFC set to  0.000000
3/22/2011	10:42:49 PM	BCl3 MFC set to  0.000000
3/22/2011	10:42:49 PM	PHl3 MFC set to  0.000000
3/22/2011	10:42:49 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:42:49 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:42:49 PM	Tube furnace set to 0
3/22/2011	10:43:49 PM	H2 valve closed
3/22/2011	10:43:49 PM	BCl3 valve closed
3/22/2011	10:43:49 PM	PH3 valve closed
3/22/2011	10:43:49 PM	SiCl4 pre valve closed
3/22/2011	10:43:49 PM	SiCl4 post valve closed
3/22/2011	10:43:49 PM	Bubbler valve closed
3/22/2011	10:43:49 PM	Helium valve opened
3/22/2011	10:43:49 PM	Main Vac valve opened
3/22/2011	10:43:49 PM	Bypass valve opened
3/22/2011	10:43:49 PM	Helium MFC set to  100.000000
3/22/2011	10:43:49 PM	H2 MFC set to  0.000000
3/22/2011	10:43:49 PM	BCl3 MFC set to  0.000000
3/22/2011	10:43:49 PM	PHl3 MFC set to  0.000000
3/22/2011	10:43:49 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:43:49 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:43:49 PM	Tube furnace set to 0
3/22/2011	10:44:49 PM	Helium valve closed
3/22/2011	10:44:49 PM	H2 valve closed
3/22/2011	10:44:49 PM	BCl3 valve closed
3/22/2011	10:44:49 PM	PH3 valve closed
3/22/2011	10:44:49 PM	SiCl4 pre valve closed
3/22/2011	10:44:49 PM	SiCl4 post valve closed
3/22/2011	10:44:49 PM	Bubbler valve closed
3/22/2011	10:44:49 PM	Main Vac valve opened
3/22/2011	10:44:49 PM	Bypass valve opened
3/22/2011	10:44:49 PM	Helium MFC set to  0.000000
3/22/2011	10:44:49 PM	H2 MFC set to  0.000000
3/22/2011	10:44:49 PM	BCl3 MFC set to  0.000000
3/22/2011	10:44:49 PM	PHl3 MFC set to  0.000000
3/22/2011	10:44:49 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:44:49 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:44:50 PM	Tube furnace set to 0
3/22/2011	10:45:50 PM	H2 valve closed
3/22/2011	10:45:50 PM	BCl3 valve closed
3/22/2011	10:45:50 PM	PH3 valve closed
3/22/2011	10:45:50 PM	SiCl4 pre valve closed
3/22/2011	10:45:50 PM	SiCl4 post valve closed
3/22/2011	10:45:50 PM	Bubbler valve closed
3/22/2011	10:45:50 PM	Helium valve opened
3/22/2011	10:45:50 PM	Main Vac valve opened
3/22/2011	10:45:50 PM	Bypass valve opened
3/22/2011	10:45:50 PM	Helium MFC set to  100.000000
3/22/2011	10:45:50 PM	H2 MFC set to  0.000000
3/22/2011	10:45:50 PM	BCl3 MFC set to  0.000000
3/22/2011	10:45:50 PM	PHl3 MFC set to  0.000000
3/22/2011	10:45:50 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:45:50 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:45:50 PM	Tube furnace set to 0
3/22/2011	10:46:50 PM	Helium valve closed
3/22/2011	10:46:50 PM	H2 valve closed
3/22/2011	10:46:50 PM	BCl3 valve closed
3/22/2011	10:46:50 PM	PH3 valve closed
3/22/2011	10:46:50 PM	SiCl4 pre valve closed
3/22/2011	10:46:50 PM	SiCl4 post valve closed
3/22/2011	10:46:50 PM	Bubbler valve closed
3/22/2011	10:46:50 PM	Main Vac valve opened
3/22/2011	10:46:50 PM	Bypass valve opened
3/22/2011	10:46:50 PM	Helium MFC set to  0.000000
3/22/2011	10:46:50 PM	H2 MFC set to  0.000000
3/22/2011	10:46:50 PM	BCl3 MFC set to  0.000000
3/22/2011	10:46:50 PM	PHl3 MFC set to  0.000000
3/22/2011	10:46:50 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:46:50 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:46:50 PM	Tube furnace set to 0
3/22/2011	10:47:50 PM	H2 valve closed
3/22/2011	10:47:50 PM	BCl3 valve closed
3/22/2011	10:47:50 PM	PH3 valve closed
3/22/2011	10:47:50 PM	SiCl4 pre valve closed
3/22/2011	10:47:50 PM	SiCl4 post valve closed
3/22/2011	10:47:50 PM	Bubbler valve closed
3/22/2011	10:47:50 PM	Helium valve opened
3/22/2011	10:47:50 PM	Main Vac valve opened
3/22/2011	10:47:50 PM	Bypass valve opened
3/22/2011	10:47:50 PM	Helium MFC set to  100.000000
3/22/2011	10:47:50 PM	H2 MFC set to  0.000000
3/22/2011	10:47:50 PM	BCl3 MFC set to  0.000000
3/22/2011	10:47:50 PM	PHl3 MFC set to  0.000000
3/22/2011	10:47:50 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:47:50 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:47:50 PM	Tube furnace set to 0
3/22/2011	10:48:50 PM	Helium valve closed
3/22/2011	10:48:50 PM	H2 valve closed
3/22/2011	10:48:50 PM	BCl3 valve closed
3/22/2011	10:48:50 PM	PH3 valve closed
3/22/2011	10:48:50 PM	SiCl4 pre valve closed
3/22/2011	10:48:50 PM	SiCl4 post valve closed
3/22/2011	10:48:50 PM	Bubbler valve closed
3/22/2011	10:48:50 PM	Main Vac valve opened
3/22/2011	10:48:50 PM	Bypass valve opened
3/22/2011	10:48:50 PM	Helium MFC set to  0.000000
3/22/2011	10:48:50 PM	H2 MFC set to  0.000000
3/22/2011	10:48:50 PM	BCl3 MFC set to  0.000000
3/22/2011	10:48:50 PM	PHl3 MFC set to  0.000000
3/22/2011	10:48:50 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:48:50 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:48:50 PM	Tube furnace set to 0
3/22/2011	10:49:50 PM	H2 valve closed
3/22/2011	10:49:50 PM	BCl3 valve closed
3/22/2011	10:49:50 PM	PH3 valve closed
3/22/2011	10:49:50 PM	SiCl4 pre valve closed
3/22/2011	10:49:50 PM	SiCl4 post valve closed
3/22/2011	10:49:50 PM	Bubbler valve closed
3/22/2011	10:49:50 PM	Helium valve opened
3/22/2011	10:49:50 PM	Main Vac valve opened
3/22/2011	10:49:50 PM	Bypass valve opened
3/22/2011	10:49:50 PM	Helium MFC set to  100.000000
3/22/2011	10:49:50 PM	H2 MFC set to  0.000000
3/22/2011	10:49:50 PM	BCl3 MFC set to  0.000000
3/22/2011	10:49:50 PM	PHl3 MFC set to  0.000000
3/22/2011	10:49:50 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:49:50 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:49:51 PM	Tube furnace set to 0
3/22/2011	10:50:51 PM	Helium valve closed
3/22/2011	10:50:51 PM	H2 valve closed
3/22/2011	10:50:51 PM	BCl3 valve closed
3/22/2011	10:50:51 PM	PH3 valve closed
3/22/2011	10:50:51 PM	SiCl4 pre valve closed
3/22/2011	10:50:51 PM	SiCl4 post valve closed
3/22/2011	10:50:51 PM	Bubbler valve closed
3/22/2011	10:50:51 PM	Main Vac valve opened
3/22/2011	10:50:51 PM	Bypass valve opened
3/22/2011	10:50:51 PM	Helium MFC set to  0.000000
3/22/2011	10:50:51 PM	H2 MFC set to  0.000000
3/22/2011	10:50:51 PM	BCl3 MFC set to  0.000000
3/22/2011	10:50:51 PM	PHl3 MFC set to  0.000000
3/22/2011	10:50:51 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:50:51 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:50:51 PM	Tube furnace set to 0
3/22/2011	10:51:51 PM	H2 valve closed
3/22/2011	10:51:51 PM	BCl3 valve closed
3/22/2011	10:51:51 PM	PH3 valve closed
3/22/2011	10:51:51 PM	SiCl4 pre valve closed
3/22/2011	10:51:51 PM	SiCl4 post valve closed
3/22/2011	10:51:51 PM	Bubbler valve closed
3/22/2011	10:51:51 PM	Helium valve opened
3/22/2011	10:51:51 PM	Main Vac valve opened
3/22/2011	10:51:51 PM	Bypass valve opened
3/22/2011	10:51:51 PM	Helium MFC set to  100.000000
3/22/2011	10:51:51 PM	H2 MFC set to  0.000000
3/22/2011	10:51:51 PM	BCl3 MFC set to  0.000000
3/22/2011	10:51:51 PM	PHl3 MFC set to  0.000000
3/22/2011	10:51:51 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:51:51 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:51:51 PM	Tube furnace set to 0
3/22/2011	10:52:51 PM	Helium valve closed
3/22/2011	10:52:51 PM	H2 valve closed
3/22/2011	10:52:51 PM	BCl3 valve closed
3/22/2011	10:52:51 PM	PH3 valve closed
3/22/2011	10:52:51 PM	SiCl4 pre valve closed
3/22/2011	10:52:51 PM	SiCl4 post valve closed
3/22/2011	10:52:51 PM	Bubbler valve closed
3/22/2011	10:52:51 PM	Main Vac valve opened
3/22/2011	10:52:51 PM	Bypass valve opened
3/22/2011	10:52:51 PM	Helium MFC set to  0.000000
3/22/2011	10:52:51 PM	H2 MFC set to  0.000000
3/22/2011	10:52:51 PM	BCl3 MFC set to  0.000000
3/22/2011	10:52:51 PM	PHl3 MFC set to  0.000000
3/22/2011	10:52:51 PM	SiCl4 MFC set to  0.000000
3/22/2011	10:52:51 PM	Bypass solenoid MFC set to  0.000000
3/22/2011	10:52:51 PM	Tube furnace set to 0
3/22/2011	10:52:52 PM	Run finished at 10:52 PM
3/22/2011	10:52:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
